1/10/2012	9:31:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2012	9:31:32 AM	Recipe started at 9:31 AM
1/10/2012	9:31:32 AM	Helium valve closed
1/10/2012	9:31:32 AM	H2 valve closed
1/10/2012	9:31:32 AM	BCl3 valve closed
1/10/2012	9:31:32 AM	PH3 valve closed
1/10/2012	9:31:32 AM	SiCl4 pre valve closed
1/10/2012	9:31:32 AM	SiCl4 post valve closed
1/10/2012	9:31:32 AM	Main Vac valve closed
1/10/2012	9:31:32 AM	Bypass valve closed
1/10/2012	9:31:32 AM	Bubbler valve closed
1/10/2012	9:31:32 AM	Helium MFC set to  0.000000
1/10/2012	9:31:32 AM	H2 MFC set to  0.000000
1/10/2012	9:31:32 AM	BCl3 MFC set to  0.000000
1/10/2012	9:31:32 AM	PH3 MFC set to  0.000000
1/10/2012	9:31:32 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:31:32 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:31:32 AM	Tube furnace set to 0
1/10/2012	9:31:35 AM	H2 valve closed
1/10/2012	9:31:35 AM	BCl3 valve closed
1/10/2012	9:31:35 AM	PH3 valve closed
1/10/2012	9:31:35 AM	SiCl4 pre valve closed
1/10/2012	9:31:35 AM	SiCl4 post valve closed
1/10/2012	9:31:35 AM	Main Vac valve closed
1/10/2012	9:31:35 AM	Bypass valve closed
1/10/2012	9:31:35 AM	Bubbler valve closed
1/10/2012	9:31:35 AM	Helium valve opened
1/10/2012	9:31:35 AM	Helium MFC set to  500.000000
1/10/2012	9:31:35 AM	H2 MFC set to  0.000000
1/10/2012	9:31:35 AM	BCl3 MFC set to  0.000000
1/10/2012	9:31:35 AM	PH3 MFC set to  0.000000
1/10/2012	9:31:35 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:31:35 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:31:35 AM	Tube furnace set to 0
1/10/2012	9:32:40 AM	Helium valve closed
1/10/2012	9:32:40 AM	H2 valve closed
1/10/2012	9:32:40 AM	BCl3 valve closed
1/10/2012	9:32:40 AM	PH3 valve closed
1/10/2012	9:32:40 AM	SiCl4 pre valve closed
1/10/2012	9:32:40 AM	SiCl4 post valve closed
1/10/2012	9:32:40 AM	Main Vac valve closed
1/10/2012	9:32:40 AM	Bypass valve closed
1/10/2012	9:32:40 AM	Bubbler valve closed
1/10/2012	9:32:40 AM	Helium MFC set to  0.000000
1/10/2012	9:32:40 AM	H2 MFC set to  0.000000
1/10/2012	9:32:40 AM	BCl3 MFC set to  0.000000
1/10/2012	9:32:40 AM	PH3 MFC set to  0.000000
1/10/2012	9:32:40 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:32:40 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:32:40 AM	Tube furnace set to 0
1/10/2012	9:32:41 AM	Run finished at 9:32 AM
1/10/2012	9:32:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2012	9:36:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2012	9:36:57 AM	Recipe started at 9:36 AM
1/10/2012	9:36:57 AM	Helium valve closed
1/10/2012	9:36:57 AM	H2 valve closed
1/10/2012	9:36:57 AM	BCl3 valve closed
1/10/2012	9:36:57 AM	PH3 valve closed
1/10/2012	9:36:57 AM	SiCl4 pre valve closed
1/10/2012	9:36:57 AM	SiCl4 post valve closed
1/10/2012	9:36:57 AM	Main Vac valve closed
1/10/2012	9:36:57 AM	Bubbler valve closed
1/10/2012	9:36:57 AM	Bypass valve opened
1/10/2012	9:36:57 AM	Helium MFC set to  0.000000
1/10/2012	9:36:57 AM	H2 MFC set to  0.000000
1/10/2012	9:36:57 AM	BCl3 MFC set to  0.000000
1/10/2012	9:36:57 AM	PH3 MFC set to  0.000000
1/10/2012	9:36:57 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:36:57 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:36:57 AM	Tube furnace set to 0
1/10/2012	9:37:53 AM	Helium valve closed
1/10/2012	9:37:53 AM	H2 valve closed
1/10/2012	9:37:53 AM	BCl3 valve closed
1/10/2012	9:37:53 AM	PH3 valve closed
1/10/2012	9:37:53 AM	SiCl4 pre valve closed
1/10/2012	9:37:53 AM	SiCl4 post valve closed
1/10/2012	9:37:53 AM	Main Vac valve closed
1/10/2012	9:37:53 AM	Bubbler valve closed
1/10/2012	9:37:53 AM	Bypass valve opened
1/10/2012	9:37:53 AM	Helium MFC set to  0.000000
1/10/2012	9:37:53 AM	H2 MFC set to  0.000000
1/10/2012	9:37:53 AM	BCl3 MFC set to  0.000000
1/10/2012	9:37:53 AM	PH3 MFC set to  0.000000
1/10/2012	9:37:53 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:37:53 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:37:54 AM	Tube furnace set to 0
1/10/2012	9:38:54 AM	Helium valve closed
1/10/2012	9:38:54 AM	H2 valve closed
1/10/2012	9:38:54 AM	BCl3 valve closed
1/10/2012	9:38:54 AM	PH3 valve closed
1/10/2012	9:38:54 AM	SiCl4 pre valve closed
1/10/2012	9:38:54 AM	SiCl4 post valve closed
1/10/2012	9:38:54 AM	Bypass valve closed
1/10/2012	9:38:54 AM	Bubbler valve closed
1/10/2012	9:38:54 AM	Main Vac valve opened
1/10/2012	9:38:54 AM	Helium MFC set to  0.000000
1/10/2012	9:38:54 AM	H2 MFC set to  0.000000
1/10/2012	9:38:54 AM	BCl3 MFC set to  0.000000
1/10/2012	9:38:54 AM	PH3 MFC set to  0.000000
1/10/2012	9:38:54 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:38:54 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:38:54 AM	Tube furnace set to 0
1/10/2012	9:38:55 AM	Run finished at 9:38 AM
1/10/2012	9:38:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2012	9:52:09 AM	Recipe started at 9:52 AM
1/10/2012	9:52:09 AM	Helium valve closed
1/10/2012	9:52:09 AM	H2 valve closed
1/10/2012	9:52:09 AM	BCl3 valve closed
1/10/2012	9:52:09 AM	PH3 valve closed
1/10/2012	9:52:09 AM	SiCl4 pre valve closed
1/10/2012	9:52:09 AM	SiCl4 post valve closed
1/10/2012	9:52:09 AM	Bypass valve closed
1/10/2012	9:52:09 AM	Bubbler valve closed
1/10/2012	9:52:09 AM	Main Vac valve opened
1/10/2012	9:52:09 AM	Helium MFC set to  0.000000
1/10/2012	9:52:09 AM	H2 MFC set to  0.000000
1/10/2012	9:52:09 AM	BCl3 MFC set to  0.000000
1/10/2012	9:52:09 AM	PH3 MFC set to  0.000000
1/10/2012	9:52:09 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:52:09 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:52:09 AM	Tube furnace set to 0
1/10/2012	9:52:39 AM	H2 valve closed
1/10/2012	9:52:39 AM	BCl3 valve closed
1/10/2012	9:52:39 AM	PH3 valve closed
1/10/2012	9:52:39 AM	SiCl4 pre valve closed
1/10/2012	9:52:39 AM	SiCl4 post valve closed
1/10/2012	9:52:39 AM	Bypass valve closed
1/10/2012	9:52:39 AM	Bubbler valve closed
1/10/2012	9:52:39 AM	Helium valve opened
1/10/2012	9:52:39 AM	Main Vac valve opened
1/10/2012	9:52:39 AM	Helium MFC set to  20.000000
1/10/2012	9:52:39 AM	H2 MFC set to  0.000000
1/10/2012	9:52:39 AM	BCl3 MFC set to  0.000000
1/10/2012	9:52:39 AM	PH3 MFC set to  0.000000
1/10/2012	9:52:39 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:52:39 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:52:40 AM	Tube furnace set to 0
1/10/2012	9:53:10 AM	Helium valve closed
1/10/2012	9:53:10 AM	H2 valve closed
1/10/2012	9:53:10 AM	BCl3 valve closed
1/10/2012	9:53:10 AM	PH3 valve closed
1/10/2012	9:53:10 AM	SiCl4 pre valve closed
1/10/2012	9:53:10 AM	SiCl4 post valve closed
1/10/2012	9:53:10 AM	Bypass valve closed
1/10/2012	9:53:10 AM	Bubbler valve closed
1/10/2012	9:53:10 AM	Main Vac valve opened
1/10/2012	9:53:10 AM	Helium MFC set to  0.000000
1/10/2012	9:53:10 AM	H2 MFC set to  0.000000
1/10/2012	9:53:10 AM	BCl3 MFC set to  0.000000
1/10/2012	9:53:10 AM	PH3 MFC set to  0.000000
1/10/2012	9:53:10 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:53:10 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:53:10 AM	Tube furnace set to 0
1/10/2012	9:53:40 AM	H2 valve closed
1/10/2012	9:53:40 AM	BCl3 valve closed
1/10/2012	9:53:40 AM	PH3 valve closed
1/10/2012	9:53:40 AM	SiCl4 pre valve closed
1/10/2012	9:53:40 AM	SiCl4 post valve closed
1/10/2012	9:53:40 AM	Bypass valve closed
1/10/2012	9:53:40 AM	Bubbler valve closed
1/10/2012	9:53:40 AM	Helium valve opened
1/10/2012	9:53:40 AM	Main Vac valve opened
1/10/2012	9:53:40 AM	Helium MFC set to  20.000000
1/10/2012	9:53:40 AM	H2 MFC set to  0.000000
1/10/2012	9:53:40 AM	BCl3 MFC set to  0.000000
1/10/2012	9:53:40 AM	PH3 MFC set to  0.000000
1/10/2012	9:53:40 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:53:40 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:53:40 AM	Tube furnace set to 0
1/10/2012	9:54:10 AM	Helium valve closed
1/10/2012	9:54:10 AM	H2 valve closed
1/10/2012	9:54:10 AM	BCl3 valve closed
1/10/2012	9:54:10 AM	PH3 valve closed
1/10/2012	9:54:10 AM	SiCl4 pre valve closed
1/10/2012	9:54:10 AM	SiCl4 post valve closed
1/10/2012	9:54:10 AM	Bypass valve closed
1/10/2012	9:54:10 AM	Bubbler valve closed
1/10/2012	9:54:10 AM	Main Vac valve opened
1/10/2012	9:54:10 AM	Helium MFC set to  0.000000
1/10/2012	9:54:10 AM	H2 MFC set to  0.000000
1/10/2012	9:54:10 AM	BCl3 MFC set to  0.000000
1/10/2012	9:54:10 AM	PH3 MFC set to  0.000000
1/10/2012	9:54:10 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:54:10 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:54:10 AM	Tube furnace set to 0
1/10/2012	9:54:40 AM	H2 valve closed
1/10/2012	9:54:40 AM	BCl3 valve closed
1/10/2012	9:54:40 AM	PH3 valve closed
1/10/2012	9:54:40 AM	SiCl4 pre valve closed
1/10/2012	9:54:40 AM	SiCl4 post valve closed
1/10/2012	9:54:40 AM	Bypass valve closed
1/10/2012	9:54:40 AM	Bubbler valve closed
1/10/2012	9:54:40 AM	Helium valve opened
1/10/2012	9:54:40 AM	Main Vac valve opened
1/10/2012	9:54:40 AM	Helium MFC set to  20.000000
1/10/2012	9:54:40 AM	H2 MFC set to  0.000000
1/10/2012	9:54:40 AM	BCl3 MFC set to  0.000000
1/10/2012	9:54:40 AM	PH3 MFC set to  0.000000
1/10/2012	9:54:40 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:54:40 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:54:40 AM	Tube furnace set to 0
1/10/2012	9:55:10 AM	Helium valve closed
1/10/2012	9:55:10 AM	H2 valve closed
1/10/2012	9:55:10 AM	BCl3 valve closed
1/10/2012	9:55:10 AM	PH3 valve closed
1/10/2012	9:55:11 AM	SiCl4 pre valve closed
1/10/2012	9:55:11 AM	SiCl4 post valve closed
1/10/2012	9:55:11 AM	Bypass valve closed
1/10/2012	9:55:11 AM	Bubbler valve closed
1/10/2012	9:55:11 AM	Main Vac valve opened
1/10/2012	9:55:11 AM	Helium MFC set to  0.000000
1/10/2012	9:55:11 AM	H2 MFC set to  0.000000
1/10/2012	9:55:11 AM	BCl3 MFC set to  0.000000
1/10/2012	9:55:11 AM	PH3 MFC set to  0.000000
1/10/2012	9:55:11 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:55:11 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:55:11 AM	Tube furnace set to 0
1/10/2012	9:55:41 AM	H2 valve closed
1/10/2012	9:55:41 AM	BCl3 valve closed
1/10/2012	9:55:41 AM	PH3 valve closed
1/10/2012	9:55:41 AM	SiCl4 pre valve closed
1/10/2012	9:55:41 AM	SiCl4 post valve closed
1/10/2012	9:55:41 AM	Bypass valve closed
1/10/2012	9:55:41 AM	Bubbler valve closed
1/10/2012	9:55:41 AM	Helium valve opened
1/10/2012	9:55:41 AM	Main Vac valve opened
1/10/2012	9:55:41 AM	Helium MFC set to  20.000000
1/10/2012	9:55:41 AM	H2 MFC set to  0.000000
1/10/2012	9:55:41 AM	BCl3 MFC set to  0.000000
1/10/2012	9:55:41 AM	PH3 MFC set to  0.000000
1/10/2012	9:55:41 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:55:41 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:55:41 AM	Tube furnace set to 0
1/10/2012	9:56:11 AM	Helium valve closed
1/10/2012	9:56:11 AM	H2 valve closed
1/10/2012	9:56:11 AM	BCl3 valve closed
1/10/2012	9:56:11 AM	PH3 valve closed
1/10/2012	9:56:11 AM	SiCl4 pre valve closed
1/10/2012	9:56:11 AM	SiCl4 post valve closed
1/10/2012	9:56:11 AM	Bypass valve closed
1/10/2012	9:56:11 AM	Bubbler valve closed
1/10/2012	9:56:11 AM	Main Vac valve opened
1/10/2012	9:56:11 AM	Helium MFC set to  0.000000
1/10/2012	9:56:11 AM	H2 MFC set to  0.000000
1/10/2012	9:56:11 AM	BCl3 MFC set to  0.000000
1/10/2012	9:56:11 AM	PH3 MFC set to  0.000000
1/10/2012	9:56:11 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:56:11 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:56:11 AM	Tube furnace set to 0
1/10/2012	9:56:41 AM	H2 valve closed
1/10/2012	9:56:41 AM	BCl3 valve closed
1/10/2012	9:56:41 AM	PH3 valve closed
1/10/2012	9:56:41 AM	SiCl4 pre valve closed
1/10/2012	9:56:41 AM	SiCl4 post valve closed
1/10/2012	9:56:41 AM	Bypass valve closed
1/10/2012	9:56:41 AM	Bubbler valve closed
1/10/2012	9:56:41 AM	Helium valve opened
1/10/2012	9:56:41 AM	Main Vac valve opened
1/10/2012	9:56:41 AM	Helium MFC set to  20.000000
1/10/2012	9:56:41 AM	H2 MFC set to  0.000000
1/10/2012	9:56:41 AM	BCl3 MFC set to  0.000000
1/10/2012	9:56:41 AM	PH3 MFC set to  0.000000
1/10/2012	9:56:41 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:56:41 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:56:41 AM	Tube furnace set to 0
1/10/2012	9:57:11 AM	Helium valve closed
1/10/2012	9:57:11 AM	H2 valve closed
1/10/2012	9:57:11 AM	BCl3 valve closed
1/10/2012	9:57:11 AM	PH3 valve closed
1/10/2012	9:57:11 AM	SiCl4 pre valve closed
1/10/2012	9:57:11 AM	SiCl4 post valve closed
1/10/2012	9:57:11 AM	Bypass valve closed
1/10/2012	9:57:11 AM	Bubbler valve closed
1/10/2012	9:57:11 AM	Main Vac valve opened
1/10/2012	9:57:11 AM	Helium MFC set to  0.000000
1/10/2012	9:57:11 AM	H2 MFC set to  0.000000
1/10/2012	9:57:11 AM	BCl3 MFC set to  0.000000
1/10/2012	9:57:11 AM	PH3 MFC set to  0.000000
1/10/2012	9:57:11 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:57:11 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:57:11 AM	Tube furnace set to 0
1/10/2012	9:57:42 AM	H2 valve closed
1/10/2012	9:57:42 AM	BCl3 valve closed
1/10/2012	9:57:42 AM	PH3 valve closed
1/10/2012	9:57:42 AM	SiCl4 pre valve closed
1/10/2012	9:57:42 AM	SiCl4 post valve closed
1/10/2012	9:57:42 AM	Bypass valve closed
1/10/2012	9:57:42 AM	Bubbler valve closed
1/10/2012	9:57:42 AM	Helium valve opened
1/10/2012	9:57:42 AM	Main Vac valve opened
1/10/2012	9:57:42 AM	Helium MFC set to  20.000000
1/10/2012	9:57:42 AM	H2 MFC set to  0.000000
1/10/2012	9:57:42 AM	BCl3 MFC set to  0.000000
1/10/2012	9:57:42 AM	PH3 MFC set to  0.000000
1/10/2012	9:57:42 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:57:42 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:57:42 AM	Tube furnace set to 0
1/10/2012	9:58:12 AM	Helium valve closed
1/10/2012	9:58:12 AM	H2 valve closed
1/10/2012	9:58:12 AM	BCl3 valve closed
1/10/2012	9:58:12 AM	PH3 valve closed
1/10/2012	9:58:12 AM	SiCl4 pre valve closed
1/10/2012	9:58:12 AM	SiCl4 post valve closed
1/10/2012	9:58:12 AM	Bypass valve closed
1/10/2012	9:58:12 AM	Bubbler valve closed
1/10/2012	9:58:12 AM	Main Vac valve opened
1/10/2012	9:58:12 AM	Helium MFC set to  0.000000
1/10/2012	9:58:12 AM	H2 MFC set to  0.000000
1/10/2012	9:58:12 AM	BCl3 MFC set to  0.000000
1/10/2012	9:58:12 AM	PH3 MFC set to  0.000000
1/10/2012	9:58:12 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:58:12 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:58:12 AM	Tube furnace set to 0
1/10/2012	9:58:42 AM	H2 valve closed
1/10/2012	9:58:42 AM	BCl3 valve closed
1/10/2012	9:58:42 AM	PH3 valve closed
1/10/2012	9:58:42 AM	SiCl4 pre valve closed
1/10/2012	9:58:42 AM	SiCl4 post valve closed
1/10/2012	9:58:42 AM	Bypass valve closed
1/10/2012	9:58:42 AM	Bubbler valve closed
1/10/2012	9:58:42 AM	Helium valve opened
1/10/2012	9:58:42 AM	Main Vac valve opened
1/10/2012	9:58:42 AM	Helium MFC set to  20.000000
1/10/2012	9:58:42 AM	H2 MFC set to  0.000000
1/10/2012	9:58:42 AM	BCl3 MFC set to  0.000000
1/10/2012	9:58:42 AM	PH3 MFC set to  0.000000
1/10/2012	9:58:42 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:58:42 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:58:42 AM	Tube furnace set to 0
1/10/2012	9:59:12 AM	Helium valve closed
1/10/2012	9:59:12 AM	H2 valve closed
1/10/2012	9:59:12 AM	BCl3 valve closed
1/10/2012	9:59:12 AM	PH3 valve closed
1/10/2012	9:59:12 AM	SiCl4 pre valve closed
1/10/2012	9:59:12 AM	SiCl4 post valve closed
1/10/2012	9:59:12 AM	Bypass valve closed
1/10/2012	9:59:12 AM	Bubbler valve closed
1/10/2012	9:59:12 AM	Main Vac valve opened
1/10/2012	9:59:12 AM	Helium MFC set to  0.000000
1/10/2012	9:59:12 AM	H2 MFC set to  0.000000
1/10/2012	9:59:12 AM	BCl3 MFC set to  0.000000
1/10/2012	9:59:12 AM	PH3 MFC set to  0.000000
1/10/2012	9:59:12 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:59:12 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:59:12 AM	Tube furnace set to 0
1/10/2012	9:59:42 AM	H2 valve closed
1/10/2012	9:59:42 AM	BCl3 valve closed
1/10/2012	9:59:42 AM	PH3 valve closed
1/10/2012	9:59:42 AM	SiCl4 pre valve closed
1/10/2012	9:59:42 AM	SiCl4 post valve closed
1/10/2012	9:59:42 AM	Bypass valve closed
1/10/2012	9:59:42 AM	Bubbler valve closed
1/10/2012	9:59:42 AM	Helium valve opened
1/10/2012	9:59:42 AM	Main Vac valve opened
1/10/2012	9:59:42 AM	Helium MFC set to  20.000000
1/10/2012	9:59:42 AM	H2 MFC set to  0.000000
1/10/2012	9:59:42 AM	BCl3 MFC set to  0.000000
1/10/2012	9:59:42 AM	PH3 MFC set to  0.000000
1/10/2012	9:59:42 AM	SiCl4 MFC set to  0.000000
1/10/2012	9:59:42 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:59:43 AM	Tube furnace set to 0
1/10/2012	10:00:13 AM	Helium valve closed
1/10/2012	10:00:13 AM	H2 valve closed
1/10/2012	10:00:13 AM	BCl3 valve closed
1/10/2012	10:00:13 AM	PH3 valve closed
1/10/2012	10:00:13 AM	SiCl4 pre valve closed
1/10/2012	10:00:13 AM	SiCl4 post valve closed
1/10/2012	10:00:13 AM	Bypass valve closed
1/10/2012	10:00:13 AM	Bubbler valve closed
1/10/2012	10:00:13 AM	Main Vac valve opened
1/10/2012	10:00:13 AM	Helium MFC set to  0.000000
1/10/2012	10:00:13 AM	H2 MFC set to  0.000000
1/10/2012	10:00:13 AM	BCl3 MFC set to  0.000000
1/10/2012	10:00:13 AM	PH3 MFC set to  0.000000
1/10/2012	10:00:13 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:00:13 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:00:13 AM	Tube furnace set to 0
1/10/2012	10:00:43 AM	H2 valve closed
1/10/2012	10:00:43 AM	BCl3 valve closed
1/10/2012	10:00:43 AM	PH3 valve closed
1/10/2012	10:00:43 AM	SiCl4 pre valve closed
1/10/2012	10:00:43 AM	SiCl4 post valve closed
1/10/2012	10:00:43 AM	Bypass valve closed
1/10/2012	10:00:43 AM	Bubbler valve closed
1/10/2012	10:00:43 AM	Helium valve opened
1/10/2012	10:00:43 AM	Main Vac valve opened
1/10/2012	10:00:43 AM	Helium MFC set to  20.000000
1/10/2012	10:00:43 AM	H2 MFC set to  0.000000
1/10/2012	10:00:43 AM	BCl3 MFC set to  0.000000
1/10/2012	10:00:43 AM	PH3 MFC set to  0.000000
1/10/2012	10:00:43 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:00:43 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:00:43 AM	Tube furnace set to 0
1/10/2012	10:01:13 AM	Helium valve closed
1/10/2012	10:01:13 AM	H2 valve closed
1/10/2012	10:01:13 AM	BCl3 valve closed
1/10/2012	10:01:13 AM	PH3 valve closed
1/10/2012	10:01:13 AM	SiCl4 pre valve closed
1/10/2012	10:01:13 AM	SiCl4 post valve closed
1/10/2012	10:01:13 AM	Bypass valve closed
1/10/2012	10:01:13 AM	Bubbler valve closed
1/10/2012	10:01:13 AM	Main Vac valve opened
1/10/2012	10:01:13 AM	Helium MFC set to  0.000000
1/10/2012	10:01:13 AM	H2 MFC set to  0.000000
1/10/2012	10:01:13 AM	BCl3 MFC set to  0.000000
1/10/2012	10:01:13 AM	PH3 MFC set to  0.000000
1/10/2012	10:01:13 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:01:13 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:01:13 AM	Tube furnace set to 200
1/10/2012	10:01:43 AM	H2 valve closed
1/10/2012	10:01:43 AM	BCl3 valve closed
1/10/2012	10:01:43 AM	PH3 valve closed
1/10/2012	10:01:43 AM	SiCl4 pre valve closed
1/10/2012	10:01:43 AM	SiCl4 post valve closed
1/10/2012	10:01:43 AM	Bypass valve closed
1/10/2012	10:01:43 AM	Bubbler valve closed
1/10/2012	10:01:43 AM	Helium valve opened
1/10/2012	10:01:43 AM	Main Vac valve opened
1/10/2012	10:01:43 AM	Helium MFC set to  20.000000
1/10/2012	10:01:43 AM	H2 MFC set to  0.000000
1/10/2012	10:01:43 AM	BCl3 MFC set to  0.000000
1/10/2012	10:01:43 AM	PH3 MFC set to  0.000000
1/10/2012	10:01:43 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:01:43 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:01:43 AM	Tube furnace set to 200
1/10/2012	10:02:13 AM	Helium valve closed
1/10/2012	10:02:13 AM	H2 valve closed
1/10/2012	10:02:13 AM	BCl3 valve closed
1/10/2012	10:02:13 AM	PH3 valve closed
1/10/2012	10:02:13 AM	SiCl4 pre valve closed
1/10/2012	10:02:13 AM	SiCl4 post valve closed
1/10/2012	10:02:13 AM	Bypass valve closed
1/10/2012	10:02:13 AM	Bubbler valve closed
1/10/2012	10:02:13 AM	Main Vac valve opened
1/10/2012	10:02:13 AM	Helium MFC set to  0.000000
1/10/2012	10:02:13 AM	H2 MFC set to  0.000000
1/10/2012	10:02:13 AM	BCl3 MFC set to  0.000000
1/10/2012	10:02:13 AM	PH3 MFC set to  0.000000
1/10/2012	10:02:13 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:02:13 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:02:14 AM	Tube furnace set to 200
1/10/2012	10:02:44 AM	H2 valve closed
1/10/2012	10:02:44 AM	BCl3 valve closed
1/10/2012	10:02:44 AM	PH3 valve closed
1/10/2012	10:02:44 AM	SiCl4 pre valve closed
1/10/2012	10:02:44 AM	SiCl4 post valve closed
1/10/2012	10:02:44 AM	Bypass valve closed
1/10/2012	10:02:44 AM	Bubbler valve closed
1/10/2012	10:02:44 AM	Helium valve opened
1/10/2012	10:02:44 AM	Main Vac valve opened
1/10/2012	10:02:44 AM	Helium MFC set to  20.000000
1/10/2012	10:02:44 AM	H2 MFC set to  0.000000
1/10/2012	10:02:44 AM	BCl3 MFC set to  0.000000
1/10/2012	10:02:44 AM	PH3 MFC set to  0.000000
1/10/2012	10:02:44 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:02:44 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:02:44 AM	Tube furnace set to 200
1/10/2012	10:03:14 AM	Helium valve closed
1/10/2012	10:03:14 AM	H2 valve closed
1/10/2012	10:03:14 AM	BCl3 valve closed
1/10/2012	10:03:14 AM	PH3 valve closed
1/10/2012	10:03:14 AM	SiCl4 pre valve closed
1/10/2012	10:03:14 AM	SiCl4 post valve closed
1/10/2012	10:03:14 AM	Bypass valve closed
1/10/2012	10:03:14 AM	Bubbler valve closed
1/10/2012	10:03:14 AM	Main Vac valve opened
1/10/2012	10:03:14 AM	Helium MFC set to  0.000000
1/10/2012	10:03:14 AM	H2 MFC set to  0.000000
1/10/2012	10:03:14 AM	BCl3 MFC set to  0.000000
1/10/2012	10:03:14 AM	PH3 MFC set to  0.000000
1/10/2012	10:03:14 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:03:14 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:03:14 AM	Tube furnace set to 200
1/10/2012	10:03:44 AM	H2 valve closed
1/10/2012	10:03:44 AM	BCl3 valve closed
1/10/2012	10:03:44 AM	PH3 valve closed
1/10/2012	10:03:44 AM	SiCl4 pre valve closed
1/10/2012	10:03:44 AM	SiCl4 post valve closed
1/10/2012	10:03:44 AM	Bypass valve closed
1/10/2012	10:03:44 AM	Bubbler valve closed
1/10/2012	10:03:44 AM	Helium valve opened
1/10/2012	10:03:44 AM	Main Vac valve opened
1/10/2012	10:03:44 AM	Helium MFC set to  20.000000
1/10/2012	10:03:44 AM	H2 MFC set to  0.000000
1/10/2012	10:03:44 AM	BCl3 MFC set to  0.000000
1/10/2012	10:03:44 AM	PH3 MFC set to  0.000000
1/10/2012	10:03:44 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:03:44 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:03:44 AM	Tube furnace set to 200
1/10/2012	10:04:14 AM	Helium valve closed
1/10/2012	10:04:14 AM	H2 valve closed
1/10/2012	10:04:14 AM	BCl3 valve closed
1/10/2012	10:04:14 AM	PH3 valve closed
1/10/2012	10:04:14 AM	SiCl4 pre valve closed
1/10/2012	10:04:14 AM	SiCl4 post valve closed
1/10/2012	10:04:14 AM	Bypass valve closed
1/10/2012	10:04:14 AM	Bubbler valve closed
1/10/2012	10:04:14 AM	Main Vac valve opened
1/10/2012	10:04:14 AM	Helium MFC set to  0.000000
1/10/2012	10:04:14 AM	H2 MFC set to  0.000000
1/10/2012	10:04:14 AM	BCl3 MFC set to  0.000000
1/10/2012	10:04:14 AM	PH3 MFC set to  0.000000
1/10/2012	10:04:14 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:04:14 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:04:14 AM	Tube furnace set to 200
1/10/2012	10:04:44 AM	H2 valve closed
1/10/2012	10:04:44 AM	BCl3 valve closed
1/10/2012	10:04:44 AM	PH3 valve closed
1/10/2012	10:04:44 AM	SiCl4 pre valve closed
1/10/2012	10:04:44 AM	SiCl4 post valve closed
1/10/2012	10:04:44 AM	Bypass valve closed
1/10/2012	10:04:44 AM	Bubbler valve closed
1/10/2012	10:04:44 AM	Helium valve opened
1/10/2012	10:04:44 AM	Main Vac valve opened
1/10/2012	10:04:44 AM	Helium MFC set to  20.000000
1/10/2012	10:04:44 AM	H2 MFC set to  0.000000
1/10/2012	10:04:44 AM	BCl3 MFC set to  0.000000
1/10/2012	10:04:44 AM	PH3 MFC set to  0.000000
1/10/2012	10:04:44 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:04:44 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:04:45 AM	Tube furnace set to 200
1/10/2012	10:05:15 AM	Helium valve closed
1/10/2012	10:05:15 AM	H2 valve closed
1/10/2012	10:05:15 AM	BCl3 valve closed
1/10/2012	10:05:15 AM	PH3 valve closed
1/10/2012	10:05:15 AM	SiCl4 pre valve closed
1/10/2012	10:05:15 AM	SiCl4 post valve closed
1/10/2012	10:05:15 AM	Bypass valve closed
1/10/2012	10:05:15 AM	Bubbler valve closed
1/10/2012	10:05:15 AM	Main Vac valve opened
1/10/2012	10:05:15 AM	Helium MFC set to  0.000000
1/10/2012	10:05:15 AM	H2 MFC set to  0.000000
1/10/2012	10:05:15 AM	BCl3 MFC set to  0.000000
1/10/2012	10:05:15 AM	PH3 MFC set to  0.000000
1/10/2012	10:05:15 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:05:15 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:05:15 AM	Tube furnace set to 200
1/10/2012	10:05:45 AM	H2 valve closed
1/10/2012	10:05:45 AM	BCl3 valve closed
1/10/2012	10:05:45 AM	PH3 valve closed
1/10/2012	10:05:45 AM	SiCl4 pre valve closed
1/10/2012	10:05:45 AM	SiCl4 post valve closed
1/10/2012	10:05:45 AM	Bypass valve closed
1/10/2012	10:05:45 AM	Bubbler valve closed
1/10/2012	10:05:45 AM	Helium valve opened
1/10/2012	10:05:45 AM	Main Vac valve opened
1/10/2012	10:05:45 AM	Helium MFC set to  20.000000
1/10/2012	10:05:45 AM	H2 MFC set to  0.000000
1/10/2012	10:05:45 AM	BCl3 MFC set to  0.000000
1/10/2012	10:05:45 AM	PH3 MFC set to  0.000000
1/10/2012	10:05:45 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:05:45 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:05:45 AM	Tube furnace set to 200
1/10/2012	10:06:15 AM	Helium valve closed
1/10/2012	10:06:15 AM	H2 valve closed
1/10/2012	10:06:15 AM	BCl3 valve closed
1/10/2012	10:06:15 AM	PH3 valve closed
1/10/2012	10:06:15 AM	SiCl4 pre valve closed
1/10/2012	10:06:15 AM	SiCl4 post valve closed
1/10/2012	10:06:15 AM	Bypass valve closed
1/10/2012	10:06:15 AM	Bubbler valve closed
1/10/2012	10:06:15 AM	Main Vac valve opened
1/10/2012	10:06:15 AM	Helium MFC set to  0.000000
1/10/2012	10:06:15 AM	H2 MFC set to  0.000000
1/10/2012	10:06:15 AM	BCl3 MFC set to  0.000000
1/10/2012	10:06:15 AM	PH3 MFC set to  0.000000
1/10/2012	10:06:15 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:06:15 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:06:15 AM	Tube furnace set to 200
1/10/2012	10:06:45 AM	H2 valve closed
1/10/2012	10:06:45 AM	BCl3 valve closed
1/10/2012	10:06:45 AM	PH3 valve closed
1/10/2012	10:06:45 AM	SiCl4 pre valve closed
1/10/2012	10:06:45 AM	SiCl4 post valve closed
1/10/2012	10:06:45 AM	Bypass valve closed
1/10/2012	10:06:45 AM	Bubbler valve closed
1/10/2012	10:06:45 AM	Helium valve opened
1/10/2012	10:06:45 AM	Main Vac valve opened
1/10/2012	10:06:45 AM	Helium MFC set to  20.000000
1/10/2012	10:06:45 AM	H2 MFC set to  0.000000
1/10/2012	10:06:45 AM	BCl3 MFC set to  0.000000
1/10/2012	10:06:45 AM	PH3 MFC set to  0.000000
1/10/2012	10:06:45 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:06:45 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:06:45 AM	Tube furnace set to 200
1/10/2012	10:07:15 AM	Helium valve closed
1/10/2012	10:07:15 AM	H2 valve closed
1/10/2012	10:07:15 AM	BCl3 valve closed
1/10/2012	10:07:15 AM	PH3 valve closed
1/10/2012	10:07:15 AM	SiCl4 pre valve closed
1/10/2012	10:07:15 AM	SiCl4 post valve closed
1/10/2012	10:07:15 AM	Bypass valve closed
1/10/2012	10:07:15 AM	Bubbler valve closed
1/10/2012	10:07:15 AM	Main Vac valve opened
1/10/2012	10:07:15 AM	Helium MFC set to  0.000000
1/10/2012	10:07:15 AM	H2 MFC set to  0.000000
1/10/2012	10:07:15 AM	BCl3 MFC set to  0.000000
1/10/2012	10:07:15 AM	PH3 MFC set to  0.000000
1/10/2012	10:07:15 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:07:15 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:07:16 AM	Tube furnace set to 0
1/10/2012	10:07:17 AM	Run finished at 10:07 AM
1/10/2012	10:13:28 AM	Main Vac valve closed
1/10/2012	10:13:45 AM	Main Vac valve opened
1/10/2012	10:15:31 AM	Recipe started at 10:15 AM
1/10/2012	10:15:31 AM	Helium valve closed
1/10/2012	10:15:31 AM	H2 valve closed
1/10/2012	10:15:31 AM	BCl3 valve closed
1/10/2012	10:15:31 AM	PH3 valve closed
1/10/2012	10:15:31 AM	SiCl4 pre valve closed
1/10/2012	10:15:31 AM	SiCl4 post valve closed
1/10/2012	10:15:31 AM	Bypass valve closed
1/10/2012	10:15:31 AM	Bubbler valve closed
1/10/2012	10:15:31 AM	Main Vac valve opened
1/10/2012	10:15:31 AM	Helium MFC set to  0.000000
1/10/2012	10:15:31 AM	H2 MFC set to  0.000000
1/10/2012	10:15:31 AM	BCl3 MFC set to  0.000000
1/10/2012	10:15:31 AM	PH3 MFC set to  0.000000
1/10/2012	10:15:31 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:15:31 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:15:31 AM	Tube furnace set to 0
1/10/2012	10:16:01 AM	H2 valve closed
1/10/2012	10:16:01 AM	BCl3 valve closed
1/10/2012	10:16:01 AM	PH3 valve closed
1/10/2012	10:16:01 AM	SiCl4 pre valve closed
1/10/2012	10:16:01 AM	SiCl4 post valve closed
1/10/2012	10:16:01 AM	Bypass valve closed
1/10/2012	10:16:01 AM	Bubbler valve closed
1/10/2012	10:16:01 AM	Helium valve opened
1/10/2012	10:16:01 AM	Main Vac valve opened
1/10/2012	10:16:01 AM	Helium MFC set to  20.000000
1/10/2012	10:16:01 AM	H2 MFC set to  0.000000
1/10/2012	10:16:01 AM	BCl3 MFC set to  0.000000
1/10/2012	10:16:01 AM	PH3 MFC set to  0.000000
1/10/2012	10:16:01 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:16:01 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:16:01 AM	Tube furnace set to 0
1/10/2012	10:16:31 AM	Helium valve closed
1/10/2012	10:16:31 AM	H2 valve closed
1/10/2012	10:16:31 AM	BCl3 valve closed
1/10/2012	10:16:31 AM	PH3 valve closed
1/10/2012	10:16:31 AM	SiCl4 pre valve closed
1/10/2012	10:16:31 AM	SiCl4 post valve closed
1/10/2012	10:16:31 AM	Bypass valve closed
1/10/2012	10:16:31 AM	Bubbler valve closed
1/10/2012	10:16:31 AM	Main Vac valve opened
1/10/2012	10:16:31 AM	Helium MFC set to  0.000000
1/10/2012	10:16:31 AM	H2 MFC set to  0.000000
1/10/2012	10:16:31 AM	BCl3 MFC set to  0.000000
1/10/2012	10:16:31 AM	PH3 MFC set to  0.000000
1/10/2012	10:16:31 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:16:31 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:16:31 AM	Tube furnace set to 0
1/10/2012	10:17:01 AM	H2 valve closed
1/10/2012	10:17:01 AM	BCl3 valve closed
1/10/2012	10:17:01 AM	PH3 valve closed
1/10/2012	10:17:01 AM	SiCl4 pre valve closed
1/10/2012	10:17:01 AM	SiCl4 post valve closed
1/10/2012	10:17:01 AM	Bypass valve closed
1/10/2012	10:17:01 AM	Bubbler valve closed
1/10/2012	10:17:01 AM	Helium valve opened
1/10/2012	10:17:01 AM	Main Vac valve opened
1/10/2012	10:17:01 AM	Helium MFC set to  20.000000
1/10/2012	10:17:01 AM	H2 MFC set to  0.000000
1/10/2012	10:17:01 AM	BCl3 MFC set to  0.000000
1/10/2012	10:17:01 AM	PH3 MFC set to  0.000000
1/10/2012	10:17:01 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:17:01 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:17:01 AM	Tube furnace set to 0
1/10/2012	10:17:31 AM	Helium valve closed
1/10/2012	10:17:31 AM	H2 valve closed
1/10/2012	10:17:31 AM	BCl3 valve closed
1/10/2012	10:17:31 AM	PH3 valve closed
1/10/2012	10:17:31 AM	SiCl4 pre valve closed
1/10/2012	10:17:31 AM	SiCl4 post valve closed
1/10/2012	10:17:31 AM	Bypass valve closed
1/10/2012	10:17:31 AM	Bubbler valve closed
1/10/2012	10:17:31 AM	Main Vac valve opened
1/10/2012	10:17:31 AM	Helium MFC set to  0.000000
1/10/2012	10:17:31 AM	H2 MFC set to  0.000000
1/10/2012	10:17:31 AM	BCl3 MFC set to  0.000000
1/10/2012	10:17:31 AM	PH3 MFC set to  0.000000
1/10/2012	10:17:31 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:17:31 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:17:32 AM	Tube furnace set to 0
1/10/2012	10:18:02 AM	H2 valve closed
1/10/2012	10:18:02 AM	BCl3 valve closed
1/10/2012	10:18:02 AM	PH3 valve closed
1/10/2012	10:18:02 AM	SiCl4 pre valve closed
1/10/2012	10:18:02 AM	SiCl4 post valve closed
1/10/2012	10:18:02 AM	Bypass valve closed
1/10/2012	10:18:02 AM	Bubbler valve closed
1/10/2012	10:18:02 AM	Helium valve opened
1/10/2012	10:18:02 AM	Main Vac valve opened
1/10/2012	10:18:02 AM	Helium MFC set to  20.000000
1/10/2012	10:18:02 AM	H2 MFC set to  0.000000
1/10/2012	10:18:02 AM	BCl3 MFC set to  0.000000
1/10/2012	10:18:02 AM	PH3 MFC set to  0.000000
1/10/2012	10:18:02 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:18:02 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:18:02 AM	Tube furnace set to 0
1/10/2012	10:18:32 AM	Helium valve closed
1/10/2012	10:18:32 AM	H2 valve closed
1/10/2012	10:18:32 AM	BCl3 valve closed
1/10/2012	10:18:32 AM	PH3 valve closed
1/10/2012	10:18:32 AM	SiCl4 pre valve closed
1/10/2012	10:18:32 AM	SiCl4 post valve closed
1/10/2012	10:18:32 AM	Bypass valve closed
1/10/2012	10:18:32 AM	Bubbler valve closed
1/10/2012	10:18:32 AM	Main Vac valve opened
1/10/2012	10:18:32 AM	Helium MFC set to  0.000000
1/10/2012	10:18:32 AM	H2 MFC set to  0.000000
1/10/2012	10:18:32 AM	BCl3 MFC set to  0.000000
1/10/2012	10:18:32 AM	PH3 MFC set to  0.000000
1/10/2012	10:18:32 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:18:32 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:18:32 AM	Tube furnace set to 0
1/10/2012	10:19:02 AM	H2 valve closed
1/10/2012	10:19:02 AM	BCl3 valve closed
1/10/2012	10:19:02 AM	PH3 valve closed
1/10/2012	10:19:02 AM	SiCl4 pre valve closed
1/10/2012	10:19:02 AM	SiCl4 post valve closed
1/10/2012	10:19:02 AM	Bypass valve closed
1/10/2012	10:19:02 AM	Bubbler valve closed
1/10/2012	10:19:02 AM	Helium valve opened
1/10/2012	10:19:02 AM	Main Vac valve opened
1/10/2012	10:19:02 AM	Helium MFC set to  20.000000
1/10/2012	10:19:02 AM	H2 MFC set to  0.000000
1/10/2012	10:19:02 AM	BCl3 MFC set to  0.000000
1/10/2012	10:19:02 AM	PH3 MFC set to  0.000000
1/10/2012	10:19:02 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:19:02 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:19:02 AM	Tube furnace set to 0
1/10/2012	10:19:32 AM	Helium valve closed
1/10/2012	10:19:32 AM	H2 valve closed
1/10/2012	10:19:32 AM	BCl3 valve closed
1/10/2012	10:19:32 AM	PH3 valve closed
1/10/2012	10:19:32 AM	SiCl4 pre valve closed
1/10/2012	10:19:32 AM	SiCl4 post valve closed
1/10/2012	10:19:32 AM	Bypass valve closed
1/10/2012	10:19:32 AM	Bubbler valve closed
1/10/2012	10:19:32 AM	Main Vac valve opened
1/10/2012	10:19:32 AM	Helium MFC set to  0.000000
1/10/2012	10:19:32 AM	H2 MFC set to  0.000000
1/10/2012	10:19:32 AM	BCl3 MFC set to  0.000000
1/10/2012	10:19:32 AM	PH3 MFC set to  0.000000
1/10/2012	10:19:32 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:19:32 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:19:32 AM	Tube furnace set to 0
1/10/2012	10:20:02 AM	H2 valve closed
1/10/2012	10:20:02 AM	BCl3 valve closed
1/10/2012	10:20:02 AM	PH3 valve closed
1/10/2012	10:20:02 AM	SiCl4 pre valve closed
1/10/2012	10:20:02 AM	SiCl4 post valve closed
1/10/2012	10:20:02 AM	Bypass valve closed
1/10/2012	10:20:02 AM	Bubbler valve closed
1/10/2012	10:20:02 AM	Helium valve opened
1/10/2012	10:20:02 AM	Main Vac valve opened
1/10/2012	10:20:02 AM	Helium MFC set to  20.000000
1/10/2012	10:20:02 AM	H2 MFC set to  0.000000
1/10/2012	10:20:02 AM	BCl3 MFC set to  0.000000
1/10/2012	10:20:02 AM	PH3 MFC set to  0.000000
1/10/2012	10:20:02 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:20:02 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:20:03 AM	Tube furnace set to 0
1/10/2012	10:20:33 AM	Helium valve closed
1/10/2012	10:20:33 AM	H2 valve closed
1/10/2012	10:20:33 AM	BCl3 valve closed
1/10/2012	10:20:33 AM	PH3 valve closed
1/10/2012	10:20:33 AM	SiCl4 pre valve closed
1/10/2012	10:20:33 AM	SiCl4 post valve closed
1/10/2012	10:20:33 AM	Bypass valve closed
1/10/2012	10:20:33 AM	Bubbler valve closed
1/10/2012	10:20:33 AM	Main Vac valve opened
1/10/2012	10:20:33 AM	Helium MFC set to  0.000000
1/10/2012	10:20:33 AM	H2 MFC set to  0.000000
1/10/2012	10:20:33 AM	BCl3 MFC set to  0.000000
1/10/2012	10:20:33 AM	PH3 MFC set to  0.000000
1/10/2012	10:20:33 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:20:33 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:20:33 AM	Tube furnace set to 0
1/10/2012	10:21:03 AM	H2 valve closed
1/10/2012	10:21:03 AM	BCl3 valve closed
1/10/2012	10:21:03 AM	PH3 valve closed
1/10/2012	10:21:03 AM	SiCl4 pre valve closed
1/10/2012	10:21:03 AM	SiCl4 post valve closed
1/10/2012	10:21:03 AM	Bypass valve closed
1/10/2012	10:21:03 AM	Bubbler valve closed
1/10/2012	10:21:03 AM	Helium valve opened
1/10/2012	10:21:03 AM	Main Vac valve opened
1/10/2012	10:21:03 AM	Helium MFC set to  20.000000
1/10/2012	10:21:03 AM	H2 MFC set to  0.000000
1/10/2012	10:21:03 AM	BCl3 MFC set to  0.000000
1/10/2012	10:21:03 AM	PH3 MFC set to  0.000000
1/10/2012	10:21:03 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:21:03 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:21:03 AM	Tube furnace set to 0
1/10/2012	10:21:33 AM	Helium valve closed
1/10/2012	10:21:33 AM	H2 valve closed
1/10/2012	10:21:33 AM	BCl3 valve closed
1/10/2012	10:21:33 AM	PH3 valve closed
1/10/2012	10:21:33 AM	SiCl4 pre valve closed
1/10/2012	10:21:33 AM	SiCl4 post valve closed
1/10/2012	10:21:33 AM	Bypass valve closed
1/10/2012	10:21:33 AM	Bubbler valve closed
1/10/2012	10:21:33 AM	Main Vac valve opened
1/10/2012	10:21:33 AM	Helium MFC set to  0.000000
1/10/2012	10:21:33 AM	H2 MFC set to  0.000000
1/10/2012	10:21:33 AM	BCl3 MFC set to  0.000000
1/10/2012	10:21:33 AM	PH3 MFC set to  0.000000
1/10/2012	10:21:33 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:21:33 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:21:33 AM	Tube furnace set to 0
1/10/2012	10:22:03 AM	H2 valve closed
1/10/2012	10:22:03 AM	BCl3 valve closed
1/10/2012	10:22:03 AM	PH3 valve closed
1/10/2012	10:22:03 AM	SiCl4 pre valve closed
1/10/2012	10:22:03 AM	SiCl4 post valve closed
1/10/2012	10:22:03 AM	Bypass valve closed
1/10/2012	10:22:03 AM	Bubbler valve closed
1/10/2012	10:22:03 AM	Helium valve opened
1/10/2012	10:22:03 AM	Main Vac valve opened
1/10/2012	10:22:03 AM	Helium MFC set to  20.000000
1/10/2012	10:22:03 AM	H2 MFC set to  0.000000
1/10/2012	10:22:03 AM	BCl3 MFC set to  0.000000
1/10/2012	10:22:03 AM	PH3 MFC set to  0.000000
1/10/2012	10:22:03 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:22:03 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:22:03 AM	Tube furnace set to 0
1/10/2012	10:22:33 AM	Helium valve closed
1/10/2012	10:22:33 AM	H2 valve closed
1/10/2012	10:22:33 AM	BCl3 valve closed
1/10/2012	10:22:33 AM	PH3 valve closed
1/10/2012	10:22:33 AM	SiCl4 pre valve closed
1/10/2012	10:22:33 AM	SiCl4 post valve closed
1/10/2012	10:22:33 AM	Bypass valve closed
1/10/2012	10:22:33 AM	Bubbler valve closed
1/10/2012	10:22:33 AM	Main Vac valve opened
1/10/2012	10:22:33 AM	Helium MFC set to  0.000000
1/10/2012	10:22:33 AM	H2 MFC set to  0.000000
1/10/2012	10:22:34 AM	BCl3 MFC set to  0.000000
1/10/2012	10:22:34 AM	PH3 MFC set to  0.000000
1/10/2012	10:22:34 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:22:34 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:22:34 AM	Tube furnace set to 0
1/10/2012	10:23:04 AM	H2 valve closed
1/10/2012	10:23:04 AM	BCl3 valve closed
1/10/2012	10:23:04 AM	PH3 valve closed
1/10/2012	10:23:04 AM	SiCl4 pre valve closed
1/10/2012	10:23:04 AM	SiCl4 post valve closed
1/10/2012	10:23:04 AM	Bypass valve closed
1/10/2012	10:23:04 AM	Bubbler valve closed
1/10/2012	10:23:04 AM	Helium valve opened
1/10/2012	10:23:04 AM	Main Vac valve opened
1/10/2012	10:23:04 AM	Helium MFC set to  20.000000
1/10/2012	10:23:04 AM	H2 MFC set to  0.000000
1/10/2012	10:23:04 AM	BCl3 MFC set to  0.000000
1/10/2012	10:23:04 AM	PH3 MFC set to  0.000000
1/10/2012	10:23:04 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:23:04 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:23:04 AM	Tube furnace set to 0
1/10/2012	10:23:34 AM	Helium valve closed
1/10/2012	10:23:34 AM	H2 valve closed
1/10/2012	10:23:34 AM	BCl3 valve closed
1/10/2012	10:23:34 AM	PH3 valve closed
1/10/2012	10:23:34 AM	SiCl4 pre valve closed
1/10/2012	10:23:34 AM	SiCl4 post valve closed
1/10/2012	10:23:34 AM	Bypass valve closed
1/10/2012	10:23:34 AM	Bubbler valve closed
1/10/2012	10:23:34 AM	Main Vac valve opened
1/10/2012	10:23:34 AM	Helium MFC set to  0.000000
1/10/2012	10:23:34 AM	H2 MFC set to  0.000000
1/10/2012	10:23:34 AM	BCl3 MFC set to  0.000000
1/10/2012	10:23:34 AM	PH3 MFC set to  0.000000
1/10/2012	10:23:34 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:23:34 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:23:34 AM	Tube furnace set to 0
1/10/2012	10:24:04 AM	H2 valve closed
1/10/2012	10:24:04 AM	BCl3 valve closed
1/10/2012	10:24:04 AM	PH3 valve closed
1/10/2012	10:24:04 AM	SiCl4 pre valve closed
1/10/2012	10:24:04 AM	SiCl4 post valve closed
1/10/2012	10:24:04 AM	Bypass valve closed
1/10/2012	10:24:04 AM	Bubbler valve closed
1/10/2012	10:24:04 AM	Helium valve opened
1/10/2012	10:24:04 AM	Main Vac valve opened
1/10/2012	10:24:04 AM	Helium MFC set to  20.000000
1/10/2012	10:24:04 AM	H2 MFC set to  0.000000
1/10/2012	10:24:04 AM	BCl3 MFC set to  0.000000
1/10/2012	10:24:04 AM	PH3 MFC set to  0.000000
1/10/2012	10:24:04 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:24:04 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:24:04 AM	Tube furnace set to 0
1/10/2012	10:24:34 AM	Helium valve closed
1/10/2012	10:24:34 AM	H2 valve closed
1/10/2012	10:24:34 AM	BCl3 valve closed
1/10/2012	10:24:34 AM	PH3 valve closed
1/10/2012	10:24:34 AM	SiCl4 pre valve closed
1/10/2012	10:24:34 AM	SiCl4 post valve closed
1/10/2012	10:24:34 AM	Bypass valve closed
1/10/2012	10:24:34 AM	Bubbler valve closed
1/10/2012	10:24:34 AM	Main Vac valve opened
1/10/2012	10:24:34 AM	Helium MFC set to  0.000000
1/10/2012	10:24:34 AM	H2 MFC set to  0.000000
1/10/2012	10:24:34 AM	BCl3 MFC set to  0.000000
1/10/2012	10:24:34 AM	PH3 MFC set to  0.000000
1/10/2012	10:24:34 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:24:34 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:24:34 AM	Tube furnace set to 200
1/10/2012	10:25:04 AM	H2 valve closed
1/10/2012	10:25:04 AM	BCl3 valve closed
1/10/2012	10:25:05 AM	PH3 valve closed
1/10/2012	10:25:05 AM	SiCl4 pre valve closed
1/10/2012	10:25:05 AM	SiCl4 post valve closed
1/10/2012	10:25:05 AM	Bypass valve closed
1/10/2012	10:25:05 AM	Bubbler valve closed
1/10/2012	10:25:05 AM	Helium valve opened
1/10/2012	10:25:05 AM	Main Vac valve opened
1/10/2012	10:25:05 AM	Helium MFC set to  20.000000
1/10/2012	10:25:05 AM	H2 MFC set to  0.000000
1/10/2012	10:25:05 AM	BCl3 MFC set to  0.000000
1/10/2012	10:25:05 AM	PH3 MFC set to  0.000000
1/10/2012	10:25:05 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:25:05 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:25:05 AM	Tube furnace set to 200
1/10/2012	10:25:35 AM	Helium valve closed
1/10/2012	10:25:35 AM	H2 valve closed
1/10/2012	10:25:35 AM	BCl3 valve closed
1/10/2012	10:25:35 AM	PH3 valve closed
1/10/2012	10:25:35 AM	SiCl4 pre valve closed
1/10/2012	10:25:35 AM	SiCl4 post valve closed
1/10/2012	10:25:35 AM	Bypass valve closed
1/10/2012	10:25:35 AM	Bubbler valve closed
1/10/2012	10:25:35 AM	Main Vac valve opened
1/10/2012	10:25:35 AM	Helium MFC set to  0.000000
1/10/2012	10:25:35 AM	H2 MFC set to  0.000000
1/10/2012	10:25:35 AM	BCl3 MFC set to  0.000000
1/10/2012	10:25:35 AM	PH3 MFC set to  0.000000
1/10/2012	10:25:35 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:25:35 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:25:35 AM	Tube furnace set to 200
1/10/2012	10:26:05 AM	H2 valve closed
1/10/2012	10:26:05 AM	BCl3 valve closed
1/10/2012	10:26:05 AM	PH3 valve closed
1/10/2012	10:26:05 AM	SiCl4 pre valve closed
1/10/2012	10:26:05 AM	SiCl4 post valve closed
1/10/2012	10:26:05 AM	Bypass valve closed
1/10/2012	10:26:05 AM	Bubbler valve closed
1/10/2012	10:26:05 AM	Helium valve opened
1/10/2012	10:26:05 AM	Main Vac valve opened
1/10/2012	10:26:05 AM	Helium MFC set to  20.000000
1/10/2012	10:26:05 AM	H2 MFC set to  0.000000
1/10/2012	10:26:05 AM	BCl3 MFC set to  0.000000
1/10/2012	10:26:05 AM	PH3 MFC set to  0.000000
1/10/2012	10:26:05 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:26:05 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:26:05 AM	Tube furnace set to 200
1/10/2012	10:26:35 AM	Helium valve closed
1/10/2012	10:26:35 AM	H2 valve closed
1/10/2012	10:26:35 AM	BCl3 valve closed
1/10/2012	10:26:35 AM	PH3 valve closed
1/10/2012	10:26:35 AM	SiCl4 pre valve closed
1/10/2012	10:26:35 AM	SiCl4 post valve closed
1/10/2012	10:26:35 AM	Bypass valve closed
1/10/2012	10:26:35 AM	Bubbler valve closed
1/10/2012	10:26:35 AM	Main Vac valve opened
1/10/2012	10:26:35 AM	Helium MFC set to  0.000000
1/10/2012	10:26:35 AM	H2 MFC set to  0.000000
1/10/2012	10:26:35 AM	BCl3 MFC set to  0.000000
1/10/2012	10:26:35 AM	PH3 MFC set to  0.000000
1/10/2012	10:26:35 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:26:35 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:26:35 AM	Tube furnace set to 200
1/10/2012	10:27:05 AM	H2 valve closed
1/10/2012	10:27:05 AM	BCl3 valve closed
1/10/2012	10:27:05 AM	PH3 valve closed
1/10/2012	10:27:05 AM	SiCl4 pre valve closed
1/10/2012	10:27:05 AM	SiCl4 post valve closed
1/10/2012	10:27:05 AM	Bypass valve closed
1/10/2012	10:27:05 AM	Bubbler valve closed
1/10/2012	10:27:05 AM	Helium valve opened
1/10/2012	10:27:05 AM	Main Vac valve opened
1/10/2012	10:27:05 AM	Helium MFC set to  20.000000
1/10/2012	10:27:05 AM	H2 MFC set to  0.000000
1/10/2012	10:27:05 AM	BCl3 MFC set to  0.000000
1/10/2012	10:27:05 AM	PH3 MFC set to  0.000000
1/10/2012	10:27:05 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:27:05 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:27:05 AM	Tube furnace set to 200
1/10/2012	10:27:36 AM	Helium valve closed
1/10/2012	10:27:36 AM	H2 valve closed
1/10/2012	10:27:36 AM	BCl3 valve closed
1/10/2012	10:27:36 AM	PH3 valve closed
1/10/2012	10:27:36 AM	SiCl4 pre valve closed
1/10/2012	10:27:36 AM	SiCl4 post valve closed
1/10/2012	10:27:36 AM	Bypass valve closed
1/10/2012	10:27:36 AM	Bubbler valve closed
1/10/2012	10:27:36 AM	Main Vac valve opened
1/10/2012	10:27:36 AM	Helium MFC set to  0.000000
1/10/2012	10:27:36 AM	H2 MFC set to  0.000000
1/10/2012	10:27:36 AM	BCl3 MFC set to  0.000000
1/10/2012	10:27:36 AM	PH3 MFC set to  0.000000
1/10/2012	10:27:36 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:27:36 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:27:36 AM	Tube furnace set to 200
1/10/2012	10:28:06 AM	H2 valve closed
1/10/2012	10:28:06 AM	BCl3 valve closed
1/10/2012	10:28:06 AM	PH3 valve closed
1/10/2012	10:28:06 AM	SiCl4 pre valve closed
1/10/2012	10:28:06 AM	SiCl4 post valve closed
1/10/2012	10:28:06 AM	Bypass valve closed
1/10/2012	10:28:06 AM	Bubbler valve closed
1/10/2012	10:28:06 AM	Helium valve opened
1/10/2012	10:28:06 AM	Main Vac valve opened
1/10/2012	10:28:06 AM	Helium MFC set to  20.000000
1/10/2012	10:28:06 AM	H2 MFC set to  0.000000
1/10/2012	10:28:06 AM	BCl3 MFC set to  0.000000
1/10/2012	10:28:06 AM	PH3 MFC set to  0.000000
1/10/2012	10:28:06 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:28:06 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:28:06 AM	Tube furnace set to 200
1/10/2012	10:28:36 AM	Helium valve closed
1/10/2012	10:28:36 AM	H2 valve closed
1/10/2012	10:28:36 AM	BCl3 valve closed
1/10/2012	10:28:36 AM	PH3 valve closed
1/10/2012	10:28:36 AM	SiCl4 pre valve closed
1/10/2012	10:28:36 AM	SiCl4 post valve closed
1/10/2012	10:28:36 AM	Bypass valve closed
1/10/2012	10:28:36 AM	Bubbler valve closed
1/10/2012	10:28:36 AM	Main Vac valve opened
1/10/2012	10:28:36 AM	Helium MFC set to  0.000000
1/10/2012	10:28:36 AM	H2 MFC set to  0.000000
1/10/2012	10:28:36 AM	BCl3 MFC set to  0.000000
1/10/2012	10:28:36 AM	PH3 MFC set to  0.000000
1/10/2012	10:28:36 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:28:36 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:28:36 AM	Tube furnace set to 200
1/10/2012	10:29:06 AM	H2 valve closed
1/10/2012	10:29:06 AM	BCl3 valve closed
1/10/2012	10:29:06 AM	PH3 valve closed
1/10/2012	10:29:06 AM	SiCl4 pre valve closed
1/10/2012	10:29:06 AM	SiCl4 post valve closed
1/10/2012	10:29:06 AM	Bypass valve closed
1/10/2012	10:29:06 AM	Bubbler valve closed
1/10/2012	10:29:06 AM	Helium valve opened
1/10/2012	10:29:06 AM	Main Vac valve opened
1/10/2012	10:29:06 AM	Helium MFC set to  20.000000
1/10/2012	10:29:06 AM	H2 MFC set to  0.000000
1/10/2012	10:29:06 AM	BCl3 MFC set to  0.000000
1/10/2012	10:29:06 AM	PH3 MFC set to  0.000000
1/10/2012	10:29:06 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:29:06 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:29:06 AM	Tube furnace set to 200
1/10/2012	10:29:36 AM	Helium valve closed
1/10/2012	10:29:36 AM	H2 valve closed
1/10/2012	10:29:36 AM	BCl3 valve closed
1/10/2012	10:29:36 AM	PH3 valve closed
1/10/2012	10:29:36 AM	SiCl4 pre valve closed
1/10/2012	10:29:36 AM	SiCl4 post valve closed
1/10/2012	10:29:36 AM	Bypass valve closed
1/10/2012	10:29:36 AM	Bubbler valve closed
1/10/2012	10:29:36 AM	Main Vac valve opened
1/10/2012	10:29:36 AM	Helium MFC set to  0.000000
1/10/2012	10:29:36 AM	H2 MFC set to  0.000000
1/10/2012	10:29:36 AM	BCl3 MFC set to  0.000000
1/10/2012	10:29:36 AM	PH3 MFC set to  0.000000
1/10/2012	10:29:36 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:29:36 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:29:36 AM	Tube furnace set to 200
1/10/2012	10:30:07 AM	H2 valve closed
1/10/2012	10:30:07 AM	BCl3 valve closed
1/10/2012	10:30:07 AM	PH3 valve closed
1/10/2012	10:30:07 AM	SiCl4 pre valve closed
1/10/2012	10:30:07 AM	SiCl4 post valve closed
1/10/2012	10:30:07 AM	Bypass valve closed
1/10/2012	10:30:07 AM	Bubbler valve closed
1/10/2012	10:30:07 AM	Helium valve opened
1/10/2012	10:30:07 AM	Main Vac valve opened
1/10/2012	10:30:07 AM	Helium MFC set to  20.000000
1/10/2012	10:30:07 AM	H2 MFC set to  0.000000
1/10/2012	10:30:07 AM	BCl3 MFC set to  0.000000
1/10/2012	10:30:07 AM	PH3 MFC set to  0.000000
1/10/2012	10:30:07 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:30:07 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:30:07 AM	Tube furnace set to 200
1/10/2012	10:30:37 AM	Helium valve closed
1/10/2012	10:30:37 AM	H2 valve closed
1/10/2012	10:30:37 AM	BCl3 valve closed
1/10/2012	10:30:37 AM	PH3 valve closed
1/10/2012	10:30:37 AM	SiCl4 pre valve closed
1/10/2012	10:30:37 AM	SiCl4 post valve closed
1/10/2012	10:30:37 AM	Bypass valve closed
1/10/2012	10:30:37 AM	Bubbler valve closed
1/10/2012	10:30:37 AM	Main Vac valve opened
1/10/2012	10:30:37 AM	Helium MFC set to  0.000000
1/10/2012	10:30:37 AM	H2 MFC set to  0.000000
1/10/2012	10:30:37 AM	BCl3 MFC set to  0.000000
1/10/2012	10:30:37 AM	PH3 MFC set to  0.000000
1/10/2012	10:30:37 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:30:37 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:30:37 AM	Tube furnace set to 0
1/10/2012	10:30:38 AM	Run finished at 10:30 AM
1/10/2012	10:38:57 AM	Main Vac valve closed
1/10/2012	10:39:18 AM	Main Vac valve opened
1/10/2012	10:39:52 AM	Recipe started at 10:39 AM
1/10/2012	10:39:52 AM	Helium valve closed
1/10/2012	10:39:52 AM	H2 valve closed
1/10/2012	10:39:52 AM	BCl3 valve closed
1/10/2012	10:39:52 AM	PH3 valve closed
1/10/2012	10:39:52 AM	SiCl4 pre valve closed
1/10/2012	10:39:52 AM	SiCl4 post valve closed
1/10/2012	10:39:52 AM	Main Vac valve closed
1/10/2012	10:39:52 AM	Bypass valve closed
1/10/2012	10:39:52 AM	Bubbler valve closed
1/10/2012	10:39:52 AM	Helium MFC set to  0.000000
1/10/2012	10:39:52 AM	H2 MFC set to  0.000000
1/10/2012	10:39:52 AM	BCl3 MFC set to  0.000000
1/10/2012	10:39:52 AM	PH3 MFC set to  0.000000
1/10/2012	10:39:52 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:39:52 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:39:52 AM	Tube furnace set to 0
1/10/2012	10:39:55 AM	Helium valve closed
1/10/2012	10:39:55 AM	BCl3 valve closed
1/10/2012	10:39:55 AM	PH3 valve closed
1/10/2012	10:39:55 AM	SiCl4 pre valve closed
1/10/2012	10:39:55 AM	SiCl4 post valve closed
1/10/2012	10:39:55 AM	Main Vac valve closed
1/10/2012	10:39:55 AM	Bypass valve closed
1/10/2012	10:39:55 AM	Bubbler valve closed
1/10/2012	10:39:55 AM	H2 valve opened
1/10/2012	10:39:55 AM	Helium MFC set to  0.000000
1/10/2012	10:39:55 AM	H2 MFC set to  500.000000
1/10/2012	10:39:55 AM	BCl3 MFC set to  0.000000
1/10/2012	10:39:55 AM	PH3 MFC set to  0.000000
1/10/2012	10:39:55 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:39:55 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:39:56 AM	Tube furnace set to 0
1/10/2012	10:40:59 AM	Helium valve closed
1/10/2012	10:40:59 AM	BCl3 valve closed
1/10/2012	10:40:59 AM	PH3 valve closed
1/10/2012	10:40:59 AM	SiCl4 pre valve closed
1/10/2012	10:40:59 AM	SiCl4 post valve closed
1/10/2012	10:40:59 AM	Main Vac valve closed
1/10/2012	10:40:59 AM	Bypass valve closed
1/10/2012	10:40:59 AM	H2 valve opened
1/10/2012	10:40:59 AM	Bubbler valve opened
1/10/2012	10:40:59 AM	Helium MFC set to  0.000000
1/10/2012	10:40:59 AM	H2 MFC set to  500.000000
1/10/2012	10:40:59 AM	BCl3 MFC set to  0.000000
1/10/2012	10:40:59 AM	PH3 MFC set to  0.000000
1/10/2012	10:40:59 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:40:59 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:40:59 AM	Tube furnace set to 0
1/10/2012	10:41:00 AM	Helium valve closed
1/10/2012	10:41:00 AM	BCl3 valve closed
1/10/2012	10:41:00 AM	PH3 valve closed
1/10/2012	10:41:00 AM	SiCl4 pre valve closed
1/10/2012	10:41:00 AM	SiCl4 post valve closed
1/10/2012	10:41:00 AM	Main Vac valve closed
1/10/2012	10:41:00 AM	Bypass valve closed
1/10/2012	10:41:00 AM	H2 valve opened
1/10/2012	10:41:00 AM	Bubbler valve opened
1/10/2012	10:41:00 AM	Helium MFC set to  0.000000
1/10/2012	10:41:00 AM	H2 MFC set to  500.000000
1/10/2012	10:41:00 AM	BCl3 MFC set to  0.000000
1/10/2012	10:41:00 AM	PH3 MFC set to  0.000000
1/10/2012	10:41:00 AM	SiCl4 MFC set to  0.000000
1/10/2012	10:41:00 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:41:00 AM	Tube furnace set to 1000
1/10/2012	11:01:00 AM	Helium valve closed
1/10/2012	11:01:00 AM	BCl3 valve closed
1/10/2012	11:01:00 AM	Main Vac valve closed
1/10/2012	11:01:00 AM	Bypass valve closed
1/10/2012	11:01:00 AM	H2 valve opened
1/10/2012	11:01:00 AM	PH3 valve opened
1/10/2012	11:01:00 AM	SiCl4 pre valve opened
1/10/2012	11:01:00 AM	SiCl4 post valve opened
1/10/2012	11:01:00 AM	Bubbler valve opened
1/10/2012	11:01:00 AM	Helium MFC set to  0.000000
1/10/2012	11:01:00 AM	H2 MFC set to  500.000000
1/10/2012	11:01:00 AM	BCl3 MFC set to  0.000000
1/10/2012	11:01:00 AM	PH3 MFC set to  0.500000
1/10/2012	11:01:00 AM	SiCl4 MFC set to  25.000000
1/10/2012	11:01:00 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:01:01 AM	Tube furnace set to 1000
1/10/2012	11:33:01 AM	Helium valve closed
1/10/2012	11:33:01 AM	BCl3 valve closed
1/10/2012	11:33:01 AM	PH3 valve closed
1/10/2012	11:33:01 AM	SiCl4 pre valve closed
1/10/2012	11:33:01 AM	SiCl4 post valve closed
1/10/2012	11:33:01 AM	Main Vac valve closed
1/10/2012	11:33:01 AM	Bypass valve closed
1/10/2012	11:33:01 AM	H2 valve opened
1/10/2012	11:33:01 AM	Bubbler valve opened
1/10/2012	11:33:01 AM	Helium MFC set to  0.000000
1/10/2012	11:33:01 AM	H2 MFC set to  500.000000
1/10/2012	11:33:01 AM	BCl3 MFC set to  0.000000
1/10/2012	11:33:01 AM	PH3 MFC set to  0.000000
1/10/2012	11:33:01 AM	SiCl4 MFC set to  0.000000
1/10/2012	11:33:01 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:33:01 AM	Tube furnace set to 950
1/10/2012	11:35:01 AM	Helium valve closed
1/10/2012	11:35:01 AM	BCl3 valve closed
1/10/2012	11:35:01 AM	PH3 valve closed
1/10/2012	11:35:01 AM	SiCl4 pre valve closed
1/10/2012	11:35:01 AM	SiCl4 post valve closed
1/10/2012	11:35:01 AM	Main Vac valve closed
1/10/2012	11:35:01 AM	Bypass valve closed
1/10/2012	11:35:01 AM	H2 valve opened
1/10/2012	11:35:01 AM	Bubbler valve opened
1/10/2012	11:35:01 AM	Helium MFC set to  0.000000
1/10/2012	11:35:01 AM	H2 MFC set to  500.000000
1/10/2012	11:35:01 AM	BCl3 MFC set to  0.000000
1/10/2012	11:35:01 AM	PH3 MFC set to  0.000000
1/10/2012	11:35:01 AM	SiCl4 MFC set to  0.000000
1/10/2012	11:35:01 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:35:01 AM	Tube furnace set to 900
1/10/2012	11:37:01 AM	Helium valve closed
1/10/2012	11:37:01 AM	BCl3 valve closed
1/10/2012	11:37:01 AM	PH3 valve closed
1/10/2012	11:37:01 AM	SiCl4 pre valve closed
1/10/2012	11:37:01 AM	SiCl4 post valve closed
1/10/2012	11:37:01 AM	Main Vac valve closed
1/10/2012	11:37:01 AM	Bypass valve closed
1/10/2012	11:37:01 AM	H2 valve opened
1/10/2012	11:37:01 AM	Bubbler valve opened
1/10/2012	11:37:01 AM	Helium MFC set to  0.000000
1/10/2012	11:37:01 AM	H2 MFC set to  500.000000
1/10/2012	11:37:01 AM	BCl3 MFC set to  0.000000
1/10/2012	11:37:01 AM	PH3 MFC set to  0.000000
1/10/2012	11:37:01 AM	SiCl4 MFC set to  0.000000
1/10/2012	11:37:01 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:37:01 AM	Tube furnace set to 850
1/10/2012	11:39:01 AM	H2 valve closed
1/10/2012	11:39:01 AM	BCl3 valve closed
1/10/2012	11:39:01 AM	PH3 valve closed
1/10/2012	11:39:01 AM	SiCl4 pre valve closed
1/10/2012	11:39:01 AM	SiCl4 post valve closed
1/10/2012	11:39:01 AM	Main Vac valve closed
1/10/2012	11:39:01 AM	Bypass valve closed
1/10/2012	11:39:01 AM	Helium valve opened
1/10/2012	11:39:01 AM	Bubbler valve opened
1/10/2012	11:39:01 AM	Helium MFC set to  500.000000
1/10/2012	11:39:01 AM	H2 MFC set to  0.000000
1/10/2012	11:39:01 AM	BCl3 MFC set to  0.000000
1/10/2012	11:39:01 AM	PH3 MFC set to  0.000000
1/10/2012	11:39:01 AM	SiCl4 MFC set to  0.000000
1/10/2012	11:39:01 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:39:01 AM	Tube furnace set to 800
1/10/2012	11:41:01 AM	H2 valve closed
1/10/2012	11:41:01 AM	BCl3 valve closed
1/10/2012	11:41:01 AM	PH3 valve closed
1/10/2012	11:41:01 AM	SiCl4 pre valve closed
1/10/2012	11:41:01 AM	SiCl4 post valve closed
1/10/2012	11:41:01 AM	Main Vac valve closed
1/10/2012	11:41:01 AM	Bypass valve closed
1/10/2012	11:41:01 AM	Helium valve opened
1/10/2012	11:41:01 AM	Bubbler valve opened
1/10/2012	11:41:01 AM	Helium MFC set to  500.000000
1/10/2012	11:41:01 AM	H2 MFC set to  0.000000
1/10/2012	11:41:01 AM	BCl3 MFC set to  0.000000
1/10/2012	11:41:01 AM	PH3 MFC set to  0.000000
1/10/2012	11:41:01 AM	SiCl4 MFC set to  0.000000
1/10/2012	11:41:01 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:41:02 AM	Tube furnace set to 750
1/10/2012	11:43:02 AM	H2 valve closed
1/10/2012	11:43:02 AM	BCl3 valve closed
1/10/2012	11:43:02 AM	PH3 valve closed
1/10/2012	11:43:02 AM	SiCl4 pre valve closed
1/10/2012	11:43:02 AM	SiCl4 post valve closed
1/10/2012	11:43:02 AM	Main Vac valve closed
1/10/2012	11:43:02 AM	Bypass valve closed
1/10/2012	11:43:02 AM	Helium valve opened
1/10/2012	11:43:02 AM	Bubbler valve opened
1/10/2012	11:43:02 AM	Helium MFC set to  500.000000
1/10/2012	11:43:02 AM	H2 MFC set to  0.000000
1/10/2012	11:43:02 AM	BCl3 MFC set to  0.000000
1/10/2012	11:43:02 AM	PH3 MFC set to  0.000000
1/10/2012	11:43:02 AM	SiCl4 MFC set to  0.000000
1/10/2012	11:43:02 AM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:43:02 AM	Tube furnace set to 0
1/10/2012	12:03:02 PM	Helium valve closed
1/10/2012	12:03:02 PM	H2 valve closed
1/10/2012	12:03:02 PM	BCl3 valve closed
1/10/2012	12:03:02 PM	PH3 valve closed
1/10/2012	12:03:02 PM	SiCl4 pre valve closed
1/10/2012	12:03:02 PM	SiCl4 post valve closed
1/10/2012	12:03:02 PM	Main Vac valve closed
1/10/2012	12:03:02 PM	Bypass valve closed
1/10/2012	12:03:02 PM	Bubbler valve closed
1/10/2012	12:03:02 PM	Helium MFC set to  0.000000
1/10/2012	12:03:02 PM	H2 MFC set to  0.000000
1/10/2012	12:03:02 PM	BCl3 MFC set to  0.000000
1/10/2012	12:03:02 PM	PH3 MFC set to  0.000000
1/10/2012	12:03:02 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:03:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:03:02 PM	Tube furnace set to 0
1/10/2012	12:03:03 PM	Run finished at 12:03 PM
1/10/2012	12:34:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2012	12:34:59 PM	Recipe started at 12:34 PM
1/10/2012	12:34:59 PM	Helium valve closed
1/10/2012	12:34:59 PM	H2 valve closed
1/10/2012	12:34:59 PM	BCl3 valve closed
1/10/2012	12:34:59 PM	PH3 valve closed
1/10/2012	12:34:59 PM	SiCl4 pre valve closed
1/10/2012	12:34:59 PM	SiCl4 post valve closed
1/10/2012	12:34:59 PM	Main Vac valve closed
1/10/2012	12:34:59 PM	Bypass valve closed
1/10/2012	12:34:59 PM	Bubbler valve closed
1/10/2012	12:34:59 PM	Helium MFC set to  0.000000
1/10/2012	12:34:59 PM	H2 MFC set to  0.000000
1/10/2012	12:34:59 PM	BCl3 MFC set to  0.000000
1/10/2012	12:34:59 PM	PH3 MFC set to  0.000000
1/10/2012	12:34:59 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:34:59 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:34:59 PM	Tube furnace set to 0
1/10/2012	12:35:03 PM	H2 valve closed
1/10/2012	12:35:03 PM	BCl3 valve closed
1/10/2012	12:35:03 PM	PH3 valve closed
1/10/2012	12:35:03 PM	SiCl4 pre valve closed
1/10/2012	12:35:03 PM	SiCl4 post valve closed
1/10/2012	12:35:03 PM	Main Vac valve closed
1/10/2012	12:35:03 PM	Bypass valve closed
1/10/2012	12:35:03 PM	Bubbler valve closed
1/10/2012	12:35:03 PM	Helium valve opened
1/10/2012	12:35:03 PM	Helium MFC set to  500.000000
1/10/2012	12:35:03 PM	H2 MFC set to  0.000000
1/10/2012	12:35:03 PM	BCl3 MFC set to  0.000000
1/10/2012	12:35:03 PM	PH3 MFC set to  0.000000
1/10/2012	12:35:03 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:35:03 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:35:03 PM	Tube furnace set to 0
1/10/2012	12:35:09 PM	Helium valve closed
1/10/2012	12:35:09 PM	H2 valve closed
1/10/2012	12:35:09 PM	BCl3 valve closed
1/10/2012	12:35:09 PM	PH3 valve closed
1/10/2012	12:35:09 PM	SiCl4 pre valve closed
1/10/2012	12:35:09 PM	SiCl4 post valve closed
1/10/2012	12:35:09 PM	Main Vac valve closed
1/10/2012	12:35:09 PM	Bypass valve closed
1/10/2012	12:35:09 PM	Bubbler valve closed
1/10/2012	12:35:09 PM	Helium MFC set to  0.000000
1/10/2012	12:35:09 PM	H2 MFC set to  0.000000
1/10/2012	12:35:09 PM	BCl3 MFC set to  0.000000
1/10/2012	12:35:09 PM	PH3 MFC set to  0.000000
1/10/2012	12:35:09 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:35:09 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:35:10 PM	Tube furnace set to 0
1/10/2012	12:35:11 PM	Run finished at 12:35 PM
1/10/2012	12:35:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2012	12:40:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2012	12:40:26 PM	Recipe started at 12:40 PM
1/10/2012	12:40:26 PM	Helium valve closed
1/10/2012	12:40:26 PM	H2 valve closed
1/10/2012	12:40:26 PM	BCl3 valve closed
1/10/2012	12:40:26 PM	PH3 valve closed
1/10/2012	12:40:26 PM	SiCl4 pre valve closed
1/10/2012	12:40:26 PM	SiCl4 post valve closed
1/10/2012	12:40:26 PM	Main Vac valve closed
1/10/2012	12:40:26 PM	Bubbler valve closed
1/10/2012	12:40:26 PM	Bypass valve opened
1/10/2012	12:40:26 PM	Helium MFC set to  0.000000
1/10/2012	12:40:26 PM	H2 MFC set to  0.000000
1/10/2012	12:40:26 PM	BCl3 MFC set to  0.000000
1/10/2012	12:40:26 PM	PH3 MFC set to  0.000000
1/10/2012	12:40:26 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:40:26 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:40:26 PM	Tube furnace set to 0
1/10/2012	12:41:24 PM	Helium valve closed
1/10/2012	12:41:24 PM	H2 valve closed
1/10/2012	12:41:24 PM	BCl3 valve closed
1/10/2012	12:41:24 PM	PH3 valve closed
1/10/2012	12:41:24 PM	SiCl4 pre valve closed
1/10/2012	12:41:24 PM	SiCl4 post valve closed
1/10/2012	12:41:24 PM	Main Vac valve closed
1/10/2012	12:41:24 PM	Bubbler valve closed
1/10/2012	12:41:24 PM	Bypass valve opened
1/10/2012	12:41:24 PM	Helium MFC set to  0.000000
1/10/2012	12:41:24 PM	H2 MFC set to  0.000000
1/10/2012	12:41:24 PM	BCl3 MFC set to  0.000000
1/10/2012	12:41:24 PM	PH3 MFC set to  0.000000
1/10/2012	12:41:24 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:41:24 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:41:24 PM	Tube furnace set to 0
1/10/2012	12:42:24 PM	Helium valve closed
1/10/2012	12:42:24 PM	H2 valve closed
1/10/2012	12:42:24 PM	BCl3 valve closed
1/10/2012	12:42:24 PM	PH3 valve closed
1/10/2012	12:42:24 PM	SiCl4 pre valve closed
1/10/2012	12:42:24 PM	SiCl4 post valve closed
1/10/2012	12:42:24 PM	Bypass valve closed
1/10/2012	12:42:24 PM	Bubbler valve closed
1/10/2012	12:42:24 PM	Main Vac valve opened
1/10/2012	12:42:24 PM	Helium MFC set to  0.000000
1/10/2012	12:42:24 PM	H2 MFC set to  0.000000
1/10/2012	12:42:24 PM	BCl3 MFC set to  0.000000
1/10/2012	12:42:24 PM	PH3 MFC set to  0.000000
1/10/2012	12:42:24 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:42:24 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:42:24 PM	Tube furnace set to 0
1/10/2012	12:42:25 PM	Run finished at 12:42 PM
1/10/2012	12:42:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2012	12:52:16 PM	Main Vac valve closed
1/10/2012	12:52:24 PM	Main Vac valve opened
1/10/2012	12:52:56 PM	Recipe started at 12:52 PM
1/10/2012	12:52:56 PM	Helium valve closed
1/10/2012	12:52:56 PM	H2 valve closed
1/10/2012	12:52:56 PM	BCl3 valve closed
1/10/2012	12:52:56 PM	PH3 valve closed
1/10/2012	12:52:56 PM	SiCl4 pre valve closed
1/10/2012	12:52:56 PM	SiCl4 post valve closed
1/10/2012	12:52:56 PM	Bypass valve closed
1/10/2012	12:52:56 PM	Bubbler valve closed
1/10/2012	12:52:56 PM	Main Vac valve opened
1/10/2012	12:52:56 PM	Helium MFC set to  0.000000
1/10/2012	12:52:56 PM	H2 MFC set to  0.000000
1/10/2012	12:52:56 PM	BCl3 MFC set to  0.000000
1/10/2012	12:52:56 PM	PH3 MFC set to  0.000000
1/10/2012	12:52:56 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:52:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:52:56 PM	Tube furnace set to 0
1/10/2012	12:53:26 PM	H2 valve closed
1/10/2012	12:53:26 PM	BCl3 valve closed
1/10/2012	12:53:26 PM	PH3 valve closed
1/10/2012	12:53:26 PM	SiCl4 pre valve closed
1/10/2012	12:53:26 PM	SiCl4 post valve closed
1/10/2012	12:53:26 PM	Bypass valve closed
1/10/2012	12:53:26 PM	Bubbler valve closed
1/10/2012	12:53:26 PM	Helium valve opened
1/10/2012	12:53:26 PM	Main Vac valve opened
1/10/2012	12:53:26 PM	Helium MFC set to  20.000000
1/10/2012	12:53:26 PM	H2 MFC set to  0.000000
1/10/2012	12:53:26 PM	BCl3 MFC set to  0.000000
1/10/2012	12:53:26 PM	PH3 MFC set to  0.000000
1/10/2012	12:53:26 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:53:26 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:53:27 PM	Tube furnace set to 0
1/10/2012	12:53:57 PM	Helium valve closed
1/10/2012	12:53:57 PM	H2 valve closed
1/10/2012	12:53:57 PM	BCl3 valve closed
1/10/2012	12:53:57 PM	PH3 valve closed
1/10/2012	12:53:57 PM	SiCl4 pre valve closed
1/10/2012	12:53:57 PM	SiCl4 post valve closed
1/10/2012	12:53:57 PM	Bypass valve closed
1/10/2012	12:53:57 PM	Bubbler valve closed
1/10/2012	12:53:57 PM	Main Vac valve opened
1/10/2012	12:53:57 PM	Helium MFC set to  0.000000
1/10/2012	12:53:57 PM	H2 MFC set to  0.000000
1/10/2012	12:53:57 PM	BCl3 MFC set to  0.000000
1/10/2012	12:53:57 PM	PH3 MFC set to  0.000000
1/10/2012	12:53:57 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:53:57 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:53:57 PM	Tube furnace set to 0
1/10/2012	12:54:27 PM	H2 valve closed
1/10/2012	12:54:27 PM	BCl3 valve closed
1/10/2012	12:54:27 PM	PH3 valve closed
1/10/2012	12:54:27 PM	SiCl4 pre valve closed
1/10/2012	12:54:27 PM	SiCl4 post valve closed
1/10/2012	12:54:27 PM	Bypass valve closed
1/10/2012	12:54:27 PM	Bubbler valve closed
1/10/2012	12:54:27 PM	Helium valve opened
1/10/2012	12:54:27 PM	Main Vac valve opened
1/10/2012	12:54:27 PM	Helium MFC set to  20.000000
1/10/2012	12:54:27 PM	H2 MFC set to  0.000000
1/10/2012	12:54:27 PM	BCl3 MFC set to  0.000000
1/10/2012	12:54:27 PM	PH3 MFC set to  0.000000
1/10/2012	12:54:27 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:54:27 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:54:27 PM	Tube furnace set to 0
1/10/2012	12:54:57 PM	Helium valve closed
1/10/2012	12:54:57 PM	H2 valve closed
1/10/2012	12:54:57 PM	BCl3 valve closed
1/10/2012	12:54:57 PM	PH3 valve closed
1/10/2012	12:54:57 PM	SiCl4 pre valve closed
1/10/2012	12:54:57 PM	SiCl4 post valve closed
1/10/2012	12:54:57 PM	Bypass valve closed
1/10/2012	12:54:57 PM	Bubbler valve closed
1/10/2012	12:54:57 PM	Main Vac valve opened
1/10/2012	12:54:57 PM	Helium MFC set to  0.000000
1/10/2012	12:54:57 PM	H2 MFC set to  0.000000
1/10/2012	12:54:57 PM	BCl3 MFC set to  0.000000
1/10/2012	12:54:57 PM	PH3 MFC set to  0.000000
1/10/2012	12:54:57 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:54:57 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:54:57 PM	Tube furnace set to 0
1/10/2012	12:55:27 PM	H2 valve closed
1/10/2012	12:55:27 PM	BCl3 valve closed
1/10/2012	12:55:27 PM	PH3 valve closed
1/10/2012	12:55:27 PM	SiCl4 pre valve closed
1/10/2012	12:55:27 PM	SiCl4 post valve closed
1/10/2012	12:55:27 PM	Bypass valve closed
1/10/2012	12:55:27 PM	Bubbler valve closed
1/10/2012	12:55:27 PM	Helium valve opened
1/10/2012	12:55:27 PM	Main Vac valve opened
1/10/2012	12:55:27 PM	Helium MFC set to  20.000000
1/10/2012	12:55:27 PM	H2 MFC set to  0.000000
1/10/2012	12:55:27 PM	BCl3 MFC set to  0.000000
1/10/2012	12:55:27 PM	PH3 MFC set to  0.000000
1/10/2012	12:55:27 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:55:27 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:55:27 PM	Tube furnace set to 0
1/10/2012	12:55:57 PM	Helium valve closed
1/10/2012	12:55:57 PM	H2 valve closed
1/10/2012	12:55:57 PM	BCl3 valve closed
1/10/2012	12:55:57 PM	PH3 valve closed
1/10/2012	12:55:57 PM	SiCl4 pre valve closed
1/10/2012	12:55:57 PM	SiCl4 post valve closed
1/10/2012	12:55:57 PM	Bypass valve closed
1/10/2012	12:55:57 PM	Bubbler valve closed
1/10/2012	12:55:57 PM	Main Vac valve opened
1/10/2012	12:55:57 PM	Helium MFC set to  0.000000
1/10/2012	12:55:57 PM	H2 MFC set to  0.000000
1/10/2012	12:55:57 PM	BCl3 MFC set to  0.000000
1/10/2012	12:55:57 PM	PH3 MFC set to  0.000000
1/10/2012	12:55:57 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:55:57 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:55:58 PM	Tube furnace set to 0
1/10/2012	12:56:28 PM	H2 valve closed
1/10/2012	12:56:28 PM	BCl3 valve closed
1/10/2012	12:56:28 PM	PH3 valve closed
1/10/2012	12:56:28 PM	SiCl4 pre valve closed
1/10/2012	12:56:28 PM	SiCl4 post valve closed
1/10/2012	12:56:28 PM	Bypass valve closed
1/10/2012	12:56:28 PM	Bubbler valve closed
1/10/2012	12:56:28 PM	Helium valve opened
1/10/2012	12:56:28 PM	Main Vac valve opened
1/10/2012	12:56:28 PM	Helium MFC set to  20.000000
1/10/2012	12:56:28 PM	H2 MFC set to  0.000000
1/10/2012	12:56:28 PM	BCl3 MFC set to  0.000000
1/10/2012	12:56:28 PM	PH3 MFC set to  0.000000
1/10/2012	12:56:28 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:56:28 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:56:28 PM	Tube furnace set to 0
1/10/2012	12:56:58 PM	Helium valve closed
1/10/2012	12:56:58 PM	H2 valve closed
1/10/2012	12:56:58 PM	BCl3 valve closed
1/10/2012	12:56:58 PM	PH3 valve closed
1/10/2012	12:56:58 PM	SiCl4 pre valve closed
1/10/2012	12:56:58 PM	SiCl4 post valve closed
1/10/2012	12:56:58 PM	Bypass valve closed
1/10/2012	12:56:58 PM	Bubbler valve closed
1/10/2012	12:56:58 PM	Main Vac valve opened
1/10/2012	12:56:58 PM	Helium MFC set to  0.000000
1/10/2012	12:56:58 PM	H2 MFC set to  0.000000
1/10/2012	12:56:58 PM	BCl3 MFC set to  0.000000
1/10/2012	12:56:58 PM	PH3 MFC set to  0.000000
1/10/2012	12:56:58 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:56:58 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:56:58 PM	Tube furnace set to 0
1/10/2012	12:57:28 PM	H2 valve closed
1/10/2012	12:57:28 PM	BCl3 valve closed
1/10/2012	12:57:28 PM	PH3 valve closed
1/10/2012	12:57:28 PM	SiCl4 pre valve closed
1/10/2012	12:57:28 PM	SiCl4 post valve closed
1/10/2012	12:57:28 PM	Bypass valve closed
1/10/2012	12:57:28 PM	Bubbler valve closed
1/10/2012	12:57:28 PM	Helium valve opened
1/10/2012	12:57:28 PM	Main Vac valve opened
1/10/2012	12:57:28 PM	Helium MFC set to  20.000000
1/10/2012	12:57:28 PM	H2 MFC set to  0.000000
1/10/2012	12:57:28 PM	BCl3 MFC set to  0.000000
1/10/2012	12:57:28 PM	PH3 MFC set to  0.000000
1/10/2012	12:57:28 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:57:28 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:57:28 PM	Tube furnace set to 0
1/10/2012	12:57:58 PM	Helium valve closed
1/10/2012	12:57:58 PM	H2 valve closed
1/10/2012	12:57:58 PM	BCl3 valve closed
1/10/2012	12:57:58 PM	PH3 valve closed
1/10/2012	12:57:58 PM	SiCl4 pre valve closed
1/10/2012	12:57:58 PM	SiCl4 post valve closed
1/10/2012	12:57:58 PM	Bypass valve closed
1/10/2012	12:57:58 PM	Bubbler valve closed
1/10/2012	12:57:58 PM	Main Vac valve opened
1/10/2012	12:57:58 PM	Helium MFC set to  0.000000
1/10/2012	12:57:58 PM	H2 MFC set to  0.000000
1/10/2012	12:57:58 PM	BCl3 MFC set to  0.000000
1/10/2012	12:57:58 PM	PH3 MFC set to  0.000000
1/10/2012	12:57:58 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:57:58 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:57:58 PM	Tube furnace set to 0
1/10/2012	12:58:28 PM	H2 valve closed
1/10/2012	12:58:28 PM	BCl3 valve closed
1/10/2012	12:58:28 PM	PH3 valve closed
1/10/2012	12:58:28 PM	SiCl4 pre valve closed
1/10/2012	12:58:28 PM	SiCl4 post valve closed
1/10/2012	12:58:28 PM	Bypass valve closed
1/10/2012	12:58:28 PM	Bubbler valve closed
1/10/2012	12:58:28 PM	Helium valve opened
1/10/2012	12:58:28 PM	Main Vac valve opened
1/10/2012	12:58:28 PM	Helium MFC set to  20.000000
1/10/2012	12:58:28 PM	H2 MFC set to  0.000000
1/10/2012	12:58:28 PM	BCl3 MFC set to  0.000000
1/10/2012	12:58:28 PM	PH3 MFC set to  0.000000
1/10/2012	12:58:28 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:58:28 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:58:29 PM	Tube furnace set to 0
1/10/2012	12:58:59 PM	Helium valve closed
1/10/2012	12:58:59 PM	H2 valve closed
1/10/2012	12:58:59 PM	BCl3 valve closed
1/10/2012	12:58:59 PM	PH3 valve closed
1/10/2012	12:58:59 PM	SiCl4 pre valve closed
1/10/2012	12:58:59 PM	SiCl4 post valve closed
1/10/2012	12:58:59 PM	Bypass valve closed
1/10/2012	12:58:59 PM	Bubbler valve closed
1/10/2012	12:58:59 PM	Main Vac valve opened
1/10/2012	12:58:59 PM	Helium MFC set to  0.000000
1/10/2012	12:58:59 PM	H2 MFC set to  0.000000
1/10/2012	12:58:59 PM	BCl3 MFC set to  0.000000
1/10/2012	12:58:59 PM	PH3 MFC set to  0.000000
1/10/2012	12:58:59 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:58:59 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:58:59 PM	Tube furnace set to 0
1/10/2012	12:59:29 PM	H2 valve closed
1/10/2012	12:59:29 PM	BCl3 valve closed
1/10/2012	12:59:29 PM	PH3 valve closed
1/10/2012	12:59:29 PM	SiCl4 pre valve closed
1/10/2012	12:59:29 PM	SiCl4 post valve closed
1/10/2012	12:59:29 PM	Bypass valve closed
1/10/2012	12:59:29 PM	Bubbler valve closed
1/10/2012	12:59:29 PM	Helium valve opened
1/10/2012	12:59:29 PM	Main Vac valve opened
1/10/2012	12:59:29 PM	Helium MFC set to  20.000000
1/10/2012	12:59:29 PM	H2 MFC set to  0.000000
1/10/2012	12:59:29 PM	BCl3 MFC set to  0.000000
1/10/2012	12:59:29 PM	PH3 MFC set to  0.000000
1/10/2012	12:59:29 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:59:29 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:59:29 PM	Tube furnace set to 0
1/10/2012	12:59:59 PM	Helium valve closed
1/10/2012	12:59:59 PM	H2 valve closed
1/10/2012	12:59:59 PM	BCl3 valve closed
1/10/2012	12:59:59 PM	PH3 valve closed
1/10/2012	12:59:59 PM	SiCl4 pre valve closed
1/10/2012	12:59:59 PM	SiCl4 post valve closed
1/10/2012	12:59:59 PM	Bypass valve closed
1/10/2012	12:59:59 PM	Bubbler valve closed
1/10/2012	12:59:59 PM	Main Vac valve opened
1/10/2012	12:59:59 PM	Helium MFC set to  0.000000
1/10/2012	12:59:59 PM	H2 MFC set to  0.000000
1/10/2012	12:59:59 PM	BCl3 MFC set to  0.000000
1/10/2012	12:59:59 PM	PH3 MFC set to  0.000000
1/10/2012	12:59:59 PM	SiCl4 MFC set to  0.000000
1/10/2012	12:59:59 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	12:59:59 PM	Tube furnace set to 0
1/10/2012	1:00:29 PM	H2 valve closed
1/10/2012	1:00:29 PM	BCl3 valve closed
1/10/2012	1:00:29 PM	PH3 valve closed
1/10/2012	1:00:29 PM	SiCl4 pre valve closed
1/10/2012	1:00:29 PM	SiCl4 post valve closed
1/10/2012	1:00:29 PM	Bypass valve closed
1/10/2012	1:00:29 PM	Bubbler valve closed
1/10/2012	1:00:29 PM	Helium valve opened
1/10/2012	1:00:29 PM	Main Vac valve opened
1/10/2012	1:00:29 PM	Helium MFC set to  20.000000
1/10/2012	1:00:29 PM	H2 MFC set to  0.000000
1/10/2012	1:00:29 PM	BCl3 MFC set to  0.000000
1/10/2012	1:00:29 PM	PH3 MFC set to  0.000000
1/10/2012	1:00:29 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:00:29 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:00:29 PM	Tube furnace set to 0
1/10/2012	1:00:59 PM	Helium valve closed
1/10/2012	1:00:59 PM	H2 valve closed
1/10/2012	1:00:59 PM	BCl3 valve closed
1/10/2012	1:00:59 PM	PH3 valve closed
1/10/2012	1:00:59 PM	SiCl4 pre valve closed
1/10/2012	1:00:59 PM	SiCl4 post valve closed
1/10/2012	1:00:59 PM	Bypass valve closed
1/10/2012	1:00:59 PM	Bubbler valve closed
1/10/2012	1:00:59 PM	Main Vac valve opened
1/10/2012	1:00:59 PM	Helium MFC set to  0.000000
1/10/2012	1:00:59 PM	H2 MFC set to  0.000000
1/10/2012	1:00:59 PM	BCl3 MFC set to  0.000000
1/10/2012	1:00:59 PM	PH3 MFC set to  0.000000
1/10/2012	1:00:59 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:00:59 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:01:00 PM	Tube furnace set to 0
1/10/2012	1:01:30 PM	H2 valve closed
1/10/2012	1:01:30 PM	BCl3 valve closed
1/10/2012	1:01:30 PM	PH3 valve closed
1/10/2012	1:01:30 PM	SiCl4 pre valve closed
1/10/2012	1:01:30 PM	SiCl4 post valve closed
1/10/2012	1:01:30 PM	Bypass valve closed
1/10/2012	1:01:30 PM	Bubbler valve closed
1/10/2012	1:01:30 PM	Helium valve opened
1/10/2012	1:01:30 PM	Main Vac valve opened
1/10/2012	1:01:30 PM	Helium MFC set to  20.000000
1/10/2012	1:01:30 PM	H2 MFC set to  0.000000
1/10/2012	1:01:30 PM	BCl3 MFC set to  0.000000
1/10/2012	1:01:30 PM	PH3 MFC set to  0.000000
1/10/2012	1:01:30 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:01:30 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:01:30 PM	Tube furnace set to 0
1/10/2012	1:02:00 PM	Helium valve closed
1/10/2012	1:02:00 PM	H2 valve closed
1/10/2012	1:02:00 PM	BCl3 valve closed
1/10/2012	1:02:00 PM	PH3 valve closed
1/10/2012	1:02:00 PM	SiCl4 pre valve closed
1/10/2012	1:02:00 PM	SiCl4 post valve closed
1/10/2012	1:02:00 PM	Bypass valve closed
1/10/2012	1:02:00 PM	Bubbler valve closed
1/10/2012	1:02:00 PM	Main Vac valve opened
1/10/2012	1:02:00 PM	Helium MFC set to  0.000000
1/10/2012	1:02:00 PM	H2 MFC set to  0.000000
1/10/2012	1:02:00 PM	BCl3 MFC set to  0.000000
1/10/2012	1:02:00 PM	PH3 MFC set to  0.000000
1/10/2012	1:02:00 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:02:00 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:02:00 PM	Tube furnace set to 200
1/10/2012	1:02:30 PM	H2 valve closed
1/10/2012	1:02:30 PM	BCl3 valve closed
1/10/2012	1:02:30 PM	PH3 valve closed
1/10/2012	1:02:30 PM	SiCl4 pre valve closed
1/10/2012	1:02:30 PM	SiCl4 post valve closed
1/10/2012	1:02:30 PM	Bypass valve closed
1/10/2012	1:02:30 PM	Bubbler valve closed
1/10/2012	1:02:30 PM	Helium valve opened
1/10/2012	1:02:30 PM	Main Vac valve opened
1/10/2012	1:02:30 PM	Helium MFC set to  20.000000
1/10/2012	1:02:30 PM	H2 MFC set to  0.000000
1/10/2012	1:02:30 PM	BCl3 MFC set to  0.000000
1/10/2012	1:02:30 PM	PH3 MFC set to  0.000000
1/10/2012	1:02:30 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:02:30 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:02:30 PM	Tube furnace set to 200
1/10/2012	1:03:00 PM	Helium valve closed
1/10/2012	1:03:00 PM	H2 valve closed
1/10/2012	1:03:00 PM	BCl3 valve closed
1/10/2012	1:03:00 PM	PH3 valve closed
1/10/2012	1:03:00 PM	SiCl4 pre valve closed
1/10/2012	1:03:00 PM	SiCl4 post valve closed
1/10/2012	1:03:00 PM	Bypass valve closed
1/10/2012	1:03:00 PM	Bubbler valve closed
1/10/2012	1:03:00 PM	Main Vac valve opened
1/10/2012	1:03:00 PM	Helium MFC set to  0.000000
1/10/2012	1:03:00 PM	H2 MFC set to  0.000000
1/10/2012	1:03:00 PM	BCl3 MFC set to  0.000000
1/10/2012	1:03:00 PM	PH3 MFC set to  0.000000
1/10/2012	1:03:00 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:03:00 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:03:00 PM	Tube furnace set to 200
1/10/2012	1:03:30 PM	H2 valve closed
1/10/2012	1:03:30 PM	BCl3 valve closed
1/10/2012	1:03:30 PM	PH3 valve closed
1/10/2012	1:03:30 PM	SiCl4 pre valve closed
1/10/2012	1:03:30 PM	SiCl4 post valve closed
1/10/2012	1:03:30 PM	Bypass valve closed
1/10/2012	1:03:30 PM	Bubbler valve closed
1/10/2012	1:03:30 PM	Helium valve opened
1/10/2012	1:03:30 PM	Main Vac valve opened
1/10/2012	1:03:30 PM	Helium MFC set to  20.000000
1/10/2012	1:03:30 PM	H2 MFC set to  0.000000
1/10/2012	1:03:30 PM	BCl3 MFC set to  0.000000
1/10/2012	1:03:30 PM	PH3 MFC set to  0.000000
1/10/2012	1:03:30 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:03:30 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:03:31 PM	Tube furnace set to 200
1/10/2012	1:04:01 PM	Helium valve closed
1/10/2012	1:04:01 PM	H2 valve closed
1/10/2012	1:04:01 PM	BCl3 valve closed
1/10/2012	1:04:01 PM	PH3 valve closed
1/10/2012	1:04:01 PM	SiCl4 pre valve closed
1/10/2012	1:04:01 PM	SiCl4 post valve closed
1/10/2012	1:04:01 PM	Bypass valve closed
1/10/2012	1:04:01 PM	Bubbler valve closed
1/10/2012	1:04:01 PM	Main Vac valve opened
1/10/2012	1:04:01 PM	Helium MFC set to  0.000000
1/10/2012	1:04:01 PM	H2 MFC set to  0.000000
1/10/2012	1:04:01 PM	BCl3 MFC set to  0.000000
1/10/2012	1:04:01 PM	PH3 MFC set to  0.000000
1/10/2012	1:04:01 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:04:01 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:04:01 PM	Tube furnace set to 200
1/10/2012	1:04:31 PM	H2 valve closed
1/10/2012	1:04:31 PM	BCl3 valve closed
1/10/2012	1:04:31 PM	PH3 valve closed
1/10/2012	1:04:31 PM	SiCl4 pre valve closed
1/10/2012	1:04:31 PM	SiCl4 post valve closed
1/10/2012	1:04:31 PM	Bypass valve closed
1/10/2012	1:04:31 PM	Bubbler valve closed
1/10/2012	1:04:31 PM	Helium valve opened
1/10/2012	1:04:31 PM	Main Vac valve opened
1/10/2012	1:04:31 PM	Helium MFC set to  20.000000
1/10/2012	1:04:31 PM	H2 MFC set to  0.000000
1/10/2012	1:04:31 PM	BCl3 MFC set to  0.000000
1/10/2012	1:04:31 PM	PH3 MFC set to  0.000000
1/10/2012	1:04:31 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:04:31 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:04:31 PM	Tube furnace set to 200
1/10/2012	1:05:01 PM	Helium valve closed
1/10/2012	1:05:01 PM	H2 valve closed
1/10/2012	1:05:01 PM	BCl3 valve closed
1/10/2012	1:05:01 PM	PH3 valve closed
1/10/2012	1:05:01 PM	SiCl4 pre valve closed
1/10/2012	1:05:01 PM	SiCl4 post valve closed
1/10/2012	1:05:01 PM	Bypass valve closed
1/10/2012	1:05:01 PM	Bubbler valve closed
1/10/2012	1:05:01 PM	Main Vac valve opened
1/10/2012	1:05:01 PM	Helium MFC set to  0.000000
1/10/2012	1:05:01 PM	H2 MFC set to  0.000000
1/10/2012	1:05:01 PM	BCl3 MFC set to  0.000000
1/10/2012	1:05:01 PM	PH3 MFC set to  0.000000
1/10/2012	1:05:01 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:05:01 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:05:01 PM	Tube furnace set to 200
1/10/2012	1:05:31 PM	H2 valve closed
1/10/2012	1:05:31 PM	BCl3 valve closed
1/10/2012	1:05:31 PM	PH3 valve closed
1/10/2012	1:05:31 PM	SiCl4 pre valve closed
1/10/2012	1:05:31 PM	SiCl4 post valve closed
1/10/2012	1:05:31 PM	Bypass valve closed
1/10/2012	1:05:31 PM	Bubbler valve closed
1/10/2012	1:05:31 PM	Helium valve opened
1/10/2012	1:05:31 PM	Main Vac valve opened
1/10/2012	1:05:31 PM	Helium MFC set to  20.000000
1/10/2012	1:05:31 PM	H2 MFC set to  0.000000
1/10/2012	1:05:31 PM	BCl3 MFC set to  0.000000
1/10/2012	1:05:31 PM	PH3 MFC set to  0.000000
1/10/2012	1:05:31 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:05:31 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:05:31 PM	Tube furnace set to 200
1/10/2012	1:06:01 PM	Helium valve closed
1/10/2012	1:06:01 PM	H2 valve closed
1/10/2012	1:06:01 PM	BCl3 valve closed
1/10/2012	1:06:01 PM	PH3 valve closed
1/10/2012	1:06:01 PM	SiCl4 pre valve closed
1/10/2012	1:06:01 PM	SiCl4 post valve closed
1/10/2012	1:06:01 PM	Bypass valve closed
1/10/2012	1:06:01 PM	Bubbler valve closed
1/10/2012	1:06:01 PM	Main Vac valve opened
1/10/2012	1:06:01 PM	Helium MFC set to  0.000000
1/10/2012	1:06:01 PM	H2 MFC set to  0.000000
1/10/2012	1:06:01 PM	BCl3 MFC set to  0.000000
1/10/2012	1:06:01 PM	PH3 MFC set to  0.000000
1/10/2012	1:06:01 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:06:01 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:06:02 PM	Tube furnace set to 200
1/10/2012	1:06:32 PM	H2 valve closed
1/10/2012	1:06:32 PM	BCl3 valve closed
1/10/2012	1:06:32 PM	PH3 valve closed
1/10/2012	1:06:32 PM	SiCl4 pre valve closed
1/10/2012	1:06:32 PM	SiCl4 post valve closed
1/10/2012	1:06:32 PM	Bypass valve closed
1/10/2012	1:06:32 PM	Bubbler valve closed
1/10/2012	1:06:32 PM	Helium valve opened
1/10/2012	1:06:32 PM	Main Vac valve opened
1/10/2012	1:06:32 PM	Helium MFC set to  20.000000
1/10/2012	1:06:32 PM	H2 MFC set to  0.000000
1/10/2012	1:06:32 PM	BCl3 MFC set to  0.000000
1/10/2012	1:06:32 PM	PH3 MFC set to  0.000000
1/10/2012	1:06:32 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:06:32 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:06:32 PM	Tube furnace set to 200
1/10/2012	1:07:02 PM	Helium valve closed
1/10/2012	1:07:02 PM	H2 valve closed
1/10/2012	1:07:02 PM	BCl3 valve closed
1/10/2012	1:07:02 PM	PH3 valve closed
1/10/2012	1:07:02 PM	SiCl4 pre valve closed
1/10/2012	1:07:02 PM	SiCl4 post valve closed
1/10/2012	1:07:02 PM	Bypass valve closed
1/10/2012	1:07:02 PM	Bubbler valve closed
1/10/2012	1:07:02 PM	Main Vac valve opened
1/10/2012	1:07:02 PM	Helium MFC set to  0.000000
1/10/2012	1:07:02 PM	H2 MFC set to  0.000000
1/10/2012	1:07:02 PM	BCl3 MFC set to  0.000000
1/10/2012	1:07:02 PM	PH3 MFC set to  0.000000
1/10/2012	1:07:02 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:07:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:07:02 PM	Tube furnace set to 200
1/10/2012	1:07:32 PM	H2 valve closed
1/10/2012	1:07:32 PM	BCl3 valve closed
1/10/2012	1:07:32 PM	PH3 valve closed
1/10/2012	1:07:32 PM	SiCl4 pre valve closed
1/10/2012	1:07:32 PM	SiCl4 post valve closed
1/10/2012	1:07:32 PM	Bypass valve closed
1/10/2012	1:07:32 PM	Bubbler valve closed
1/10/2012	1:07:32 PM	Helium valve opened
1/10/2012	1:07:32 PM	Main Vac valve opened
1/10/2012	1:07:32 PM	Helium MFC set to  20.000000
1/10/2012	1:07:32 PM	H2 MFC set to  0.000000
1/10/2012	1:07:32 PM	BCl3 MFC set to  0.000000
1/10/2012	1:07:32 PM	PH3 MFC set to  0.000000
1/10/2012	1:07:32 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:07:32 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:07:32 PM	Tube furnace set to 200
1/10/2012	1:08:02 PM	Helium valve closed
1/10/2012	1:08:02 PM	H2 valve closed
1/10/2012	1:08:02 PM	BCl3 valve closed
1/10/2012	1:08:02 PM	PH3 valve closed
1/10/2012	1:08:02 PM	SiCl4 pre valve closed
1/10/2012	1:08:02 PM	SiCl4 post valve closed
1/10/2012	1:08:02 PM	Bypass valve closed
1/10/2012	1:08:02 PM	Bubbler valve closed
1/10/2012	1:08:02 PM	Main Vac valve opened
1/10/2012	1:08:02 PM	Helium MFC set to  0.000000
1/10/2012	1:08:02 PM	H2 MFC set to  0.000000
1/10/2012	1:08:02 PM	BCl3 MFC set to  0.000000
1/10/2012	1:08:02 PM	PH3 MFC set to  0.000000
1/10/2012	1:08:02 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:08:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:08:02 PM	Tube furnace set to 0
1/10/2012	1:08:03 PM	Run finished at 1:08 PM
1/10/2012	1:16:33 PM	Main Vac valve closed
1/10/2012	1:16:46 PM	Main Vac valve opened
1/10/2012	1:17:38 PM	Main Vac valve closed
1/10/2012	1:17:51 PM	Main Vac valve opened
1/10/2012	1:19:07 PM	Main Vac valve closed
1/10/2012	1:19:22 PM	Main Vac valve opened
1/10/2012	1:19:52 PM	Recipe started at 1:19 PM
1/10/2012	1:19:52 PM	Helium valve closed
1/10/2012	1:19:52 PM	H2 valve closed
1/10/2012	1:19:52 PM	BCl3 valve closed
1/10/2012	1:19:52 PM	PH3 valve closed
1/10/2012	1:19:52 PM	SiCl4 pre valve closed
1/10/2012	1:19:52 PM	SiCl4 post valve closed
1/10/2012	1:19:52 PM	Bypass valve closed
1/10/2012	1:19:52 PM	Bubbler valve closed
1/10/2012	1:19:52 PM	Main Vac valve opened
1/10/2012	1:19:52 PM	Helium MFC set to  0.000000
1/10/2012	1:19:52 PM	H2 MFC set to  0.000000
1/10/2012	1:19:52 PM	BCl3 MFC set to  0.000000
1/10/2012	1:19:52 PM	PH3 MFC set to  0.000000
1/10/2012	1:19:52 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:19:52 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:19:52 PM	Tube furnace set to 0
1/10/2012	1:19:55 PM	H2 valve closed
1/10/2012	1:19:55 PM	BCl3 valve closed
1/10/2012	1:19:55 PM	PH3 valve closed
1/10/2012	1:19:55 PM	SiCl4 pre valve closed
1/10/2012	1:19:55 PM	SiCl4 post valve closed
1/10/2012	1:19:55 PM	Bypass valve closed
1/10/2012	1:19:55 PM	Bubbler valve closed
1/10/2012	1:19:55 PM	Helium valve opened
1/10/2012	1:19:55 PM	Main Vac valve opened
1/10/2012	1:19:55 PM	Helium MFC set to  20.000000
1/10/2012	1:19:55 PM	H2 MFC set to  0.000000
1/10/2012	1:19:55 PM	BCl3 MFC set to  0.000000
1/10/2012	1:19:55 PM	PH3 MFC set to  0.000000
1/10/2012	1:19:55 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:19:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:19:56 PM	Tube furnace set to 0
1/10/2012	1:20:02 PM	Helium valve closed
1/10/2012	1:20:02 PM	H2 valve closed
1/10/2012	1:20:02 PM	BCl3 valve closed
1/10/2012	1:20:02 PM	PH3 valve closed
1/10/2012	1:20:02 PM	SiCl4 pre valve closed
1/10/2012	1:20:02 PM	SiCl4 post valve closed
1/10/2012	1:20:02 PM	Bypass valve closed
1/10/2012	1:20:02 PM	Bubbler valve closed
1/10/2012	1:20:02 PM	Main Vac valve opened
1/10/2012	1:20:02 PM	Helium MFC set to  0.000000
1/10/2012	1:20:02 PM	H2 MFC set to  0.000000
1/10/2012	1:20:02 PM	BCl3 MFC set to  0.000000
1/10/2012	1:20:02 PM	PH3 MFC set to  0.000000
1/10/2012	1:20:02 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:20:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:20:02 PM	Tube furnace set to 0
1/10/2012	1:20:09 PM	H2 valve closed
1/10/2012	1:20:09 PM	BCl3 valve closed
1/10/2012	1:20:09 PM	PH3 valve closed
1/10/2012	1:20:09 PM	SiCl4 pre valve closed
1/10/2012	1:20:09 PM	SiCl4 post valve closed
1/10/2012	1:20:09 PM	Bypass valve closed
1/10/2012	1:20:09 PM	Bubbler valve closed
1/10/2012	1:20:09 PM	Helium valve opened
1/10/2012	1:20:09 PM	Main Vac valve opened
1/10/2012	1:20:09 PM	Helium MFC set to  20.000000
1/10/2012	1:20:09 PM	H2 MFC set to  0.000000
1/10/2012	1:20:09 PM	BCl3 MFC set to  0.000000
1/10/2012	1:20:09 PM	PH3 MFC set to  0.000000
1/10/2012	1:20:09 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:20:09 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:20:09 PM	Tube furnace set to 0
1/10/2012	1:20:11 PM	Helium valve closed
1/10/2012	1:20:11 PM	H2 valve closed
1/10/2012	1:20:11 PM	BCl3 valve closed
1/10/2012	1:20:11 PM	PH3 valve closed
1/10/2012	1:20:11 PM	SiCl4 pre valve closed
1/10/2012	1:20:11 PM	SiCl4 post valve closed
1/10/2012	1:20:11 PM	Bypass valve closed
1/10/2012	1:20:11 PM	Bubbler valve closed
1/10/2012	1:20:11 PM	Main Vac valve opened
1/10/2012	1:20:11 PM	Helium MFC set to  0.000000
1/10/2012	1:20:11 PM	H2 MFC set to  0.000000
1/10/2012	1:20:11 PM	BCl3 MFC set to  0.000000
1/10/2012	1:20:11 PM	PH3 MFC set to  0.000000
1/10/2012	1:20:11 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:20:11 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:20:11 PM	Tube furnace set to 0
1/10/2012	1:20:12 PM	H2 valve closed
1/10/2012	1:20:12 PM	BCl3 valve closed
1/10/2012	1:20:12 PM	PH3 valve closed
1/10/2012	1:20:12 PM	SiCl4 pre valve closed
1/10/2012	1:20:12 PM	SiCl4 post valve closed
1/10/2012	1:20:12 PM	Bypass valve closed
1/10/2012	1:20:12 PM	Bubbler valve closed
1/10/2012	1:20:12 PM	Helium valve opened
1/10/2012	1:20:12 PM	Main Vac valve opened
1/10/2012	1:20:12 PM	Helium MFC set to  20.000000
1/10/2012	1:20:12 PM	H2 MFC set to  0.000000
1/10/2012	1:20:12 PM	BCl3 MFC set to  0.000000
1/10/2012	1:20:12 PM	PH3 MFC set to  0.000000
1/10/2012	1:20:12 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:20:12 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:20:12 PM	Tube furnace set to 0
1/10/2012	1:20:42 PM	Helium valve closed
1/10/2012	1:20:42 PM	H2 valve closed
1/10/2012	1:20:42 PM	BCl3 valve closed
1/10/2012	1:20:42 PM	PH3 valve closed
1/10/2012	1:20:42 PM	SiCl4 pre valve closed
1/10/2012	1:20:42 PM	SiCl4 post valve closed
1/10/2012	1:20:42 PM	Bypass valve closed
1/10/2012	1:20:42 PM	Bubbler valve closed
1/10/2012	1:20:42 PM	Main Vac valve opened
1/10/2012	1:20:42 PM	Helium MFC set to  0.000000
1/10/2012	1:20:42 PM	H2 MFC set to  0.000000
1/10/2012	1:20:42 PM	BCl3 MFC set to  0.000000
1/10/2012	1:20:42 PM	PH3 MFC set to  0.000000
1/10/2012	1:20:42 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:20:42 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:20:42 PM	Tube furnace set to 0
1/10/2012	1:21:12 PM	H2 valve closed
1/10/2012	1:21:12 PM	BCl3 valve closed
1/10/2012	1:21:12 PM	PH3 valve closed
1/10/2012	1:21:12 PM	SiCl4 pre valve closed
1/10/2012	1:21:12 PM	SiCl4 post valve closed
1/10/2012	1:21:12 PM	Bypass valve closed
1/10/2012	1:21:12 PM	Bubbler valve closed
1/10/2012	1:21:12 PM	Helium valve opened
1/10/2012	1:21:12 PM	Main Vac valve opened
1/10/2012	1:21:12 PM	Helium MFC set to  20.000000
1/10/2012	1:21:12 PM	H2 MFC set to  0.000000
1/10/2012	1:21:12 PM	BCl3 MFC set to  0.000000
1/10/2012	1:21:12 PM	PH3 MFC set to  0.000000
1/10/2012	1:21:12 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:21:12 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:21:13 PM	Tube furnace set to 0
1/10/2012	1:21:43 PM	Helium valve closed
1/10/2012	1:21:43 PM	H2 valve closed
1/10/2012	1:21:43 PM	BCl3 valve closed
1/10/2012	1:21:43 PM	PH3 valve closed
1/10/2012	1:21:43 PM	SiCl4 pre valve closed
1/10/2012	1:21:43 PM	SiCl4 post valve closed
1/10/2012	1:21:43 PM	Bypass valve closed
1/10/2012	1:21:43 PM	Bubbler valve closed
1/10/2012	1:21:43 PM	Main Vac valve opened
1/10/2012	1:21:43 PM	Helium MFC set to  0.000000
1/10/2012	1:21:43 PM	H2 MFC set to  0.000000
1/10/2012	1:21:43 PM	BCl3 MFC set to  0.000000
1/10/2012	1:21:43 PM	PH3 MFC set to  0.000000
1/10/2012	1:21:43 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:21:43 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:21:43 PM	Tube furnace set to 0
1/10/2012	1:21:44 PM	H2 valve closed
1/10/2012	1:21:44 PM	BCl3 valve closed
1/10/2012	1:21:44 PM	PH3 valve closed
1/10/2012	1:21:44 PM	SiCl4 pre valve closed
1/10/2012	1:21:44 PM	SiCl4 post valve closed
1/10/2012	1:21:44 PM	Bypass valve closed
1/10/2012	1:21:44 PM	Bubbler valve closed
1/10/2012	1:21:44 PM	Helium valve opened
1/10/2012	1:21:44 PM	Main Vac valve opened
1/10/2012	1:21:44 PM	Helium MFC set to  20.000000
1/10/2012	1:21:44 PM	H2 MFC set to  0.000000
1/10/2012	1:21:44 PM	BCl3 MFC set to  0.000000
1/10/2012	1:21:44 PM	PH3 MFC set to  0.000000
1/10/2012	1:21:44 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:21:44 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:21:44 PM	Tube furnace set to 0
1/10/2012	1:21:45 PM	Helium valve closed
1/10/2012	1:21:45 PM	H2 valve closed
1/10/2012	1:21:45 PM	BCl3 valve closed
1/10/2012	1:21:45 PM	PH3 valve closed
1/10/2012	1:21:45 PM	SiCl4 pre valve closed
1/10/2012	1:21:45 PM	SiCl4 post valve closed
1/10/2012	1:21:45 PM	Bypass valve closed
1/10/2012	1:21:45 PM	Bubbler valve closed
1/10/2012	1:21:45 PM	Main Vac valve opened
1/10/2012	1:21:45 PM	Helium MFC set to  0.000000
1/10/2012	1:21:45 PM	H2 MFC set to  0.000000
1/10/2012	1:21:45 PM	BCl3 MFC set to  0.000000
1/10/2012	1:21:45 PM	PH3 MFC set to  0.000000
1/10/2012	1:21:45 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:21:45 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:21:45 PM	Tube furnace set to 0
1/10/2012	1:22:15 PM	H2 valve closed
1/10/2012	1:22:15 PM	BCl3 valve closed
1/10/2012	1:22:15 PM	PH3 valve closed
1/10/2012	1:22:15 PM	SiCl4 pre valve closed
1/10/2012	1:22:15 PM	SiCl4 post valve closed
1/10/2012	1:22:15 PM	Bypass valve closed
1/10/2012	1:22:15 PM	Bubbler valve closed
1/10/2012	1:22:15 PM	Helium valve opened
1/10/2012	1:22:15 PM	Main Vac valve opened
1/10/2012	1:22:15 PM	Helium MFC set to  20.000000
1/10/2012	1:22:15 PM	H2 MFC set to  0.000000
1/10/2012	1:22:15 PM	BCl3 MFC set to  0.000000
1/10/2012	1:22:15 PM	PH3 MFC set to  0.000000
1/10/2012	1:22:15 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:22:15 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:22:15 PM	Tube furnace set to 0
1/10/2012	1:22:45 PM	Helium valve closed
1/10/2012	1:22:45 PM	H2 valve closed
1/10/2012	1:22:45 PM	BCl3 valve closed
1/10/2012	1:22:45 PM	PH3 valve closed
1/10/2012	1:22:45 PM	SiCl4 pre valve closed
1/10/2012	1:22:45 PM	SiCl4 post valve closed
1/10/2012	1:22:45 PM	Bypass valve closed
1/10/2012	1:22:45 PM	Bubbler valve closed
1/10/2012	1:22:45 PM	Main Vac valve opened
1/10/2012	1:22:45 PM	Helium MFC set to  0.000000
1/10/2012	1:22:45 PM	H2 MFC set to  0.000000
1/10/2012	1:22:45 PM	BCl3 MFC set to  0.000000
1/10/2012	1:22:45 PM	PH3 MFC set to  0.000000
1/10/2012	1:22:45 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:22:45 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:22:46 PM	Tube furnace set to 0
1/10/2012	1:23:16 PM	H2 valve closed
1/10/2012	1:23:16 PM	BCl3 valve closed
1/10/2012	1:23:16 PM	PH3 valve closed
1/10/2012	1:23:16 PM	SiCl4 pre valve closed
1/10/2012	1:23:16 PM	SiCl4 post valve closed
1/10/2012	1:23:16 PM	Bypass valve closed
1/10/2012	1:23:16 PM	Bubbler valve closed
1/10/2012	1:23:16 PM	Helium valve opened
1/10/2012	1:23:16 PM	Main Vac valve opened
1/10/2012	1:23:16 PM	Helium MFC set to  20.000000
1/10/2012	1:23:16 PM	H2 MFC set to  0.000000
1/10/2012	1:23:16 PM	BCl3 MFC set to  0.000000
1/10/2012	1:23:16 PM	PH3 MFC set to  0.000000
1/10/2012	1:23:16 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:23:16 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:23:16 PM	Tube furnace set to 0
1/10/2012	1:23:46 PM	Helium valve closed
1/10/2012	1:23:46 PM	H2 valve closed
1/10/2012	1:23:46 PM	BCl3 valve closed
1/10/2012	1:23:46 PM	PH3 valve closed
1/10/2012	1:23:46 PM	SiCl4 pre valve closed
1/10/2012	1:23:46 PM	SiCl4 post valve closed
1/10/2012	1:23:46 PM	Bypass valve closed
1/10/2012	1:23:46 PM	Bubbler valve closed
1/10/2012	1:23:46 PM	Main Vac valve opened
1/10/2012	1:23:46 PM	Helium MFC set to  0.000000
1/10/2012	1:23:46 PM	H2 MFC set to  0.000000
1/10/2012	1:23:46 PM	BCl3 MFC set to  0.000000
1/10/2012	1:23:46 PM	PH3 MFC set to  0.000000
1/10/2012	1:23:46 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:23:46 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:23:46 PM	Tube furnace set to 0
1/10/2012	1:24:16 PM	H2 valve closed
1/10/2012	1:24:16 PM	BCl3 valve closed
1/10/2012	1:24:16 PM	PH3 valve closed
1/10/2012	1:24:16 PM	SiCl4 pre valve closed
1/10/2012	1:24:16 PM	SiCl4 post valve closed
1/10/2012	1:24:16 PM	Bypass valve closed
1/10/2012	1:24:16 PM	Bubbler valve closed
1/10/2012	1:24:16 PM	Helium valve opened
1/10/2012	1:24:16 PM	Main Vac valve opened
1/10/2012	1:24:16 PM	Helium MFC set to  20.000000
1/10/2012	1:24:16 PM	H2 MFC set to  0.000000
1/10/2012	1:24:16 PM	BCl3 MFC set to  0.000000
1/10/2012	1:24:16 PM	PH3 MFC set to  0.000000
1/10/2012	1:24:16 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:24:16 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:24:16 PM	Tube furnace set to 0
1/10/2012	1:24:46 PM	Helium valve closed
1/10/2012	1:24:46 PM	H2 valve closed
1/10/2012	1:24:46 PM	BCl3 valve closed
1/10/2012	1:24:46 PM	PH3 valve closed
1/10/2012	1:24:46 PM	SiCl4 pre valve closed
1/10/2012	1:24:46 PM	SiCl4 post valve closed
1/10/2012	1:24:46 PM	Bypass valve closed
1/10/2012	1:24:46 PM	Bubbler valve closed
1/10/2012	1:24:46 PM	Main Vac valve opened
1/10/2012	1:24:46 PM	Helium MFC set to  0.000000
1/10/2012	1:24:46 PM	H2 MFC set to  0.000000
1/10/2012	1:24:46 PM	BCl3 MFC set to  0.000000
1/10/2012	1:24:46 PM	PH3 MFC set to  0.000000
1/10/2012	1:24:46 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:24:46 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:24:46 PM	Tube furnace set to 0
1/10/2012	1:25:16 PM	H2 valve closed
1/10/2012	1:25:16 PM	BCl3 valve closed
1/10/2012	1:25:16 PM	PH3 valve closed
1/10/2012	1:25:16 PM	SiCl4 pre valve closed
1/10/2012	1:25:16 PM	SiCl4 post valve closed
1/10/2012	1:25:16 PM	Bypass valve closed
1/10/2012	1:25:16 PM	Bubbler valve closed
1/10/2012	1:25:16 PM	Helium valve opened
1/10/2012	1:25:16 PM	Main Vac valve opened
1/10/2012	1:25:16 PM	Helium MFC set to  20.000000
1/10/2012	1:25:16 PM	H2 MFC set to  0.000000
1/10/2012	1:25:16 PM	BCl3 MFC set to  0.000000
1/10/2012	1:25:16 PM	PH3 MFC set to  0.000000
1/10/2012	1:25:16 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:25:16 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:25:17 PM	Tube furnace set to 0
1/10/2012	1:25:47 PM	Helium valve closed
1/10/2012	1:25:47 PM	H2 valve closed
1/10/2012	1:25:47 PM	BCl3 valve closed
1/10/2012	1:25:47 PM	PH3 valve closed
1/10/2012	1:25:47 PM	SiCl4 pre valve closed
1/10/2012	1:25:47 PM	SiCl4 post valve closed
1/10/2012	1:25:47 PM	Bypass valve closed
1/10/2012	1:25:47 PM	Bubbler valve closed
1/10/2012	1:25:47 PM	Main Vac valve opened
1/10/2012	1:25:47 PM	Helium MFC set to  0.000000
1/10/2012	1:25:47 PM	H2 MFC set to  0.000000
1/10/2012	1:25:47 PM	BCl3 MFC set to  0.000000
1/10/2012	1:25:47 PM	PH3 MFC set to  0.000000
1/10/2012	1:25:47 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:25:47 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:25:47 PM	Tube furnace set to 200
1/10/2012	1:26:17 PM	H2 valve closed
1/10/2012	1:26:17 PM	BCl3 valve closed
1/10/2012	1:26:17 PM	PH3 valve closed
1/10/2012	1:26:17 PM	SiCl4 pre valve closed
1/10/2012	1:26:17 PM	SiCl4 post valve closed
1/10/2012	1:26:17 PM	Bypass valve closed
1/10/2012	1:26:17 PM	Bubbler valve closed
1/10/2012	1:26:17 PM	Helium valve opened
1/10/2012	1:26:17 PM	Main Vac valve opened
1/10/2012	1:26:17 PM	Helium MFC set to  20.000000
1/10/2012	1:26:17 PM	H2 MFC set to  0.000000
1/10/2012	1:26:17 PM	BCl3 MFC set to  0.000000
1/10/2012	1:26:17 PM	PH3 MFC set to  0.000000
1/10/2012	1:26:17 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:26:17 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:26:17 PM	Tube furnace set to 200
1/10/2012	1:26:47 PM	Helium valve closed
1/10/2012	1:26:47 PM	H2 valve closed
1/10/2012	1:26:47 PM	BCl3 valve closed
1/10/2012	1:26:47 PM	PH3 valve closed
1/10/2012	1:26:47 PM	SiCl4 pre valve closed
1/10/2012	1:26:47 PM	SiCl4 post valve closed
1/10/2012	1:26:47 PM	Bypass valve closed
1/10/2012	1:26:47 PM	Bubbler valve closed
1/10/2012	1:26:47 PM	Main Vac valve opened
1/10/2012	1:26:47 PM	Helium MFC set to  0.000000
1/10/2012	1:26:47 PM	H2 MFC set to  0.000000
1/10/2012	1:26:47 PM	BCl3 MFC set to  0.000000
1/10/2012	1:26:47 PM	PH3 MFC set to  0.000000
1/10/2012	1:26:47 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:26:47 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:26:47 PM	Tube furnace set to 200
1/10/2012	1:27:17 PM	H2 valve closed
1/10/2012	1:27:17 PM	BCl3 valve closed
1/10/2012	1:27:17 PM	PH3 valve closed
1/10/2012	1:27:17 PM	SiCl4 pre valve closed
1/10/2012	1:27:17 PM	SiCl4 post valve closed
1/10/2012	1:27:17 PM	Bypass valve closed
1/10/2012	1:27:17 PM	Bubbler valve closed
1/10/2012	1:27:17 PM	Helium valve opened
1/10/2012	1:27:17 PM	Main Vac valve opened
1/10/2012	1:27:17 PM	Helium MFC set to  20.000000
1/10/2012	1:27:17 PM	H2 MFC set to  0.000000
1/10/2012	1:27:17 PM	BCl3 MFC set to  0.000000
1/10/2012	1:27:17 PM	PH3 MFC set to  0.000000
1/10/2012	1:27:17 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:27:17 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:27:17 PM	Tube furnace set to 200
1/10/2012	1:27:47 PM	Helium valve closed
1/10/2012	1:27:47 PM	H2 valve closed
1/10/2012	1:27:48 PM	BCl3 valve closed
1/10/2012	1:27:48 PM	PH3 valve closed
1/10/2012	1:27:48 PM	SiCl4 pre valve closed
1/10/2012	1:27:48 PM	SiCl4 post valve closed
1/10/2012	1:27:48 PM	Bypass valve closed
1/10/2012	1:27:48 PM	Bubbler valve closed
1/10/2012	1:27:48 PM	Main Vac valve opened
1/10/2012	1:27:48 PM	Helium MFC set to  0.000000
1/10/2012	1:27:48 PM	H2 MFC set to  0.000000
1/10/2012	1:27:48 PM	BCl3 MFC set to  0.000000
1/10/2012	1:27:48 PM	PH3 MFC set to  0.000000
1/10/2012	1:27:48 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:27:48 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:27:48 PM	Tube furnace set to 200
1/10/2012	1:28:18 PM	H2 valve closed
1/10/2012	1:28:18 PM	BCl3 valve closed
1/10/2012	1:28:18 PM	PH3 valve closed
1/10/2012	1:28:18 PM	SiCl4 pre valve closed
1/10/2012	1:28:18 PM	SiCl4 post valve closed
1/10/2012	1:28:18 PM	Bypass valve closed
1/10/2012	1:28:18 PM	Bubbler valve closed
1/10/2012	1:28:18 PM	Helium valve opened
1/10/2012	1:28:18 PM	Main Vac valve opened
1/10/2012	1:28:18 PM	Helium MFC set to  20.000000
1/10/2012	1:28:18 PM	H2 MFC set to  0.000000
1/10/2012	1:28:18 PM	BCl3 MFC set to  0.000000
1/10/2012	1:28:18 PM	PH3 MFC set to  0.000000
1/10/2012	1:28:18 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:28:18 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:28:18 PM	Tube furnace set to 200
1/10/2012	1:28:48 PM	Helium valve closed
1/10/2012	1:28:48 PM	H2 valve closed
1/10/2012	1:28:48 PM	BCl3 valve closed
1/10/2012	1:28:48 PM	PH3 valve closed
1/10/2012	1:28:48 PM	SiCl4 pre valve closed
1/10/2012	1:28:48 PM	SiCl4 post valve closed
1/10/2012	1:28:48 PM	Bypass valve closed
1/10/2012	1:28:48 PM	Bubbler valve closed
1/10/2012	1:28:48 PM	Main Vac valve opened
1/10/2012	1:28:48 PM	Helium MFC set to  0.000000
1/10/2012	1:28:48 PM	H2 MFC set to  0.000000
1/10/2012	1:28:48 PM	BCl3 MFC set to  0.000000
1/10/2012	1:28:48 PM	PH3 MFC set to  0.000000
1/10/2012	1:28:48 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:28:48 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:28:48 PM	Tube furnace set to 200
1/10/2012	1:29:18 PM	H2 valve closed
1/10/2012	1:29:18 PM	BCl3 valve closed
1/10/2012	1:29:18 PM	PH3 valve closed
1/10/2012	1:29:18 PM	SiCl4 pre valve closed
1/10/2012	1:29:18 PM	SiCl4 post valve closed
1/10/2012	1:29:18 PM	Bypass valve closed
1/10/2012	1:29:18 PM	Bubbler valve closed
1/10/2012	1:29:18 PM	Helium valve opened
1/10/2012	1:29:18 PM	Main Vac valve opened
1/10/2012	1:29:18 PM	Helium MFC set to  20.000000
1/10/2012	1:29:18 PM	H2 MFC set to  0.000000
1/10/2012	1:29:18 PM	BCl3 MFC set to  0.000000
1/10/2012	1:29:18 PM	PH3 MFC set to  0.000000
1/10/2012	1:29:18 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:29:18 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:29:18 PM	Tube furnace set to 200
1/10/2012	1:29:48 PM	Helium valve closed
1/10/2012	1:29:48 PM	H2 valve closed
1/10/2012	1:29:48 PM	BCl3 valve closed
1/10/2012	1:29:48 PM	PH3 valve closed
1/10/2012	1:29:48 PM	SiCl4 pre valve closed
1/10/2012	1:29:48 PM	SiCl4 post valve closed
1/10/2012	1:29:48 PM	Bypass valve closed
1/10/2012	1:29:48 PM	Bubbler valve closed
1/10/2012	1:29:48 PM	Main Vac valve opened
1/10/2012	1:29:48 PM	Helium MFC set to  0.000000
1/10/2012	1:29:48 PM	H2 MFC set to  0.000000
1/10/2012	1:29:48 PM	BCl3 MFC set to  0.000000
1/10/2012	1:29:48 PM	PH3 MFC set to  0.000000
1/10/2012	1:29:48 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:29:48 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:29:49 PM	Tube furnace set to 200
1/10/2012	1:30:19 PM	H2 valve closed
1/10/2012	1:30:19 PM	BCl3 valve closed
1/10/2012	1:30:19 PM	PH3 valve closed
1/10/2012	1:30:19 PM	SiCl4 pre valve closed
1/10/2012	1:30:19 PM	SiCl4 post valve closed
1/10/2012	1:30:19 PM	Bypass valve closed
1/10/2012	1:30:19 PM	Bubbler valve closed
1/10/2012	1:30:19 PM	Helium valve opened
1/10/2012	1:30:19 PM	Main Vac valve opened
1/10/2012	1:30:19 PM	Helium MFC set to  20.000000
1/10/2012	1:30:19 PM	H2 MFC set to  0.000000
1/10/2012	1:30:19 PM	BCl3 MFC set to  0.000000
1/10/2012	1:30:19 PM	PH3 MFC set to  0.000000
1/10/2012	1:30:19 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:30:19 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:30:19 PM	Tube furnace set to 200
1/10/2012	1:30:49 PM	Helium valve closed
1/10/2012	1:30:49 PM	H2 valve closed
1/10/2012	1:30:49 PM	BCl3 valve closed
1/10/2012	1:30:49 PM	PH3 valve closed
1/10/2012	1:30:49 PM	SiCl4 pre valve closed
1/10/2012	1:30:49 PM	SiCl4 post valve closed
1/10/2012	1:30:49 PM	Bypass valve closed
1/10/2012	1:30:49 PM	Bubbler valve closed
1/10/2012	1:30:49 PM	Main Vac valve opened
1/10/2012	1:30:49 PM	Helium MFC set to  0.000000
1/10/2012	1:30:49 PM	H2 MFC set to  0.000000
1/10/2012	1:30:49 PM	BCl3 MFC set to  0.000000
1/10/2012	1:30:49 PM	PH3 MFC set to  0.000000
1/10/2012	1:30:49 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:30:49 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:30:49 PM	Tube furnace set to 200
1/10/2012	1:31:19 PM	H2 valve closed
1/10/2012	1:31:19 PM	BCl3 valve closed
1/10/2012	1:31:19 PM	PH3 valve closed
1/10/2012	1:31:19 PM	SiCl4 pre valve closed
1/10/2012	1:31:19 PM	SiCl4 post valve closed
1/10/2012	1:31:19 PM	Bypass valve closed
1/10/2012	1:31:19 PM	Bubbler valve closed
1/10/2012	1:31:19 PM	Helium valve opened
1/10/2012	1:31:19 PM	Main Vac valve opened
1/10/2012	1:31:19 PM	Helium MFC set to  20.000000
1/10/2012	1:31:19 PM	H2 MFC set to  0.000000
1/10/2012	1:31:19 PM	BCl3 MFC set to  0.000000
1/10/2012	1:31:19 PM	PH3 MFC set to  0.000000
1/10/2012	1:31:19 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:31:19 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:31:19 PM	Tube furnace set to 200
1/10/2012	1:31:49 PM	Helium valve closed
1/10/2012	1:31:49 PM	H2 valve closed
1/10/2012	1:31:49 PM	BCl3 valve closed
1/10/2012	1:31:49 PM	PH3 valve closed
1/10/2012	1:31:49 PM	SiCl4 pre valve closed
1/10/2012	1:31:49 PM	SiCl4 post valve closed
1/10/2012	1:31:49 PM	Bypass valve closed
1/10/2012	1:31:49 PM	Bubbler valve closed
1/10/2012	1:31:49 PM	Main Vac valve opened
1/10/2012	1:31:49 PM	Helium MFC set to  0.000000
1/10/2012	1:31:49 PM	H2 MFC set to  0.000000
1/10/2012	1:31:49 PM	BCl3 MFC set to  0.000000
1/10/2012	1:31:49 PM	PH3 MFC set to  0.000000
1/10/2012	1:31:49 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:31:49 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:31:49 PM	Tube furnace set to 0
1/10/2012	1:31:50 PM	Run finished at 1:31 PM
1/10/2012	1:38:05 PM	Main Vac valve closed
1/10/2012	1:38:20 PM	Main Vac valve opened
1/10/2012	1:39:03 PM	Recipe started at 1:39 PM
1/10/2012	1:39:03 PM	Helium valve closed
1/10/2012	1:39:03 PM	H2 valve closed
1/10/2012	1:39:03 PM	BCl3 valve closed
1/10/2012	1:39:03 PM	PH3 valve closed
1/10/2012	1:39:03 PM	SiCl4 pre valve closed
1/10/2012	1:39:03 PM	SiCl4 post valve closed
1/10/2012	1:39:03 PM	Main Vac valve closed
1/10/2012	1:39:03 PM	Bypass valve closed
1/10/2012	1:39:03 PM	Bubbler valve closed
1/10/2012	1:39:03 PM	Helium MFC set to  0.000000
1/10/2012	1:39:03 PM	H2 MFC set to  0.000000
1/10/2012	1:39:03 PM	BCl3 MFC set to  0.000000
1/10/2012	1:39:03 PM	PH3 MFC set to  0.000000
1/10/2012	1:39:03 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:39:03 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:39:03 PM	Tube furnace set to 0
1/10/2012	1:39:06 PM	Helium valve closed
1/10/2012	1:39:06 PM	BCl3 valve closed
1/10/2012	1:39:06 PM	PH3 valve closed
1/10/2012	1:39:06 PM	SiCl4 pre valve closed
1/10/2012	1:39:06 PM	SiCl4 post valve closed
1/10/2012	1:39:06 PM	Main Vac valve closed
1/10/2012	1:39:06 PM	Bypass valve closed
1/10/2012	1:39:06 PM	Bubbler valve closed
1/10/2012	1:39:06 PM	H2 valve opened
1/10/2012	1:39:06 PM	Helium MFC set to  0.000000
1/10/2012	1:39:06 PM	H2 MFC set to  500.000000
1/10/2012	1:39:06 PM	BCl3 MFC set to  0.000000
1/10/2012	1:39:06 PM	PH3 MFC set to  0.000000
1/10/2012	1:39:06 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:39:06 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:39:06 PM	Tube furnace set to 0
1/10/2012	1:40:10 PM	Helium valve closed
1/10/2012	1:40:10 PM	BCl3 valve closed
1/10/2012	1:40:10 PM	PH3 valve closed
1/10/2012	1:40:10 PM	SiCl4 pre valve closed
1/10/2012	1:40:10 PM	SiCl4 post valve closed
1/10/2012	1:40:10 PM	Main Vac valve closed
1/10/2012	1:40:10 PM	Bypass valve closed
1/10/2012	1:40:10 PM	H2 valve opened
1/10/2012	1:40:10 PM	Bubbler valve opened
1/10/2012	1:40:10 PM	Helium MFC set to  0.000000
1/10/2012	1:40:10 PM	H2 MFC set to  500.000000
1/10/2012	1:40:10 PM	BCl3 MFC set to  0.000000
1/10/2012	1:40:10 PM	PH3 MFC set to  0.000000
1/10/2012	1:40:10 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:40:10 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:40:10 PM	Tube furnace set to 0
1/10/2012	1:40:11 PM	Helium valve closed
1/10/2012	1:40:11 PM	BCl3 valve closed
1/10/2012	1:40:11 PM	PH3 valve closed
1/10/2012	1:40:11 PM	SiCl4 pre valve closed
1/10/2012	1:40:11 PM	SiCl4 post valve closed
1/10/2012	1:40:12 PM	Main Vac valve closed
1/10/2012	1:40:12 PM	Bypass valve closed
1/10/2012	1:40:12 PM	H2 valve opened
1/10/2012	1:40:12 PM	Bubbler valve opened
1/10/2012	1:40:12 PM	Helium MFC set to  0.000000
1/10/2012	1:40:12 PM	H2 MFC set to  500.000000
1/10/2012	1:40:12 PM	BCl3 MFC set to  0.000000
1/10/2012	1:40:12 PM	PH3 MFC set to  0.000000
1/10/2012	1:40:12 PM	SiCl4 MFC set to  0.000000
1/10/2012	1:40:12 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	1:40:12 PM	Tube furnace set to 1000
1/10/2012	2:00:12 PM	Helium valve closed
1/10/2012	2:00:12 PM	BCl3 valve closed
1/10/2012	2:00:12 PM	Main Vac valve closed
1/10/2012	2:00:12 PM	Bypass valve closed
1/10/2012	2:00:12 PM	H2 valve opened
1/10/2012	2:00:12 PM	PH3 valve opened
1/10/2012	2:00:12 PM	SiCl4 pre valve opened
1/10/2012	2:00:12 PM	SiCl4 post valve opened
1/10/2012	2:00:12 PM	Bubbler valve opened
1/10/2012	2:00:12 PM	Helium MFC set to  0.000000
1/10/2012	2:00:12 PM	H2 MFC set to  500.000000
1/10/2012	2:00:12 PM	BCl3 MFC set to  0.000000
1/10/2012	2:00:12 PM	PH3 MFC set to  0.500000
1/10/2012	2:00:12 PM	SiCl4 MFC set to  25.000000
1/10/2012	2:00:12 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	2:00:12 PM	Tube furnace set to 1000
1/10/2012	2:30:12 PM	Helium valve closed
1/10/2012	2:30:12 PM	BCl3 valve closed
1/10/2012	2:30:12 PM	PH3 valve closed
1/10/2012	2:30:12 PM	SiCl4 pre valve closed
1/10/2012	2:30:12 PM	SiCl4 post valve closed
1/10/2012	2:30:12 PM	Main Vac valve closed
1/10/2012	2:30:12 PM	Bypass valve closed
1/10/2012	2:30:12 PM	H2 valve opened
1/10/2012	2:30:12 PM	Bubbler valve opened
1/10/2012	2:30:12 PM	Helium MFC set to  0.000000
1/10/2012	2:30:12 PM	H2 MFC set to  500.000000
1/10/2012	2:30:12 PM	BCl3 MFC set to  0.000000
1/10/2012	2:30:12 PM	PH3 MFC set to  0.000000
1/10/2012	2:30:12 PM	SiCl4 MFC set to  0.000000
1/10/2012	2:30:12 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	2:30:12 PM	Tube furnace set to 950
1/10/2012	2:32:12 PM	Helium valve closed
1/10/2012	2:32:12 PM	BCl3 valve closed
1/10/2012	2:32:12 PM	PH3 valve closed
1/10/2012	2:32:12 PM	SiCl4 pre valve closed
1/10/2012	2:32:12 PM	SiCl4 post valve closed
1/10/2012	2:32:12 PM	Main Vac valve closed
1/10/2012	2:32:12 PM	Bypass valve closed
1/10/2012	2:32:12 PM	H2 valve opened
1/10/2012	2:32:12 PM	Bubbler valve opened
1/10/2012	2:32:12 PM	Helium MFC set to  0.000000
1/10/2012	2:32:12 PM	H2 MFC set to  500.000000
1/10/2012	2:32:12 PM	BCl3 MFC set to  0.000000
1/10/2012	2:32:12 PM	PH3 MFC set to  0.000000
1/10/2012	2:32:12 PM	SiCl4 MFC set to  0.000000
1/10/2012	2:32:12 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	2:32:12 PM	Tube furnace set to 900
1/10/2012	2:34:12 PM	Helium valve closed
1/10/2012	2:34:12 PM	BCl3 valve closed
1/10/2012	2:34:12 PM	PH3 valve closed
1/10/2012	2:34:12 PM	SiCl4 pre valve closed
1/10/2012	2:34:12 PM	SiCl4 post valve closed
1/10/2012	2:34:12 PM	Main Vac valve closed
1/10/2012	2:34:12 PM	Bypass valve closed
1/10/2012	2:34:12 PM	H2 valve opened
1/10/2012	2:34:12 PM	Bubbler valve opened
1/10/2012	2:34:12 PM	Helium MFC set to  0.000000
1/10/2012	2:34:12 PM	H2 MFC set to  500.000000
1/10/2012	2:34:12 PM	BCl3 MFC set to  0.000000
1/10/2012	2:34:12 PM	PH3 MFC set to  0.000000
1/10/2012	2:34:12 PM	SiCl4 MFC set to  0.000000
1/10/2012	2:34:12 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	2:34:12 PM	Tube furnace set to 850
1/10/2012	2:36:12 PM	H2 valve closed
1/10/2012	2:36:12 PM	BCl3 valve closed
1/10/2012	2:36:12 PM	PH3 valve closed
1/10/2012	2:36:12 PM	SiCl4 pre valve closed
1/10/2012	2:36:12 PM	SiCl4 post valve closed
1/10/2012	2:36:12 PM	Main Vac valve closed
1/10/2012	2:36:12 PM	Bypass valve closed
1/10/2012	2:36:12 PM	Helium valve opened
1/10/2012	2:36:12 PM	Bubbler valve opened
1/10/2012	2:36:12 PM	Helium MFC set to  500.000000
1/10/2012	2:36:12 PM	H2 MFC set to  0.000000
1/10/2012	2:36:12 PM	BCl3 MFC set to  0.000000
1/10/2012	2:36:12 PM	PH3 MFC set to  0.000000
1/10/2012	2:36:12 PM	SiCl4 MFC set to  0.000000
1/10/2012	2:36:12 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	2:36:13 PM	Tube furnace set to 800
1/10/2012	2:38:13 PM	H2 valve closed
1/10/2012	2:38:13 PM	BCl3 valve closed
1/10/2012	2:38:13 PM	PH3 valve closed
1/10/2012	2:38:13 PM	SiCl4 pre valve closed
1/10/2012	2:38:13 PM	SiCl4 post valve closed
1/10/2012	2:38:13 PM	Main Vac valve closed
1/10/2012	2:38:13 PM	Bypass valve closed
1/10/2012	2:38:13 PM	Helium valve opened
1/10/2012	2:38:13 PM	Bubbler valve opened
1/10/2012	2:38:13 PM	Helium MFC set to  500.000000
1/10/2012	2:38:13 PM	H2 MFC set to  0.000000
1/10/2012	2:38:13 PM	BCl3 MFC set to  0.000000
1/10/2012	2:38:13 PM	PH3 MFC set to  0.000000
1/10/2012	2:38:13 PM	SiCl4 MFC set to  0.000000
1/10/2012	2:38:13 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	2:38:13 PM	Tube furnace set to 750
1/10/2012	2:40:13 PM	H2 valve closed
1/10/2012	2:40:13 PM	BCl3 valve closed
1/10/2012	2:40:13 PM	PH3 valve closed
1/10/2012	2:40:13 PM	SiCl4 pre valve closed
1/10/2012	2:40:13 PM	SiCl4 post valve closed
1/10/2012	2:40:13 PM	Main Vac valve closed
1/10/2012	2:40:13 PM	Bypass valve closed
1/10/2012	2:40:13 PM	Helium valve opened
1/10/2012	2:40:13 PM	Bubbler valve opened
1/10/2012	2:40:13 PM	Helium MFC set to  500.000000
1/10/2012	2:40:13 PM	H2 MFC set to  0.000000
1/10/2012	2:40:13 PM	BCl3 MFC set to  0.000000
1/10/2012	2:40:13 PM	PH3 MFC set to  0.000000
1/10/2012	2:40:13 PM	SiCl4 MFC set to  0.000000
1/10/2012	2:40:13 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	2:40:13 PM	Tube furnace set to 0
1/10/2012	3:00:13 PM	Helium valve closed
1/10/2012	3:00:13 PM	H2 valve closed
1/10/2012	3:00:13 PM	BCl3 valve closed
1/10/2012	3:00:13 PM	PH3 valve closed
1/10/2012	3:00:13 PM	SiCl4 pre valve closed
1/10/2012	3:00:13 PM	SiCl4 post valve closed
1/10/2012	3:00:13 PM	Main Vac valve closed
1/10/2012	3:00:13 PM	Bypass valve closed
1/10/2012	3:00:13 PM	Bubbler valve closed
1/10/2012	3:00:13 PM	Helium MFC set to  0.000000
1/10/2012	3:00:13 PM	H2 MFC set to  0.000000
1/10/2012	3:00:13 PM	BCl3 MFC set to  0.000000
1/10/2012	3:00:13 PM	PH3 MFC set to  0.000000
1/10/2012	3:00:13 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:00:13 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:00:13 PM	Tube furnace set to 0
1/10/2012	3:00:14 PM	Run finished at 3:00 PM
1/10/2012	3:06:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2012	3:06:55 PM	Recipe started at 3:06 PM
1/10/2012	3:06:55 PM	Helium valve closed
1/10/2012	3:06:55 PM	H2 valve closed
1/10/2012	3:06:55 PM	BCl3 valve closed
1/10/2012	3:06:55 PM	PH3 valve closed
1/10/2012	3:06:55 PM	SiCl4 pre valve closed
1/10/2012	3:06:55 PM	SiCl4 post valve closed
1/10/2012	3:06:55 PM	Main Vac valve closed
1/10/2012	3:06:55 PM	Bypass valve closed
1/10/2012	3:06:55 PM	Bubbler valve closed
1/10/2012	3:06:55 PM	Helium MFC set to  0.000000
1/10/2012	3:06:55 PM	H2 MFC set to  0.000000
1/10/2012	3:06:55 PM	BCl3 MFC set to  0.000000
1/10/2012	3:06:55 PM	PH3 MFC set to  0.000000
1/10/2012	3:06:55 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:06:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:06:55 PM	Tube furnace set to 0
1/10/2012	3:06:58 PM	H2 valve closed
1/10/2012	3:06:58 PM	BCl3 valve closed
1/10/2012	3:06:58 PM	PH3 valve closed
1/10/2012	3:06:58 PM	SiCl4 pre valve closed
1/10/2012	3:06:58 PM	SiCl4 post valve closed
1/10/2012	3:06:58 PM	Main Vac valve closed
1/10/2012	3:06:58 PM	Bypass valve closed
1/10/2012	3:06:58 PM	Bubbler valve closed
1/10/2012	3:06:58 PM	Helium valve opened
1/10/2012	3:06:58 PM	Helium MFC set to  500.000000
1/10/2012	3:06:58 PM	H2 MFC set to  0.000000
1/10/2012	3:06:58 PM	BCl3 MFC set to  0.000000
1/10/2012	3:06:58 PM	PH3 MFC set to  0.000000
1/10/2012	3:06:58 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:06:58 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:06:58 PM	Tube furnace set to 0
1/10/2012	3:06:58 PM	Helium valve closed
1/10/2012	3:06:58 PM	H2 valve closed
1/10/2012	3:06:58 PM	BCl3 valve closed
1/10/2012	3:06:58 PM	PH3 valve closed
1/10/2012	3:06:58 PM	SiCl4 pre valve closed
1/10/2012	3:06:58 PM	SiCl4 post valve closed
1/10/2012	3:06:58 PM	Main Vac valve closed
1/10/2012	3:06:58 PM	Bypass valve closed
1/10/2012	3:06:58 PM	Bubbler valve closed
1/10/2012	3:06:58 PM	Helium MFC set to  0.000000
1/10/2012	3:06:58 PM	H2 MFC set to  0.000000
1/10/2012	3:06:58 PM	BCl3 MFC set to  0.000000
1/10/2012	3:06:58 PM	PH3 MFC set to  0.000000
1/10/2012	3:06:58 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:06:58 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:06:59 PM	Tube furnace set to 0
1/10/2012	3:07:00 PM	Run finished at 3:07 PM
1/10/2012	3:07:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2012	3:12:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2012	3:12:33 PM	Recipe started at 3:12 PM
1/10/2012	3:12:33 PM	Helium valve closed
1/10/2012	3:12:33 PM	H2 valve closed
1/10/2012	3:12:33 PM	BCl3 valve closed
1/10/2012	3:12:33 PM	PH3 valve closed
1/10/2012	3:12:33 PM	SiCl4 pre valve closed
1/10/2012	3:12:33 PM	SiCl4 post valve closed
1/10/2012	3:12:33 PM	Main Vac valve closed
1/10/2012	3:12:33 PM	Bubbler valve closed
1/10/2012	3:12:33 PM	Bypass valve opened
1/10/2012	3:12:33 PM	Helium MFC set to  0.000000
1/10/2012	3:12:33 PM	H2 MFC set to  0.000000
1/10/2012	3:12:33 PM	BCl3 MFC set to  0.000000
1/10/2012	3:12:33 PM	PH3 MFC set to  0.000000
1/10/2012	3:12:33 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:12:33 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:12:33 PM	Tube furnace set to 0
1/10/2012	3:13:30 PM	Helium valve closed
1/10/2012	3:13:30 PM	H2 valve closed
1/10/2012	3:13:30 PM	BCl3 valve closed
1/10/2012	3:13:30 PM	PH3 valve closed
1/10/2012	3:13:30 PM	SiCl4 pre valve closed
1/10/2012	3:13:30 PM	SiCl4 post valve closed
1/10/2012	3:13:30 PM	Main Vac valve closed
1/10/2012	3:13:30 PM	Bubbler valve closed
1/10/2012	3:13:30 PM	Bypass valve opened
1/10/2012	3:13:30 PM	Helium MFC set to  0.000000
1/10/2012	3:13:30 PM	H2 MFC set to  0.000000
1/10/2012	3:13:30 PM	BCl3 MFC set to  0.000000
1/10/2012	3:13:30 PM	PH3 MFC set to  0.000000
1/10/2012	3:13:30 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:13:30 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:13:30 PM	Tube furnace set to 0
1/10/2012	3:14:30 PM	Helium valve closed
1/10/2012	3:14:30 PM	H2 valve closed
1/10/2012	3:14:30 PM	BCl3 valve closed
1/10/2012	3:14:30 PM	PH3 valve closed
1/10/2012	3:14:30 PM	SiCl4 pre valve closed
1/10/2012	3:14:30 PM	SiCl4 post valve closed
1/10/2012	3:14:30 PM	Bypass valve closed
1/10/2012	3:14:30 PM	Bubbler valve closed
1/10/2012	3:14:30 PM	Main Vac valve opened
1/10/2012	3:14:30 PM	Helium MFC set to  0.000000
1/10/2012	3:14:30 PM	H2 MFC set to  0.000000
1/10/2012	3:14:30 PM	BCl3 MFC set to  0.000000
1/10/2012	3:14:30 PM	PH3 MFC set to  0.000000
1/10/2012	3:14:30 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:14:30 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:14:31 PM	Tube furnace set to 0
1/10/2012	3:14:32 PM	Run finished at 3:14 PM
1/10/2012	3:14:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2012	3:28:17 PM	Main Vac valve closed
1/10/2012	3:28:24 PM	Main Vac valve opened
1/10/2012	3:28:54 PM	Recipe started at 3:28 PM
1/10/2012	3:28:54 PM	Helium valve closed
1/10/2012	3:28:54 PM	H2 valve closed
1/10/2012	3:28:54 PM	BCl3 valve closed
1/10/2012	3:28:54 PM	PH3 valve closed
1/10/2012	3:28:54 PM	SiCl4 pre valve closed
1/10/2012	3:28:54 PM	SiCl4 post valve closed
1/10/2012	3:28:54 PM	Bypass valve closed
1/10/2012	3:28:54 PM	Bubbler valve closed
1/10/2012	3:28:54 PM	Main Vac valve opened
1/10/2012	3:28:54 PM	Helium MFC set to  0.000000
1/10/2012	3:28:54 PM	H2 MFC set to  0.000000
1/10/2012	3:28:54 PM	BCl3 MFC set to  0.000000
1/10/2012	3:28:54 PM	PH3 MFC set to  0.000000
1/10/2012	3:28:54 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:28:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:28:54 PM	Tube furnace set to 0
1/10/2012	3:29:24 PM	H2 valve closed
1/10/2012	3:29:24 PM	BCl3 valve closed
1/10/2012	3:29:24 PM	PH3 valve closed
1/10/2012	3:29:24 PM	SiCl4 pre valve closed
1/10/2012	3:29:24 PM	SiCl4 post valve closed
1/10/2012	3:29:24 PM	Bypass valve closed
1/10/2012	3:29:24 PM	Bubbler valve closed
1/10/2012	3:29:24 PM	Helium valve opened
1/10/2012	3:29:24 PM	Main Vac valve opened
1/10/2012	3:29:24 PM	Helium MFC set to  20.000000
1/10/2012	3:29:24 PM	H2 MFC set to  0.000000
1/10/2012	3:29:24 PM	BCl3 MFC set to  0.000000
1/10/2012	3:29:24 PM	PH3 MFC set to  0.000000
1/10/2012	3:29:24 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:29:24 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:29:24 PM	Tube furnace set to 0
1/10/2012	3:29:54 PM	Helium valve closed
1/10/2012	3:29:54 PM	H2 valve closed
1/10/2012	3:29:54 PM	BCl3 valve closed
1/10/2012	3:29:54 PM	PH3 valve closed
1/10/2012	3:29:54 PM	SiCl4 pre valve closed
1/10/2012	3:29:54 PM	SiCl4 post valve closed
1/10/2012	3:29:54 PM	Bypass valve closed
1/10/2012	3:29:54 PM	Bubbler valve closed
1/10/2012	3:29:54 PM	Main Vac valve opened
1/10/2012	3:29:54 PM	Helium MFC set to  0.000000
1/10/2012	3:29:54 PM	H2 MFC set to  0.000000
1/10/2012	3:29:54 PM	BCl3 MFC set to  0.000000
1/10/2012	3:29:54 PM	PH3 MFC set to  0.000000
1/10/2012	3:29:54 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:29:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:29:54 PM	Tube furnace set to 0
1/10/2012	3:30:24 PM	H2 valve closed
1/10/2012	3:30:24 PM	BCl3 valve closed
1/10/2012	3:30:24 PM	PH3 valve closed
1/10/2012	3:30:24 PM	SiCl4 pre valve closed
1/10/2012	3:30:24 PM	SiCl4 post valve closed
1/10/2012	3:30:24 PM	Bypass valve closed
1/10/2012	3:30:24 PM	Bubbler valve closed
1/10/2012	3:30:24 PM	Helium valve opened
1/10/2012	3:30:24 PM	Main Vac valve opened
1/10/2012	3:30:24 PM	Helium MFC set to  20.000000
1/10/2012	3:30:24 PM	H2 MFC set to  0.000000
1/10/2012	3:30:24 PM	BCl3 MFC set to  0.000000
1/10/2012	3:30:24 PM	PH3 MFC set to  0.000000
1/10/2012	3:30:24 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:30:24 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:30:25 PM	Tube furnace set to 0
1/10/2012	3:30:54 PM	Helium valve closed
1/10/2012	3:30:55 PM	H2 valve closed
1/10/2012	3:30:55 PM	BCl3 valve closed
1/10/2012	3:30:55 PM	PH3 valve closed
1/10/2012	3:30:55 PM	SiCl4 pre valve closed
1/10/2012	3:30:55 PM	SiCl4 post valve closed
1/10/2012	3:30:55 PM	Bypass valve closed
1/10/2012	3:30:55 PM	Bubbler valve closed
1/10/2012	3:30:55 PM	Main Vac valve opened
1/10/2012	3:30:55 PM	Helium MFC set to  0.000000
1/10/2012	3:30:55 PM	H2 MFC set to  0.000000
1/10/2012	3:30:55 PM	BCl3 MFC set to  0.000000
1/10/2012	3:30:55 PM	PH3 MFC set to  0.000000
1/10/2012	3:30:55 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:30:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:30:55 PM	Tube furnace set to 0
1/10/2012	3:31:25 PM	H2 valve closed
1/10/2012	3:31:25 PM	BCl3 valve closed
1/10/2012	3:31:25 PM	PH3 valve closed
1/10/2012	3:31:25 PM	SiCl4 pre valve closed
1/10/2012	3:31:25 PM	SiCl4 post valve closed
1/10/2012	3:31:25 PM	Bypass valve closed
1/10/2012	3:31:25 PM	Bubbler valve closed
1/10/2012	3:31:25 PM	Helium valve opened
1/10/2012	3:31:25 PM	Main Vac valve opened
1/10/2012	3:31:25 PM	Helium MFC set to  20.000000
1/10/2012	3:31:25 PM	H2 MFC set to  0.000000
1/10/2012	3:31:25 PM	BCl3 MFC set to  0.000000
1/10/2012	3:31:25 PM	PH3 MFC set to  0.000000
1/10/2012	3:31:25 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:31:25 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:31:25 PM	Tube furnace set to 0
1/10/2012	3:31:55 PM	Helium valve closed
1/10/2012	3:31:55 PM	H2 valve closed
1/10/2012	3:31:55 PM	BCl3 valve closed
1/10/2012	3:31:55 PM	PH3 valve closed
1/10/2012	3:31:55 PM	SiCl4 pre valve closed
1/10/2012	3:31:55 PM	SiCl4 post valve closed
1/10/2012	3:31:55 PM	Bypass valve closed
1/10/2012	3:31:55 PM	Bubbler valve closed
1/10/2012	3:31:55 PM	Main Vac valve opened
1/10/2012	3:31:55 PM	Helium MFC set to  0.000000
1/10/2012	3:31:55 PM	H2 MFC set to  0.000000
1/10/2012	3:31:55 PM	BCl3 MFC set to  0.000000
1/10/2012	3:31:55 PM	PH3 MFC set to  0.000000
1/10/2012	3:31:55 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:31:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:31:55 PM	Tube furnace set to 0
1/10/2012	3:32:25 PM	H2 valve closed
1/10/2012	3:32:25 PM	BCl3 valve closed
1/10/2012	3:32:25 PM	PH3 valve closed
1/10/2012	3:32:25 PM	SiCl4 pre valve closed
1/10/2012	3:32:25 PM	SiCl4 post valve closed
1/10/2012	3:32:25 PM	Bypass valve closed
1/10/2012	3:32:25 PM	Bubbler valve closed
1/10/2012	3:32:25 PM	Helium valve opened
1/10/2012	3:32:25 PM	Main Vac valve opened
1/10/2012	3:32:25 PM	Helium MFC set to  20.000000
1/10/2012	3:32:25 PM	H2 MFC set to  0.000000
1/10/2012	3:32:25 PM	BCl3 MFC set to  0.000000
1/10/2012	3:32:25 PM	PH3 MFC set to  0.000000
1/10/2012	3:32:25 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:32:25 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:32:25 PM	Tube furnace set to 0
1/10/2012	3:32:55 PM	Helium valve closed
1/10/2012	3:32:55 PM	H2 valve closed
1/10/2012	3:32:55 PM	BCl3 valve closed
1/10/2012	3:32:55 PM	PH3 valve closed
1/10/2012	3:32:55 PM	SiCl4 pre valve closed
1/10/2012	3:32:55 PM	SiCl4 post valve closed
1/10/2012	3:32:55 PM	Bypass valve closed
1/10/2012	3:32:55 PM	Bubbler valve closed
1/10/2012	3:32:55 PM	Main Vac valve opened
1/10/2012	3:32:55 PM	Helium MFC set to  0.000000
1/10/2012	3:32:55 PM	H2 MFC set to  0.000000
1/10/2012	3:32:55 PM	BCl3 MFC set to  0.000000
1/10/2012	3:32:55 PM	PH3 MFC set to  0.000000
1/10/2012	3:32:55 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:32:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:32:55 PM	Tube furnace set to 0
1/10/2012	3:33:26 PM	H2 valve closed
1/10/2012	3:33:26 PM	BCl3 valve closed
1/10/2012	3:33:26 PM	PH3 valve closed
1/10/2012	3:33:26 PM	SiCl4 pre valve closed
1/10/2012	3:33:26 PM	SiCl4 post valve closed
1/10/2012	3:33:26 PM	Bypass valve closed
1/10/2012	3:33:26 PM	Bubbler valve closed
1/10/2012	3:33:26 PM	Helium valve opened
1/10/2012	3:33:26 PM	Main Vac valve opened
1/10/2012	3:33:26 PM	Helium MFC set to  20.000000
1/10/2012	3:33:26 PM	H2 MFC set to  0.000000
1/10/2012	3:33:26 PM	BCl3 MFC set to  0.000000
1/10/2012	3:33:26 PM	PH3 MFC set to  0.000000
1/10/2012	3:33:26 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:33:26 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:33:26 PM	Tube furnace set to 0
1/10/2012	3:33:56 PM	Helium valve closed
1/10/2012	3:33:56 PM	H2 valve closed
1/10/2012	3:33:56 PM	BCl3 valve closed
1/10/2012	3:33:56 PM	PH3 valve closed
1/10/2012	3:33:56 PM	SiCl4 pre valve closed
1/10/2012	3:33:56 PM	SiCl4 post valve closed
1/10/2012	3:33:56 PM	Bypass valve closed
1/10/2012	3:33:56 PM	Bubbler valve closed
1/10/2012	3:33:56 PM	Main Vac valve opened
1/10/2012	3:33:56 PM	Helium MFC set to  0.000000
1/10/2012	3:33:56 PM	H2 MFC set to  0.000000
1/10/2012	3:33:56 PM	BCl3 MFC set to  0.000000
1/10/2012	3:33:56 PM	PH3 MFC set to  0.000000
1/10/2012	3:33:56 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:33:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:33:56 PM	Tube furnace set to 0
1/10/2012	3:34:26 PM	H2 valve closed
1/10/2012	3:34:26 PM	BCl3 valve closed
1/10/2012	3:34:26 PM	PH3 valve closed
1/10/2012	3:34:26 PM	SiCl4 pre valve closed
1/10/2012	3:34:26 PM	SiCl4 post valve closed
1/10/2012	3:34:26 PM	Bypass valve closed
1/10/2012	3:34:26 PM	Bubbler valve closed
1/10/2012	3:34:26 PM	Helium valve opened
1/10/2012	3:34:26 PM	Main Vac valve opened
1/10/2012	3:34:26 PM	Helium MFC set to  20.000000
1/10/2012	3:34:26 PM	H2 MFC set to  0.000000
1/10/2012	3:34:26 PM	BCl3 MFC set to  0.000000
1/10/2012	3:34:26 PM	PH3 MFC set to  0.000000
1/10/2012	3:34:26 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:34:26 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:34:26 PM	Tube furnace set to 0
1/10/2012	3:34:56 PM	Helium valve closed
1/10/2012	3:34:56 PM	H2 valve closed
1/10/2012	3:34:56 PM	BCl3 valve closed
1/10/2012	3:34:56 PM	PH3 valve closed
1/10/2012	3:34:56 PM	SiCl4 pre valve closed
1/10/2012	3:34:56 PM	SiCl4 post valve closed
1/10/2012	3:34:56 PM	Bypass valve closed
1/10/2012	3:34:56 PM	Bubbler valve closed
1/10/2012	3:34:56 PM	Main Vac valve opened
1/10/2012	3:34:56 PM	Helium MFC set to  0.000000
1/10/2012	3:34:56 PM	H2 MFC set to  0.000000
1/10/2012	3:34:56 PM	BCl3 MFC set to  0.000000
1/10/2012	3:34:56 PM	PH3 MFC set to  0.000000
1/10/2012	3:34:56 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:34:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:34:56 PM	Tube furnace set to 0
1/10/2012	3:35:26 PM	H2 valve closed
1/10/2012	3:35:26 PM	BCl3 valve closed
1/10/2012	3:35:26 PM	PH3 valve closed
1/10/2012	3:35:26 PM	SiCl4 pre valve closed
1/10/2012	3:35:26 PM	SiCl4 post valve closed
1/10/2012	3:35:26 PM	Bypass valve closed
1/10/2012	3:35:26 PM	Bubbler valve closed
1/10/2012	3:35:26 PM	Helium valve opened
1/10/2012	3:35:26 PM	Main Vac valve opened
1/10/2012	3:35:26 PM	Helium MFC set to  20.000000
1/10/2012	3:35:26 PM	H2 MFC set to  0.000000
1/10/2012	3:35:26 PM	BCl3 MFC set to  0.000000
1/10/2012	3:35:26 PM	PH3 MFC set to  0.000000
1/10/2012	3:35:26 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:35:26 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:35:27 PM	Tube furnace set to 0
1/10/2012	3:35:57 PM	Helium valve closed
1/10/2012	3:35:57 PM	H2 valve closed
1/10/2012	3:35:57 PM	BCl3 valve closed
1/10/2012	3:35:57 PM	PH3 valve closed
1/10/2012	3:35:57 PM	SiCl4 pre valve closed
1/10/2012	3:35:57 PM	SiCl4 post valve closed
1/10/2012	3:35:57 PM	Bypass valve closed
1/10/2012	3:35:57 PM	Bubbler valve closed
1/10/2012	3:35:57 PM	Main Vac valve opened
1/10/2012	3:35:57 PM	Helium MFC set to  0.000000
1/10/2012	3:35:57 PM	H2 MFC set to  0.000000
1/10/2012	3:35:57 PM	BCl3 MFC set to  0.000000
1/10/2012	3:35:57 PM	PH3 MFC set to  0.000000
1/10/2012	3:35:57 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:35:57 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:35:57 PM	Tube furnace set to 0
1/10/2012	3:36:27 PM	H2 valve closed
1/10/2012	3:36:27 PM	BCl3 valve closed
1/10/2012	3:36:27 PM	PH3 valve closed
1/10/2012	3:36:27 PM	SiCl4 pre valve closed
1/10/2012	3:36:27 PM	SiCl4 post valve closed
1/10/2012	3:36:27 PM	Bypass valve closed
1/10/2012	3:36:27 PM	Bubbler valve closed
1/10/2012	3:36:27 PM	Helium valve opened
1/10/2012	3:36:27 PM	Main Vac valve opened
1/10/2012	3:36:27 PM	Helium MFC set to  20.000000
1/10/2012	3:36:27 PM	H2 MFC set to  0.000000
1/10/2012	3:36:27 PM	BCl3 MFC set to  0.000000
1/10/2012	3:36:27 PM	PH3 MFC set to  0.000000
1/10/2012	3:36:27 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:36:27 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:36:27 PM	Tube furnace set to 0
1/10/2012	3:36:57 PM	Helium valve closed
1/10/2012	3:36:57 PM	H2 valve closed
1/10/2012	3:36:57 PM	BCl3 valve closed
1/10/2012	3:36:57 PM	PH3 valve closed
1/10/2012	3:36:57 PM	SiCl4 pre valve closed
1/10/2012	3:36:57 PM	SiCl4 post valve closed
1/10/2012	3:36:57 PM	Bypass valve closed
1/10/2012	3:36:57 PM	Bubbler valve closed
1/10/2012	3:36:57 PM	Main Vac valve opened
1/10/2012	3:36:57 PM	Helium MFC set to  0.000000
1/10/2012	3:36:57 PM	H2 MFC set to  0.000000
1/10/2012	3:36:57 PM	BCl3 MFC set to  0.000000
1/10/2012	3:36:57 PM	PH3 MFC set to  0.000000
1/10/2012	3:36:57 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:36:57 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:36:57 PM	Tube furnace set to 0
1/10/2012	3:37:27 PM	H2 valve closed
1/10/2012	3:37:27 PM	BCl3 valve closed
1/10/2012	3:37:27 PM	PH3 valve closed
1/10/2012	3:37:27 PM	SiCl4 pre valve closed
1/10/2012	3:37:27 PM	SiCl4 post valve closed
1/10/2012	3:37:27 PM	Bypass valve closed
1/10/2012	3:37:27 PM	Bubbler valve closed
1/10/2012	3:37:27 PM	Helium valve opened
1/10/2012	3:37:27 PM	Main Vac valve opened
1/10/2012	3:37:27 PM	Helium MFC set to  20.000000
1/10/2012	3:37:27 PM	H2 MFC set to  0.000000
1/10/2012	3:37:27 PM	BCl3 MFC set to  0.000000
1/10/2012	3:37:27 PM	PH3 MFC set to  0.000000
1/10/2012	3:37:27 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:37:27 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:37:27 PM	Tube furnace set to 0
1/10/2012	3:37:57 PM	Helium valve closed
1/10/2012	3:37:57 PM	H2 valve closed
1/10/2012	3:37:57 PM	BCl3 valve closed
1/10/2012	3:37:57 PM	PH3 valve closed
1/10/2012	3:37:57 PM	SiCl4 pre valve closed
1/10/2012	3:37:57 PM	SiCl4 post valve closed
1/10/2012	3:37:57 PM	Bypass valve closed
1/10/2012	3:37:57 PM	Bubbler valve closed
1/10/2012	3:37:57 PM	Main Vac valve opened
1/10/2012	3:37:57 PM	Helium MFC set to  0.000000
1/10/2012	3:37:57 PM	H2 MFC set to  0.000000
1/10/2012	3:37:57 PM	BCl3 MFC set to  0.000000
1/10/2012	3:37:57 PM	PH3 MFC set to  0.000000
1/10/2012	3:37:57 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:37:57 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:37:58 PM	Tube furnace set to 200
1/10/2012	3:38:28 PM	H2 valve closed
1/10/2012	3:38:28 PM	BCl3 valve closed
1/10/2012	3:38:28 PM	PH3 valve closed
1/10/2012	3:38:28 PM	SiCl4 pre valve closed
1/10/2012	3:38:28 PM	SiCl4 post valve closed
1/10/2012	3:38:28 PM	Bypass valve closed
1/10/2012	3:38:28 PM	Bubbler valve closed
1/10/2012	3:38:28 PM	Helium valve opened
1/10/2012	3:38:28 PM	Main Vac valve opened
1/10/2012	3:38:28 PM	Helium MFC set to  20.000000
1/10/2012	3:38:28 PM	H2 MFC set to  0.000000
1/10/2012	3:38:28 PM	BCl3 MFC set to  0.000000
1/10/2012	3:38:28 PM	PH3 MFC set to  0.000000
1/10/2012	3:38:28 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:38:28 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:38:28 PM	Tube furnace set to 200
1/10/2012	3:38:58 PM	Helium valve closed
1/10/2012	3:38:58 PM	H2 valve closed
1/10/2012	3:38:58 PM	BCl3 valve closed
1/10/2012	3:38:58 PM	PH3 valve closed
1/10/2012	3:38:58 PM	SiCl4 pre valve closed
1/10/2012	3:38:58 PM	SiCl4 post valve closed
1/10/2012	3:38:58 PM	Bypass valve closed
1/10/2012	3:38:58 PM	Bubbler valve closed
1/10/2012	3:38:58 PM	Main Vac valve opened
1/10/2012	3:38:58 PM	Helium MFC set to  0.000000
1/10/2012	3:38:58 PM	H2 MFC set to  0.000000
1/10/2012	3:38:58 PM	BCl3 MFC set to  0.000000
1/10/2012	3:38:58 PM	PH3 MFC set to  0.000000
1/10/2012	3:38:58 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:38:58 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:38:58 PM	Tube furnace set to 200
1/10/2012	3:39:28 PM	H2 valve closed
1/10/2012	3:39:28 PM	BCl3 valve closed
1/10/2012	3:39:28 PM	PH3 valve closed
1/10/2012	3:39:28 PM	SiCl4 pre valve closed
1/10/2012	3:39:28 PM	SiCl4 post valve closed
1/10/2012	3:39:28 PM	Bypass valve closed
1/10/2012	3:39:28 PM	Bubbler valve closed
1/10/2012	3:39:28 PM	Helium valve opened
1/10/2012	3:39:28 PM	Main Vac valve opened
1/10/2012	3:39:28 PM	Helium MFC set to  20.000000
1/10/2012	3:39:28 PM	H2 MFC set to  0.000000
1/10/2012	3:39:28 PM	BCl3 MFC set to  0.000000
1/10/2012	3:39:28 PM	PH3 MFC set to  0.000000
1/10/2012	3:39:28 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:39:28 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:39:28 PM	Tube furnace set to 200
1/10/2012	3:39:58 PM	Helium valve closed
1/10/2012	3:39:58 PM	H2 valve closed
1/10/2012	3:39:58 PM	BCl3 valve closed
1/10/2012	3:39:58 PM	PH3 valve closed
1/10/2012	3:39:58 PM	SiCl4 pre valve closed
1/10/2012	3:39:58 PM	SiCl4 post valve closed
1/10/2012	3:39:58 PM	Bypass valve closed
1/10/2012	3:39:58 PM	Bubbler valve closed
1/10/2012	3:39:58 PM	Main Vac valve opened
1/10/2012	3:39:58 PM	Helium MFC set to  0.000000
1/10/2012	3:39:58 PM	H2 MFC set to  0.000000
1/10/2012	3:39:58 PM	BCl3 MFC set to  0.000000
1/10/2012	3:39:58 PM	PH3 MFC set to  0.000000
1/10/2012	3:39:58 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:39:58 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:39:58 PM	Tube furnace set to 200
1/10/2012	3:40:28 PM	H2 valve closed
1/10/2012	3:40:28 PM	BCl3 valve closed
1/10/2012	3:40:28 PM	PH3 valve closed
1/10/2012	3:40:28 PM	SiCl4 pre valve closed
1/10/2012	3:40:28 PM	SiCl4 post valve closed
1/10/2012	3:40:28 PM	Bypass valve closed
1/10/2012	3:40:28 PM	Bubbler valve closed
1/10/2012	3:40:28 PM	Helium valve opened
1/10/2012	3:40:28 PM	Main Vac valve opened
1/10/2012	3:40:28 PM	Helium MFC set to  20.000000
1/10/2012	3:40:28 PM	H2 MFC set to  0.000000
1/10/2012	3:40:28 PM	BCl3 MFC set to  0.000000
1/10/2012	3:40:28 PM	PH3 MFC set to  0.000000
1/10/2012	3:40:28 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:40:28 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:40:29 PM	Tube furnace set to 200
1/10/2012	3:40:59 PM	Helium valve closed
1/10/2012	3:40:59 PM	H2 valve closed
1/10/2012	3:40:59 PM	BCl3 valve closed
1/10/2012	3:40:59 PM	PH3 valve closed
1/10/2012	3:40:59 PM	SiCl4 pre valve closed
1/10/2012	3:40:59 PM	SiCl4 post valve closed
1/10/2012	3:40:59 PM	Bypass valve closed
1/10/2012	3:40:59 PM	Bubbler valve closed
1/10/2012	3:40:59 PM	Main Vac valve opened
1/10/2012	3:40:59 PM	Helium MFC set to  0.000000
1/10/2012	3:40:59 PM	H2 MFC set to  0.000000
1/10/2012	3:40:59 PM	BCl3 MFC set to  0.000000
1/10/2012	3:40:59 PM	PH3 MFC set to  0.000000
1/10/2012	3:40:59 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:40:59 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:40:59 PM	Tube furnace set to 200
1/10/2012	3:41:29 PM	H2 valve closed
1/10/2012	3:41:29 PM	BCl3 valve closed
1/10/2012	3:41:29 PM	PH3 valve closed
1/10/2012	3:41:29 PM	SiCl4 pre valve closed
1/10/2012	3:41:29 PM	SiCl4 post valve closed
1/10/2012	3:41:29 PM	Bypass valve closed
1/10/2012	3:41:29 PM	Bubbler valve closed
1/10/2012	3:41:29 PM	Helium valve opened
1/10/2012	3:41:29 PM	Main Vac valve opened
1/10/2012	3:41:29 PM	Helium MFC set to  20.000000
1/10/2012	3:41:29 PM	H2 MFC set to  0.000000
1/10/2012	3:41:29 PM	BCl3 MFC set to  0.000000
1/10/2012	3:41:29 PM	PH3 MFC set to  0.000000
1/10/2012	3:41:29 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:41:29 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:41:29 PM	Tube furnace set to 200
1/10/2012	3:41:59 PM	Helium valve closed
1/10/2012	3:41:59 PM	H2 valve closed
1/10/2012	3:41:59 PM	BCl3 valve closed
1/10/2012	3:41:59 PM	PH3 valve closed
1/10/2012	3:41:59 PM	SiCl4 pre valve closed
1/10/2012	3:41:59 PM	SiCl4 post valve closed
1/10/2012	3:41:59 PM	Bypass valve closed
1/10/2012	3:41:59 PM	Bubbler valve closed
1/10/2012	3:41:59 PM	Main Vac valve opened
1/10/2012	3:41:59 PM	Helium MFC set to  0.000000
1/10/2012	3:41:59 PM	H2 MFC set to  0.000000
1/10/2012	3:41:59 PM	BCl3 MFC set to  0.000000
1/10/2012	3:41:59 PM	PH3 MFC set to  0.000000
1/10/2012	3:41:59 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:41:59 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:41:59 PM	Tube furnace set to 200
1/10/2012	3:42:29 PM	H2 valve closed
1/10/2012	3:42:29 PM	BCl3 valve closed
1/10/2012	3:42:29 PM	PH3 valve closed
1/10/2012	3:42:29 PM	SiCl4 pre valve closed
1/10/2012	3:42:29 PM	SiCl4 post valve closed
1/10/2012	3:42:29 PM	Bypass valve closed
1/10/2012	3:42:29 PM	Bubbler valve closed
1/10/2012	3:42:29 PM	Helium valve opened
1/10/2012	3:42:29 PM	Main Vac valve opened
1/10/2012	3:42:29 PM	Helium MFC set to  20.000000
1/10/2012	3:42:29 PM	H2 MFC set to  0.000000
1/10/2012	3:42:29 PM	BCl3 MFC set to  0.000000
1/10/2012	3:42:29 PM	PH3 MFC set to  0.000000
1/10/2012	3:42:29 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:42:29 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:42:29 PM	Tube furnace set to 200
1/10/2012	3:42:59 PM	Helium valve closed
1/10/2012	3:42:59 PM	H2 valve closed
1/10/2012	3:42:59 PM	BCl3 valve closed
1/10/2012	3:42:59 PM	PH3 valve closed
1/10/2012	3:42:59 PM	SiCl4 pre valve closed
1/10/2012	3:42:59 PM	SiCl4 post valve closed
1/10/2012	3:42:59 PM	Bypass valve closed
1/10/2012	3:42:59 PM	Bubbler valve closed
1/10/2012	3:42:59 PM	Main Vac valve opened
1/10/2012	3:42:59 PM	Helium MFC set to  0.000000
1/10/2012	3:42:59 PM	H2 MFC set to  0.000000
1/10/2012	3:42:59 PM	BCl3 MFC set to  0.000000
1/10/2012	3:42:59 PM	PH3 MFC set to  0.000000
1/10/2012	3:42:59 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:42:59 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:43:00 PM	Tube furnace set to 200
1/10/2012	3:43:30 PM	H2 valve closed
1/10/2012	3:43:30 PM	BCl3 valve closed
1/10/2012	3:43:30 PM	PH3 valve closed
1/10/2012	3:43:30 PM	SiCl4 pre valve closed
1/10/2012	3:43:30 PM	SiCl4 post valve closed
1/10/2012	3:43:30 PM	Bypass valve closed
1/10/2012	3:43:30 PM	Bubbler valve closed
1/10/2012	3:43:30 PM	Helium valve opened
1/10/2012	3:43:30 PM	Main Vac valve opened
1/10/2012	3:43:30 PM	Helium MFC set to  20.000000
1/10/2012	3:43:30 PM	H2 MFC set to  0.000000
1/10/2012	3:43:30 PM	BCl3 MFC set to  0.000000
1/10/2012	3:43:30 PM	PH3 MFC set to  0.000000
1/10/2012	3:43:30 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:43:30 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:43:30 PM	Tube furnace set to 200
1/10/2012	3:44:00 PM	Helium valve closed
1/10/2012	3:44:00 PM	H2 valve closed
1/10/2012	3:44:00 PM	BCl3 valve closed
1/10/2012	3:44:00 PM	PH3 valve closed
1/10/2012	3:44:00 PM	SiCl4 pre valve closed
1/10/2012	3:44:00 PM	SiCl4 post valve closed
1/10/2012	3:44:00 PM	Bypass valve closed
1/10/2012	3:44:00 PM	Bubbler valve closed
1/10/2012	3:44:00 PM	Main Vac valve opened
1/10/2012	3:44:00 PM	Helium MFC set to  0.000000
1/10/2012	3:44:00 PM	H2 MFC set to  0.000000
1/10/2012	3:44:00 PM	BCl3 MFC set to  0.000000
1/10/2012	3:44:00 PM	PH3 MFC set to  0.000000
1/10/2012	3:44:00 PM	SiCl4 MFC set to  0.000000
1/10/2012	3:44:00 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	3:44:00 PM	Tube furnace set to 0
1/10/2012	3:44:01 PM	Run finished at 3:44 PM
1/10/2012	4:57:36 PM	Recipe started at 4:57 PM
1/10/2012	4:57:36 PM	Helium valve closed
1/10/2012	4:57:36 PM	H2 valve closed
1/10/2012	4:57:36 PM	BCl3 valve closed
1/10/2012	4:57:36 PM	PH3 valve closed
1/10/2012	4:57:36 PM	SiCl4 pre valve closed
1/10/2012	4:57:36 PM	SiCl4 post valve closed
1/10/2012	4:57:36 PM	Main Vac valve closed
1/10/2012	4:57:36 PM	Bypass valve closed
1/10/2012	4:57:36 PM	Bubbler valve closed
1/10/2012	4:57:36 PM	Helium MFC set to  0.000000
1/10/2012	4:57:36 PM	H2 MFC set to  0.000000
1/10/2012	4:57:36 PM	BCl3 MFC set to  0.000000
1/10/2012	4:57:36 PM	PH3 MFC set to  0.000000
1/10/2012	4:57:36 PM	SiCl4 MFC set to  0.000000
1/10/2012	4:57:36 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	4:57:36 PM	Tube furnace set to 0
1/10/2012	4:57:39 PM	Helium valve closed
1/10/2012	4:57:39 PM	BCl3 valve closed
1/10/2012	4:57:39 PM	PH3 valve closed
1/10/2012	4:57:39 PM	SiCl4 pre valve closed
1/10/2012	4:57:39 PM	SiCl4 post valve closed
1/10/2012	4:57:39 PM	Main Vac valve closed
1/10/2012	4:57:39 PM	Bypass valve closed
1/10/2012	4:57:39 PM	Bubbler valve closed
1/10/2012	4:57:39 PM	H2 valve opened
1/10/2012	4:57:39 PM	Helium MFC set to  0.000000
1/10/2012	4:57:39 PM	H2 MFC set to  500.000000
1/10/2012	4:57:39 PM	BCl3 MFC set to  0.000000
1/10/2012	4:57:39 PM	PH3 MFC set to  0.000000
1/10/2012	4:57:39 PM	SiCl4 MFC set to  0.000000
1/10/2012	4:57:39 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	4:57:39 PM	Tube furnace set to 0
1/10/2012	4:58:45 PM	Helium valve closed
1/10/2012	4:58:45 PM	BCl3 valve closed
1/10/2012	4:58:45 PM	PH3 valve closed
1/10/2012	4:58:45 PM	SiCl4 pre valve closed
1/10/2012	4:58:45 PM	SiCl4 post valve closed
1/10/2012	4:58:45 PM	Main Vac valve closed
1/10/2012	4:58:45 PM	Bypass valve closed
1/10/2012	4:58:45 PM	H2 valve opened
1/10/2012	4:58:45 PM	Bubbler valve opened
1/10/2012	4:58:45 PM	Helium MFC set to  0.000000
1/10/2012	4:58:45 PM	H2 MFC set to  500.000000
1/10/2012	4:58:45 PM	BCl3 MFC set to  0.000000
1/10/2012	4:58:45 PM	PH3 MFC set to  0.000000
1/10/2012	4:58:45 PM	SiCl4 MFC set to  0.000000
1/10/2012	4:58:45 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	4:58:45 PM	Tube furnace set to 0
1/10/2012	4:58:46 PM	Helium valve closed
1/10/2012	4:58:46 PM	BCl3 valve closed
1/10/2012	4:58:46 PM	PH3 valve closed
1/10/2012	4:58:46 PM	SiCl4 pre valve closed
1/10/2012	4:58:46 PM	SiCl4 post valve closed
1/10/2012	4:58:46 PM	Main Vac valve closed
1/10/2012	4:58:46 PM	Bypass valve closed
1/10/2012	4:58:46 PM	H2 valve opened
1/10/2012	4:58:46 PM	Bubbler valve opened
1/10/2012	4:58:46 PM	Helium MFC set to  0.000000
1/10/2012	4:58:46 PM	H2 MFC set to  500.000000
1/10/2012	4:58:46 PM	BCl3 MFC set to  0.000000
1/10/2012	4:58:46 PM	PH3 MFC set to  0.000000
1/10/2012	4:58:46 PM	SiCl4 MFC set to  0.000000
1/10/2012	4:58:46 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	4:58:46 PM	Tube furnace set to 1000
1/10/2012	5:18:46 PM	Helium valve closed
1/10/2012	5:18:46 PM	BCl3 valve closed
1/10/2012	5:18:46 PM	Main Vac valve closed
1/10/2012	5:18:46 PM	Bypass valve closed
1/10/2012	5:18:46 PM	H2 valve opened
1/10/2012	5:18:46 PM	PH3 valve opened
1/10/2012	5:18:46 PM	SiCl4 pre valve opened
1/10/2012	5:18:46 PM	SiCl4 post valve opened
1/10/2012	5:18:46 PM	Bubbler valve opened
1/10/2012	5:18:46 PM	Helium MFC set to  0.000000
1/10/2012	5:18:46 PM	H2 MFC set to  500.000000
1/10/2012	5:18:46 PM	BCl3 MFC set to  0.000000
1/10/2012	5:18:46 PM	PH3 MFC set to  0.300000
1/10/2012	5:18:46 PM	SiCl4 MFC set to  25.000000
1/10/2012	5:18:46 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	5:18:46 PM	Tube furnace set to 1000
1/10/2012	5:48:46 PM	Helium valve closed
1/10/2012	5:48:46 PM	BCl3 valve closed
1/10/2012	5:48:46 PM	PH3 valve closed
1/10/2012	5:48:46 PM	SiCl4 pre valve closed
1/10/2012	5:48:46 PM	SiCl4 post valve closed
1/10/2012	5:48:46 PM	Main Vac valve closed
1/10/2012	5:48:46 PM	Bypass valve closed
1/10/2012	5:48:46 PM	H2 valve opened
1/10/2012	5:48:46 PM	Bubbler valve opened
1/10/2012	5:48:46 PM	Helium MFC set to  0.000000
1/10/2012	5:48:46 PM	H2 MFC set to  500.000000
1/10/2012	5:48:46 PM	BCl3 MFC set to  0.000000
1/10/2012	5:48:46 PM	PH3 MFC set to  0.000000
1/10/2012	5:48:46 PM	SiCl4 MFC set to  0.000000
1/10/2012	5:48:46 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	5:48:46 PM	Tube furnace set to 950
1/10/2012	5:50:46 PM	Helium valve closed
1/10/2012	5:50:46 PM	BCl3 valve closed
1/10/2012	5:50:46 PM	PH3 valve closed
1/10/2012	5:50:46 PM	SiCl4 pre valve closed
1/10/2012	5:50:46 PM	SiCl4 post valve closed
1/10/2012	5:50:46 PM	Main Vac valve closed
1/10/2012	5:50:46 PM	Bypass valve closed
1/10/2012	5:50:46 PM	H2 valve opened
1/10/2012	5:50:46 PM	Bubbler valve opened
1/10/2012	5:50:46 PM	Helium MFC set to  0.000000
1/10/2012	5:50:46 PM	H2 MFC set to  500.000000
1/10/2012	5:50:46 PM	BCl3 MFC set to  0.000000
1/10/2012	5:50:46 PM	PH3 MFC set to  0.000000
1/10/2012	5:50:46 PM	SiCl4 MFC set to  0.000000
1/10/2012	5:50:46 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	5:50:46 PM	Tube furnace set to 900
1/10/2012	5:52:46 PM	Helium valve closed
1/10/2012	5:52:46 PM	BCl3 valve closed
1/10/2012	5:52:46 PM	PH3 valve closed
1/10/2012	5:52:46 PM	SiCl4 pre valve closed
1/10/2012	5:52:46 PM	SiCl4 post valve closed
1/10/2012	5:52:46 PM	Main Vac valve closed
1/10/2012	5:52:46 PM	Bypass valve closed
1/10/2012	5:52:46 PM	H2 valve opened
1/10/2012	5:52:46 PM	Bubbler valve opened
1/10/2012	5:52:46 PM	Helium MFC set to  0.000000
1/10/2012	5:52:46 PM	H2 MFC set to  500.000000
1/10/2012	5:52:46 PM	BCl3 MFC set to  0.000000
1/10/2012	5:52:46 PM	PH3 MFC set to  0.000000
1/10/2012	5:52:46 PM	SiCl4 MFC set to  0.000000
1/10/2012	5:52:46 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	5:52:47 PM	Tube furnace set to 850
1/10/2012	5:54:47 PM	H2 valve closed
1/10/2012	5:54:47 PM	BCl3 valve closed
1/10/2012	5:54:47 PM	PH3 valve closed
1/10/2012	5:54:47 PM	SiCl4 pre valve closed
1/10/2012	5:54:47 PM	SiCl4 post valve closed
1/10/2012	5:54:47 PM	Main Vac valve closed
1/10/2012	5:54:47 PM	Bypass valve closed
1/10/2012	5:54:47 PM	Helium valve opened
1/10/2012	5:54:47 PM	Bubbler valve opened
1/10/2012	5:54:47 PM	Helium MFC set to  500.000000
1/10/2012	5:54:47 PM	H2 MFC set to  0.000000
1/10/2012	5:54:47 PM	BCl3 MFC set to  0.000000
1/10/2012	5:54:47 PM	PH3 MFC set to  0.000000
1/10/2012	5:54:47 PM	SiCl4 MFC set to  0.000000
1/10/2012	5:54:47 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	5:54:47 PM	Tube furnace set to 800
1/10/2012	5:56:47 PM	H2 valve closed
1/10/2012	5:56:47 PM	BCl3 valve closed
1/10/2012	5:56:47 PM	PH3 valve closed
1/10/2012	5:56:47 PM	SiCl4 pre valve closed
1/10/2012	5:56:47 PM	SiCl4 post valve closed
1/10/2012	5:56:47 PM	Main Vac valve closed
1/10/2012	5:56:47 PM	Bypass valve closed
1/10/2012	5:56:47 PM	Helium valve opened
1/10/2012	5:56:47 PM	Bubbler valve opened
1/10/2012	5:56:47 PM	Helium MFC set to  500.000000
1/10/2012	5:56:47 PM	H2 MFC set to  0.000000
1/10/2012	5:56:47 PM	BCl3 MFC set to  0.000000
1/10/2012	5:56:47 PM	PH3 MFC set to  0.000000
1/10/2012	5:56:47 PM	SiCl4 MFC set to  0.000000
1/10/2012	5:56:47 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	5:56:47 PM	Tube furnace set to 750
1/10/2012	5:58:47 PM	H2 valve closed
1/10/2012	5:58:47 PM	BCl3 valve closed
1/10/2012	5:58:47 PM	PH3 valve closed
1/10/2012	5:58:47 PM	SiCl4 pre valve closed
1/10/2012	5:58:47 PM	SiCl4 post valve closed
1/10/2012	5:58:47 PM	Main Vac valve closed
1/10/2012	5:58:47 PM	Bypass valve closed
1/10/2012	5:58:47 PM	Helium valve opened
1/10/2012	5:58:47 PM	Bubbler valve opened
1/10/2012	5:58:47 PM	Helium MFC set to  500.000000
1/10/2012	5:58:47 PM	H2 MFC set to  0.000000
1/10/2012	5:58:47 PM	BCl3 MFC set to  0.000000
1/10/2012	5:58:47 PM	PH3 MFC set to  0.000000
1/10/2012	5:58:47 PM	SiCl4 MFC set to  0.000000
1/10/2012	5:58:47 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	5:58:47 PM	Tube furnace set to 0
1/10/2012	6:18:47 PM	Helium valve closed
1/10/2012	6:18:47 PM	H2 valve closed
1/10/2012	6:18:47 PM	BCl3 valve closed
1/10/2012	6:18:47 PM	PH3 valve closed
1/10/2012	6:18:47 PM	SiCl4 pre valve closed
1/10/2012	6:18:47 PM	SiCl4 post valve closed
1/10/2012	6:18:47 PM	Main Vac valve closed
1/10/2012	6:18:47 PM	Bypass valve closed
1/10/2012	6:18:47 PM	Bubbler valve closed
1/10/2012	6:18:47 PM	Helium MFC set to  0.000000
1/10/2012	6:18:47 PM	H2 MFC set to  0.000000
1/10/2012	6:18:47 PM	BCl3 MFC set to  0.000000
1/10/2012	6:18:47 PM	PH3 MFC set to  0.000000
1/10/2012	6:18:47 PM	SiCl4 MFC set to  0.000000
1/10/2012	6:18:47 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	6:18:47 PM	Tube furnace set to 0
1/10/2012	6:18:48 PM	Run finished at 6:18 PM
1/10/2012	6:36:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2012	6:36:25 PM	Recipe started at 6:36 PM
1/10/2012	6:36:25 PM	Helium valve closed
1/10/2012	6:36:25 PM	H2 valve closed
1/10/2012	6:36:25 PM	BCl3 valve closed
1/10/2012	6:36:25 PM	PH3 valve closed
1/10/2012	6:36:25 PM	SiCl4 pre valve closed
1/10/2012	6:36:25 PM	SiCl4 post valve closed
1/10/2012	6:36:25 PM	Main Vac valve closed
1/10/2012	6:36:25 PM	Bypass valve closed
1/10/2012	6:36:25 PM	Bubbler valve closed
1/10/2012	6:36:25 PM	Helium MFC set to  0.000000
1/10/2012	6:36:25 PM	H2 MFC set to  0.000000
1/10/2012	6:36:25 PM	BCl3 MFC set to  0.000000
1/10/2012	6:36:25 PM	PH3 MFC set to  0.000000
1/10/2012	6:36:25 PM	SiCl4 MFC set to  0.000000
1/10/2012	6:36:25 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	6:36:25 PM	Tube furnace set to 0
1/10/2012	6:36:28 PM	H2 valve closed
1/10/2012	6:36:28 PM	BCl3 valve closed
1/10/2012	6:36:28 PM	PH3 valve closed
1/10/2012	6:36:28 PM	SiCl4 pre valve closed
1/10/2012	6:36:28 PM	SiCl4 post valve closed
1/10/2012	6:36:28 PM	Main Vac valve closed
1/10/2012	6:36:28 PM	Bypass valve closed
1/10/2012	6:36:28 PM	Bubbler valve closed
1/10/2012	6:36:28 PM	Helium valve opened
1/10/2012	6:36:28 PM	Helium MFC set to  500.000000
1/10/2012	6:36:28 PM	H2 MFC set to  0.000000
1/10/2012	6:36:28 PM	BCl3 MFC set to  0.000000
1/10/2012	6:36:28 PM	PH3 MFC set to  0.000000
1/10/2012	6:36:28 PM	SiCl4 MFC set to  0.000000
1/10/2012	6:36:28 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	6:36:28 PM	Tube furnace set to 0
1/10/2012	6:36:34 PM	Helium valve closed
1/10/2012	6:36:34 PM	H2 valve closed
1/10/2012	6:36:34 PM	BCl3 valve closed
1/10/2012	6:36:34 PM	PH3 valve closed
1/10/2012	6:36:34 PM	SiCl4 pre valve closed
1/10/2012	6:36:34 PM	SiCl4 post valve closed
1/10/2012	6:36:34 PM	Main Vac valve closed
1/10/2012	6:36:34 PM	Bypass valve closed
1/10/2012	6:36:34 PM	Bubbler valve closed
1/10/2012	6:36:34 PM	Helium MFC set to  0.000000
1/10/2012	6:36:34 PM	H2 MFC set to  0.000000
1/10/2012	6:36:34 PM	BCl3 MFC set to  0.000000
1/10/2012	6:36:34 PM	PH3 MFC set to  0.000000
1/10/2012	6:36:34 PM	SiCl4 MFC set to  0.000000
1/10/2012	6:36:34 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	6:36:34 PM	Tube furnace set to 0
1/10/2012	6:36:35 PM	Run finished at 6:36 PM
1/10/2012	6:36:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2012	6:41:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2012	6:41:17 PM	Recipe started at 6:41 PM
1/10/2012	6:41:17 PM	Helium valve closed
1/10/2012	6:41:17 PM	H2 valve closed
1/10/2012	6:41:17 PM	BCl3 valve closed
1/10/2012	6:41:17 PM	PH3 valve closed
1/10/2012	6:41:17 PM	SiCl4 pre valve closed
1/10/2012	6:41:17 PM	SiCl4 post valve closed
1/10/2012	6:41:17 PM	Main Vac valve closed
1/10/2012	6:41:17 PM	Bubbler valve closed
1/10/2012	6:41:17 PM	Bypass valve opened
1/10/2012	6:41:17 PM	Helium MFC set to  0.000000
1/10/2012	6:41:17 PM	H2 MFC set to  0.000000
1/10/2012	6:41:17 PM	BCl3 MFC set to  0.000000
1/10/2012	6:41:17 PM	PH3 MFC set to  0.000000
1/10/2012	6:41:17 PM	SiCl4 MFC set to  0.000000
1/10/2012	6:41:17 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	6:41:17 PM	Tube furnace set to 0
1/10/2012	6:42:13 PM	Helium valve closed
1/10/2012	6:42:13 PM	H2 valve closed
1/10/2012	6:42:13 PM	BCl3 valve closed
1/10/2012	6:42:13 PM	PH3 valve closed
1/10/2012	6:42:13 PM	SiCl4 pre valve closed
1/10/2012	6:42:13 PM	SiCl4 post valve closed
1/10/2012	6:42:13 PM	Main Vac valve closed
1/10/2012	6:42:13 PM	Bubbler valve closed
1/10/2012	6:42:13 PM	Bypass valve opened
1/10/2012	6:42:13 PM	Helium MFC set to  0.000000
1/10/2012	6:42:13 PM	H2 MFC set to  0.000000
1/10/2012	6:42:13 PM	BCl3 MFC set to  0.000000
1/10/2012	6:42:13 PM	PH3 MFC set to  0.000000
1/10/2012	6:42:13 PM	SiCl4 MFC set to  0.000000
1/10/2012	6:42:13 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	6:42:14 PM	Tube furnace set to 0
1/10/2012	6:43:14 PM	Helium valve closed
1/10/2012	6:43:14 PM	H2 valve closed
1/10/2012	6:43:14 PM	BCl3 valve closed
1/10/2012	6:43:14 PM	PH3 valve closed
1/10/2012	6:43:14 PM	SiCl4 pre valve closed
1/10/2012	6:43:14 PM	SiCl4 post valve closed
1/10/2012	6:43:14 PM	Bypass valve closed
1/10/2012	6:43:14 PM	Bubbler valve closed
1/10/2012	6:43:14 PM	Main Vac valve opened
1/10/2012	6:43:14 PM	Helium MFC set to  0.000000
1/10/2012	6:43:14 PM	H2 MFC set to  0.000000
1/10/2012	6:43:14 PM	BCl3 MFC set to  0.000000
1/10/2012	6:43:14 PM	PH3 MFC set to  0.000000
1/10/2012	6:43:14 PM	SiCl4 MFC set to  0.000000
1/10/2012	6:43:14 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	6:43:14 PM	Tube furnace set to 0
1/10/2012	6:43:15 PM	Run finished at 6:43 PM
1/10/2012	6:43:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2012	6:47:42 PM	Main Vac valve closed
1/10/2012	6:47:51 PM	Main Vac valve opened
1/10/2012	7:10:17 PM	Main Vac valve closed
1/10/2012	7:10:20 PM	Main Vac valve opened
1/10/2012	7:10:27 PM	Main Vac valve closed
1/10/2012	7:10:34 PM	Main Vac valve opened
1/10/2012	7:10:46 PM	Recipe started at 7:10 PM
1/10/2012	7:10:46 PM	Helium valve closed
1/10/2012	7:10:46 PM	H2 valve closed
1/10/2012	7:10:46 PM	BCl3 valve closed
1/10/2012	7:10:46 PM	PH3 valve closed
1/10/2012	7:10:46 PM	SiCl4 pre valve closed
1/10/2012	7:10:46 PM	SiCl4 post valve closed
1/10/2012	7:10:46 PM	Bypass valve closed
1/10/2012	7:10:46 PM	Bubbler valve closed
1/10/2012	7:10:46 PM	Main Vac valve opened
1/10/2012	7:10:46 PM	Helium MFC set to  0.000000
1/10/2012	7:10:46 PM	H2 MFC set to  0.000000
1/10/2012	7:10:46 PM	BCl3 MFC set to  0.000000
1/10/2012	7:10:46 PM	PH3 MFC set to  0.000000
1/10/2012	7:10:46 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:10:46 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:10:46 PM	Tube furnace set to 0
1/10/2012	7:10:48 PM	H2 valve closed
1/10/2012	7:10:48 PM	BCl3 valve closed
1/10/2012	7:10:48 PM	PH3 valve closed
1/10/2012	7:10:48 PM	SiCl4 pre valve closed
1/10/2012	7:10:48 PM	SiCl4 post valve closed
1/10/2012	7:10:48 PM	Bypass valve closed
1/10/2012	7:10:48 PM	Bubbler valve closed
1/10/2012	7:10:48 PM	Helium valve opened
1/10/2012	7:10:48 PM	Main Vac valve opened
1/10/2012	7:10:48 PM	Helium MFC set to  20.000000
1/10/2012	7:10:48 PM	H2 MFC set to  0.000000
1/10/2012	7:10:48 PM	BCl3 MFC set to  0.000000
1/10/2012	7:10:48 PM	PH3 MFC set to  0.000000
1/10/2012	7:10:48 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:10:48 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:10:49 PM	Tube furnace set to 0
1/10/2012	7:11:19 PM	Helium valve closed
1/10/2012	7:11:19 PM	H2 valve closed
1/10/2012	7:11:19 PM	BCl3 valve closed
1/10/2012	7:11:19 PM	PH3 valve closed
1/10/2012	7:11:19 PM	SiCl4 pre valve closed
1/10/2012	7:11:19 PM	SiCl4 post valve closed
1/10/2012	7:11:19 PM	Bypass valve closed
1/10/2012	7:11:19 PM	Bubbler valve closed
1/10/2012	7:11:19 PM	Main Vac valve opened
1/10/2012	7:11:19 PM	Helium MFC set to  0.000000
1/10/2012	7:11:19 PM	H2 MFC set to  0.000000
1/10/2012	7:11:19 PM	BCl3 MFC set to  0.000000
1/10/2012	7:11:19 PM	PH3 MFC set to  0.000000
1/10/2012	7:11:19 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:11:19 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:11:19 PM	Tube furnace set to 0
1/10/2012	7:11:49 PM	H2 valve closed
1/10/2012	7:11:49 PM	BCl3 valve closed
1/10/2012	7:11:49 PM	PH3 valve closed
1/10/2012	7:11:49 PM	SiCl4 pre valve closed
1/10/2012	7:11:49 PM	SiCl4 post valve closed
1/10/2012	7:11:49 PM	Bypass valve closed
1/10/2012	7:11:49 PM	Bubbler valve closed
1/10/2012	7:11:49 PM	Helium valve opened
1/10/2012	7:11:49 PM	Main Vac valve opened
1/10/2012	7:11:49 PM	Helium MFC set to  20.000000
1/10/2012	7:11:49 PM	H2 MFC set to  0.000000
1/10/2012	7:11:49 PM	BCl3 MFC set to  0.000000
1/10/2012	7:11:49 PM	PH3 MFC set to  0.000000
1/10/2012	7:11:49 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:11:49 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:11:49 PM	Tube furnace set to 0
1/10/2012	7:12:19 PM	Helium valve closed
1/10/2012	7:12:19 PM	H2 valve closed
1/10/2012	7:12:19 PM	BCl3 valve closed
1/10/2012	7:12:19 PM	PH3 valve closed
1/10/2012	7:12:19 PM	SiCl4 pre valve closed
1/10/2012	7:12:19 PM	SiCl4 post valve closed
1/10/2012	7:12:19 PM	Bypass valve closed
1/10/2012	7:12:19 PM	Bubbler valve closed
1/10/2012	7:12:19 PM	Main Vac valve opened
1/10/2012	7:12:19 PM	Helium MFC set to  0.000000
1/10/2012	7:12:19 PM	H2 MFC set to  0.000000
1/10/2012	7:12:19 PM	BCl3 MFC set to  0.000000
1/10/2012	7:12:19 PM	PH3 MFC set to  0.000000
1/10/2012	7:12:19 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:12:19 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:12:19 PM	Tube furnace set to 0
1/10/2012	7:12:49 PM	H2 valve closed
1/10/2012	7:12:49 PM	BCl3 valve closed
1/10/2012	7:12:49 PM	PH3 valve closed
1/10/2012	7:12:49 PM	SiCl4 pre valve closed
1/10/2012	7:12:49 PM	SiCl4 post valve closed
1/10/2012	7:12:49 PM	Bypass valve closed
1/10/2012	7:12:49 PM	Bubbler valve closed
1/10/2012	7:12:49 PM	Helium valve opened
1/10/2012	7:12:49 PM	Main Vac valve opened
1/10/2012	7:12:49 PM	Helium MFC set to  20.000000
1/10/2012	7:12:49 PM	H2 MFC set to  0.000000
1/10/2012	7:12:49 PM	BCl3 MFC set to  0.000000
1/10/2012	7:12:49 PM	PH3 MFC set to  0.000000
1/10/2012	7:12:49 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:12:49 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:12:49 PM	Tube furnace set to 0
1/10/2012	7:13:19 PM	Helium valve closed
1/10/2012	7:13:19 PM	H2 valve closed
1/10/2012	7:13:19 PM	BCl3 valve closed
1/10/2012	7:13:19 PM	PH3 valve closed
1/10/2012	7:13:19 PM	SiCl4 pre valve closed
1/10/2012	7:13:19 PM	SiCl4 post valve closed
1/10/2012	7:13:19 PM	Bypass valve closed
1/10/2012	7:13:19 PM	Bubbler valve closed
1/10/2012	7:13:19 PM	Main Vac valve opened
1/10/2012	7:13:19 PM	Helium MFC set to  0.000000
1/10/2012	7:13:19 PM	H2 MFC set to  0.000000
1/10/2012	7:13:19 PM	BCl3 MFC set to  0.000000
1/10/2012	7:13:19 PM	PH3 MFC set to  0.000000
1/10/2012	7:13:19 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:13:19 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:13:20 PM	Tube furnace set to 0
1/10/2012	7:13:50 PM	H2 valve closed
1/10/2012	7:13:50 PM	BCl3 valve closed
1/10/2012	7:13:50 PM	PH3 valve closed
1/10/2012	7:13:50 PM	SiCl4 pre valve closed
1/10/2012	7:13:50 PM	SiCl4 post valve closed
1/10/2012	7:13:50 PM	Bypass valve closed
1/10/2012	7:13:50 PM	Bubbler valve closed
1/10/2012	7:13:50 PM	Helium valve opened
1/10/2012	7:13:50 PM	Main Vac valve opened
1/10/2012	7:13:50 PM	Helium MFC set to  20.000000
1/10/2012	7:13:50 PM	H2 MFC set to  0.000000
1/10/2012	7:13:50 PM	BCl3 MFC set to  0.000000
1/10/2012	7:13:50 PM	PH3 MFC set to  0.000000
1/10/2012	7:13:50 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:13:50 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:13:50 PM	Tube furnace set to 0
1/10/2012	7:14:20 PM	Helium valve closed
1/10/2012	7:14:20 PM	H2 valve closed
1/10/2012	7:14:20 PM	BCl3 valve closed
1/10/2012	7:14:20 PM	PH3 valve closed
1/10/2012	7:14:20 PM	SiCl4 pre valve closed
1/10/2012	7:14:20 PM	SiCl4 post valve closed
1/10/2012	7:14:20 PM	Bypass valve closed
1/10/2012	7:14:20 PM	Bubbler valve closed
1/10/2012	7:14:20 PM	Main Vac valve opened
1/10/2012	7:14:20 PM	Helium MFC set to  0.000000
1/10/2012	7:14:20 PM	H2 MFC set to  0.000000
1/10/2012	7:14:20 PM	BCl3 MFC set to  0.000000
1/10/2012	7:14:20 PM	PH3 MFC set to  0.000000
1/10/2012	7:14:20 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:14:20 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:14:20 PM	Tube furnace set to 0
1/10/2012	7:14:50 PM	H2 valve closed
1/10/2012	7:14:50 PM	BCl3 valve closed
1/10/2012	7:14:50 PM	PH3 valve closed
1/10/2012	7:14:50 PM	SiCl4 pre valve closed
1/10/2012	7:14:50 PM	SiCl4 post valve closed
1/10/2012	7:14:50 PM	Bypass valve closed
1/10/2012	7:14:50 PM	Bubbler valve closed
1/10/2012	7:14:50 PM	Helium valve opened
1/10/2012	7:14:50 PM	Main Vac valve opened
1/10/2012	7:14:50 PM	Helium MFC set to  20.000000
1/10/2012	7:14:50 PM	H2 MFC set to  0.000000
1/10/2012	7:14:50 PM	BCl3 MFC set to  0.000000
1/10/2012	7:14:50 PM	PH3 MFC set to  0.000000
1/10/2012	7:14:50 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:14:50 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:14:50 PM	Tube furnace set to 0
1/10/2012	7:15:20 PM	Helium valve closed
1/10/2012	7:15:20 PM	H2 valve closed
1/10/2012	7:15:20 PM	BCl3 valve closed
1/10/2012	7:15:20 PM	PH3 valve closed
1/10/2012	7:15:20 PM	SiCl4 pre valve closed
1/10/2012	7:15:20 PM	SiCl4 post valve closed
1/10/2012	7:15:20 PM	Bypass valve closed
1/10/2012	7:15:20 PM	Bubbler valve closed
1/10/2012	7:15:20 PM	Main Vac valve opened
1/10/2012	7:15:20 PM	Helium MFC set to  0.000000
1/10/2012	7:15:20 PM	H2 MFC set to  0.000000
1/10/2012	7:15:20 PM	BCl3 MFC set to  0.000000
1/10/2012	7:15:20 PM	PH3 MFC set to  0.000000
1/10/2012	7:15:20 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:15:20 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:15:20 PM	Tube furnace set to 0
1/10/2012	7:15:50 PM	H2 valve closed
1/10/2012	7:15:50 PM	BCl3 valve closed
1/10/2012	7:15:50 PM	PH3 valve closed
1/10/2012	7:15:50 PM	SiCl4 pre valve closed
1/10/2012	7:15:50 PM	SiCl4 post valve closed
1/10/2012	7:15:50 PM	Bypass valve closed
1/10/2012	7:15:50 PM	Bubbler valve closed
1/10/2012	7:15:50 PM	Helium valve opened
1/10/2012	7:15:50 PM	Main Vac valve opened
1/10/2012	7:15:50 PM	Helium MFC set to  20.000000
1/10/2012	7:15:50 PM	H2 MFC set to  0.000000
1/10/2012	7:15:50 PM	BCl3 MFC set to  0.000000
1/10/2012	7:15:50 PM	PH3 MFC set to  0.000000
1/10/2012	7:15:50 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:15:50 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:15:51 PM	Tube furnace set to 0
1/10/2012	7:16:21 PM	Helium valve closed
1/10/2012	7:16:21 PM	H2 valve closed
1/10/2012	7:16:21 PM	BCl3 valve closed
1/10/2012	7:16:21 PM	PH3 valve closed
1/10/2012	7:16:21 PM	SiCl4 pre valve closed
1/10/2012	7:16:21 PM	SiCl4 post valve closed
1/10/2012	7:16:21 PM	Bypass valve closed
1/10/2012	7:16:21 PM	Bubbler valve closed
1/10/2012	7:16:21 PM	Main Vac valve opened
1/10/2012	7:16:21 PM	Helium MFC set to  0.000000
1/10/2012	7:16:21 PM	H2 MFC set to  0.000000
1/10/2012	7:16:21 PM	BCl3 MFC set to  0.000000
1/10/2012	7:16:21 PM	PH3 MFC set to  0.000000
1/10/2012	7:16:21 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:16:21 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:16:21 PM	Tube furnace set to 0
1/10/2012	7:16:51 PM	H2 valve closed
1/10/2012	7:16:51 PM	BCl3 valve closed
1/10/2012	7:16:51 PM	PH3 valve closed
1/10/2012	7:16:51 PM	SiCl4 pre valve closed
1/10/2012	7:16:51 PM	SiCl4 post valve closed
1/10/2012	7:16:51 PM	Bypass valve closed
1/10/2012	7:16:51 PM	Bubbler valve closed
1/10/2012	7:16:51 PM	Helium valve opened
1/10/2012	7:16:51 PM	Main Vac valve opened
1/10/2012	7:16:51 PM	Helium MFC set to  20.000000
1/10/2012	7:16:51 PM	H2 MFC set to  0.000000
1/10/2012	7:16:51 PM	BCl3 MFC set to  0.000000
1/10/2012	7:16:51 PM	PH3 MFC set to  0.000000
1/10/2012	7:16:51 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:16:51 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:16:51 PM	Tube furnace set to 0
1/10/2012	7:17:21 PM	Helium valve closed
1/10/2012	7:17:21 PM	H2 valve closed
1/10/2012	7:17:21 PM	BCl3 valve closed
1/10/2012	7:17:21 PM	PH3 valve closed
1/10/2012	7:17:21 PM	SiCl4 pre valve closed
1/10/2012	7:17:21 PM	SiCl4 post valve closed
1/10/2012	7:17:21 PM	Bypass valve closed
1/10/2012	7:17:21 PM	Bubbler valve closed
1/10/2012	7:17:21 PM	Main Vac valve opened
1/10/2012	7:17:21 PM	Helium MFC set to  0.000000
1/10/2012	7:17:21 PM	H2 MFC set to  0.000000
1/10/2012	7:17:21 PM	BCl3 MFC set to  0.000000
1/10/2012	7:17:21 PM	PH3 MFC set to  0.000000
1/10/2012	7:17:21 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:17:21 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:17:21 PM	Tube furnace set to 0
1/10/2012	7:17:51 PM	H2 valve closed
1/10/2012	7:17:51 PM	BCl3 valve closed
1/10/2012	7:17:51 PM	PH3 valve closed
1/10/2012	7:17:51 PM	SiCl4 pre valve closed
1/10/2012	7:17:51 PM	SiCl4 post valve closed
1/10/2012	7:17:51 PM	Bypass valve closed
1/10/2012	7:17:51 PM	Bubbler valve closed
1/10/2012	7:17:51 PM	Helium valve opened
1/10/2012	7:17:51 PM	Main Vac valve opened
1/10/2012	7:17:51 PM	Helium MFC set to  20.000000
1/10/2012	7:17:51 PM	H2 MFC set to  0.000000
1/10/2012	7:17:51 PM	BCl3 MFC set to  0.000000
1/10/2012	7:17:51 PM	PH3 MFC set to  0.000000
1/10/2012	7:17:51 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:17:51 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:17:51 PM	Tube furnace set to 0
1/10/2012	7:18:21 PM	Helium valve closed
1/10/2012	7:18:21 PM	H2 valve closed
1/10/2012	7:18:22 PM	BCl3 valve closed
1/10/2012	7:18:22 PM	PH3 valve closed
1/10/2012	7:18:22 PM	SiCl4 pre valve closed
1/10/2012	7:18:22 PM	SiCl4 post valve closed
1/10/2012	7:18:22 PM	Bypass valve closed
1/10/2012	7:18:22 PM	Bubbler valve closed
1/10/2012	7:18:22 PM	Main Vac valve opened
1/10/2012	7:18:22 PM	Helium MFC set to  0.000000
1/10/2012	7:18:22 PM	H2 MFC set to  0.000000
1/10/2012	7:18:22 PM	BCl3 MFC set to  0.000000
1/10/2012	7:18:22 PM	PH3 MFC set to  0.000000
1/10/2012	7:18:22 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:18:22 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:18:22 PM	Tube furnace set to 0
1/10/2012	7:18:52 PM	H2 valve closed
1/10/2012	7:18:52 PM	BCl3 valve closed
1/10/2012	7:18:52 PM	PH3 valve closed
1/10/2012	7:18:52 PM	SiCl4 pre valve closed
1/10/2012	7:18:52 PM	SiCl4 post valve closed
1/10/2012	7:18:52 PM	Bypass valve closed
1/10/2012	7:18:52 PM	Bubbler valve closed
1/10/2012	7:18:52 PM	Helium valve opened
1/10/2012	7:18:52 PM	Main Vac valve opened
1/10/2012	7:18:52 PM	Helium MFC set to  20.000000
1/10/2012	7:18:52 PM	H2 MFC set to  0.000000
1/10/2012	7:18:52 PM	BCl3 MFC set to  0.000000
1/10/2012	7:18:52 PM	PH3 MFC set to  0.000000
1/10/2012	7:18:52 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:18:52 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:18:52 PM	Tube furnace set to 0
1/10/2012	7:19:22 PM	Helium valve closed
1/10/2012	7:19:22 PM	H2 valve closed
1/10/2012	7:19:22 PM	BCl3 valve closed
1/10/2012	7:19:22 PM	PH3 valve closed
1/10/2012	7:19:22 PM	SiCl4 pre valve closed
1/10/2012	7:19:22 PM	SiCl4 post valve closed
1/10/2012	7:19:22 PM	Bypass valve closed
1/10/2012	7:19:22 PM	Bubbler valve closed
1/10/2012	7:19:22 PM	Main Vac valve opened
1/10/2012	7:19:22 PM	Helium MFC set to  0.000000
1/10/2012	7:19:22 PM	H2 MFC set to  0.000000
1/10/2012	7:19:22 PM	BCl3 MFC set to  0.000000
1/10/2012	7:19:22 PM	PH3 MFC set to  0.000000
1/10/2012	7:19:22 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:19:22 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:19:22 PM	Tube furnace set to 200
1/10/2012	7:19:52 PM	H2 valve closed
1/10/2012	7:19:52 PM	BCl3 valve closed
1/10/2012	7:19:52 PM	PH3 valve closed
1/10/2012	7:19:52 PM	SiCl4 pre valve closed
1/10/2012	7:19:52 PM	SiCl4 post valve closed
1/10/2012	7:19:52 PM	Bypass valve closed
1/10/2012	7:19:52 PM	Bubbler valve closed
1/10/2012	7:19:52 PM	Helium valve opened
1/10/2012	7:19:52 PM	Main Vac valve opened
1/10/2012	7:19:52 PM	Helium MFC set to  20.000000
1/10/2012	7:19:52 PM	H2 MFC set to  0.000000
1/10/2012	7:19:52 PM	BCl3 MFC set to  0.000000
1/10/2012	7:19:52 PM	PH3 MFC set to  0.000000
1/10/2012	7:19:52 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:19:52 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:19:52 PM	Tube furnace set to 200
1/10/2012	7:20:22 PM	Helium valve closed
1/10/2012	7:20:22 PM	H2 valve closed
1/10/2012	7:20:22 PM	BCl3 valve closed
1/10/2012	7:20:22 PM	PH3 valve closed
1/10/2012	7:20:22 PM	SiCl4 pre valve closed
1/10/2012	7:20:22 PM	SiCl4 post valve closed
1/10/2012	7:20:22 PM	Bypass valve closed
1/10/2012	7:20:22 PM	Bubbler valve closed
1/10/2012	7:20:22 PM	Main Vac valve opened
1/10/2012	7:20:22 PM	Helium MFC set to  0.000000
1/10/2012	7:20:22 PM	H2 MFC set to  0.000000
1/10/2012	7:20:22 PM	BCl3 MFC set to  0.000000
1/10/2012	7:20:22 PM	PH3 MFC set to  0.000000
1/10/2012	7:20:22 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:20:22 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:20:23 PM	Tube furnace set to 200
1/10/2012	7:20:53 PM	H2 valve closed
1/10/2012	7:20:53 PM	BCl3 valve closed
1/10/2012	7:20:53 PM	PH3 valve closed
1/10/2012	7:20:53 PM	SiCl4 pre valve closed
1/10/2012	7:20:53 PM	SiCl4 post valve closed
1/10/2012	7:20:53 PM	Bypass valve closed
1/10/2012	7:20:53 PM	Bubbler valve closed
1/10/2012	7:20:53 PM	Helium valve opened
1/10/2012	7:20:53 PM	Main Vac valve opened
1/10/2012	7:20:53 PM	Helium MFC set to  20.000000
1/10/2012	7:20:53 PM	H2 MFC set to  0.000000
1/10/2012	7:20:53 PM	BCl3 MFC set to  0.000000
1/10/2012	7:20:53 PM	PH3 MFC set to  0.000000
1/10/2012	7:20:53 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:20:53 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:20:53 PM	Tube furnace set to 200
1/10/2012	7:21:23 PM	Helium valve closed
1/10/2012	7:21:23 PM	H2 valve closed
1/10/2012	7:21:23 PM	BCl3 valve closed
1/10/2012	7:21:23 PM	PH3 valve closed
1/10/2012	7:21:23 PM	SiCl4 pre valve closed
1/10/2012	7:21:23 PM	SiCl4 post valve closed
1/10/2012	7:21:23 PM	Bypass valve closed
1/10/2012	7:21:23 PM	Bubbler valve closed
1/10/2012	7:21:23 PM	Main Vac valve opened
1/10/2012	7:21:23 PM	Helium MFC set to  0.000000
1/10/2012	7:21:23 PM	H2 MFC set to  0.000000
1/10/2012	7:21:23 PM	BCl3 MFC set to  0.000000
1/10/2012	7:21:23 PM	PH3 MFC set to  0.000000
1/10/2012	7:21:23 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:21:23 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:21:23 PM	Tube furnace set to 200
1/10/2012	7:21:53 PM	H2 valve closed
1/10/2012	7:21:53 PM	BCl3 valve closed
1/10/2012	7:21:53 PM	PH3 valve closed
1/10/2012	7:21:53 PM	SiCl4 pre valve closed
1/10/2012	7:21:53 PM	SiCl4 post valve closed
1/10/2012	7:21:53 PM	Bypass valve closed
1/10/2012	7:21:53 PM	Bubbler valve closed
1/10/2012	7:21:53 PM	Helium valve opened
1/10/2012	7:21:53 PM	Main Vac valve opened
1/10/2012	7:21:53 PM	Helium MFC set to  20.000000
1/10/2012	7:21:53 PM	H2 MFC set to  0.000000
1/10/2012	7:21:53 PM	BCl3 MFC set to  0.000000
1/10/2012	7:21:53 PM	PH3 MFC set to  0.000000
1/10/2012	7:21:53 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:21:53 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:21:53 PM	Tube furnace set to 200
1/10/2012	7:22:23 PM	Helium valve closed
1/10/2012	7:22:23 PM	H2 valve closed
1/10/2012	7:22:23 PM	BCl3 valve closed
1/10/2012	7:22:23 PM	PH3 valve closed
1/10/2012	7:22:23 PM	SiCl4 pre valve closed
1/10/2012	7:22:23 PM	SiCl4 post valve closed
1/10/2012	7:22:23 PM	Bypass valve closed
1/10/2012	7:22:23 PM	Bubbler valve closed
1/10/2012	7:22:23 PM	Main Vac valve opened
1/10/2012	7:22:23 PM	Helium MFC set to  0.000000
1/10/2012	7:22:23 PM	H2 MFC set to  0.000000
1/10/2012	7:22:23 PM	BCl3 MFC set to  0.000000
1/10/2012	7:22:23 PM	PH3 MFC set to  0.000000
1/10/2012	7:22:23 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:22:23 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:22:23 PM	Tube furnace set to 200
1/10/2012	7:22:53 PM	H2 valve closed
1/10/2012	7:22:53 PM	BCl3 valve closed
1/10/2012	7:22:53 PM	PH3 valve closed
1/10/2012	7:22:53 PM	SiCl4 pre valve closed
1/10/2012	7:22:53 PM	SiCl4 post valve closed
1/10/2012	7:22:53 PM	Bypass valve closed
1/10/2012	7:22:53 PM	Bubbler valve closed
1/10/2012	7:22:53 PM	Helium valve opened
1/10/2012	7:22:53 PM	Main Vac valve opened
1/10/2012	7:22:53 PM	Helium MFC set to  20.000000
1/10/2012	7:22:53 PM	H2 MFC set to  0.000000
1/10/2012	7:22:53 PM	BCl3 MFC set to  0.000000
1/10/2012	7:22:53 PM	PH3 MFC set to  0.000000
1/10/2012	7:22:53 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:22:53 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:22:54 PM	Tube furnace set to 200
1/10/2012	7:23:24 PM	Helium valve closed
1/10/2012	7:23:24 PM	H2 valve closed
1/10/2012	7:23:24 PM	BCl3 valve closed
1/10/2012	7:23:24 PM	PH3 valve closed
1/10/2012	7:23:24 PM	SiCl4 pre valve closed
1/10/2012	7:23:24 PM	SiCl4 post valve closed
1/10/2012	7:23:24 PM	Bypass valve closed
1/10/2012	7:23:24 PM	Bubbler valve closed
1/10/2012	7:23:24 PM	Main Vac valve opened
1/10/2012	7:23:24 PM	Helium MFC set to  0.000000
1/10/2012	7:23:24 PM	H2 MFC set to  0.000000
1/10/2012	7:23:24 PM	BCl3 MFC set to  0.000000
1/10/2012	7:23:24 PM	PH3 MFC set to  0.000000
1/10/2012	7:23:24 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:23:24 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:23:24 PM	Tube furnace set to 200
1/10/2012	7:23:54 PM	H2 valve closed
1/10/2012	7:23:54 PM	BCl3 valve closed
1/10/2012	7:23:54 PM	PH3 valve closed
1/10/2012	7:23:54 PM	SiCl4 pre valve closed
1/10/2012	7:23:54 PM	SiCl4 post valve closed
1/10/2012	7:23:54 PM	Bypass valve closed
1/10/2012	7:23:54 PM	Bubbler valve closed
1/10/2012	7:23:54 PM	Helium valve opened
1/10/2012	7:23:54 PM	Main Vac valve opened
1/10/2012	7:23:54 PM	Helium MFC set to  20.000000
1/10/2012	7:23:54 PM	H2 MFC set to  0.000000
1/10/2012	7:23:54 PM	BCl3 MFC set to  0.000000
1/10/2012	7:23:54 PM	PH3 MFC set to  0.000000
1/10/2012	7:23:54 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:23:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:23:54 PM	Tube furnace set to 200
1/10/2012	7:24:24 PM	Helium valve closed
1/10/2012	7:24:24 PM	H2 valve closed
1/10/2012	7:24:24 PM	BCl3 valve closed
1/10/2012	7:24:24 PM	PH3 valve closed
1/10/2012	7:24:24 PM	SiCl4 pre valve closed
1/10/2012	7:24:24 PM	SiCl4 post valve closed
1/10/2012	7:24:24 PM	Bypass valve closed
1/10/2012	7:24:24 PM	Bubbler valve closed
1/10/2012	7:24:24 PM	Main Vac valve opened
1/10/2012	7:24:24 PM	Helium MFC set to  0.000000
1/10/2012	7:24:24 PM	H2 MFC set to  0.000000
1/10/2012	7:24:24 PM	BCl3 MFC set to  0.000000
1/10/2012	7:24:24 PM	PH3 MFC set to  0.000000
1/10/2012	7:24:24 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:24:24 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:24:24 PM	Tube furnace set to 200
1/10/2012	7:24:54 PM	H2 valve closed
1/10/2012	7:24:54 PM	BCl3 valve closed
1/10/2012	7:24:54 PM	PH3 valve closed
1/10/2012	7:24:54 PM	SiCl4 pre valve closed
1/10/2012	7:24:54 PM	SiCl4 post valve closed
1/10/2012	7:24:54 PM	Bypass valve closed
1/10/2012	7:24:54 PM	Bubbler valve closed
1/10/2012	7:24:54 PM	Helium valve opened
1/10/2012	7:24:54 PM	Main Vac valve opened
1/10/2012	7:24:54 PM	Helium MFC set to  20.000000
1/10/2012	7:24:54 PM	H2 MFC set to  0.000000
1/10/2012	7:24:54 PM	BCl3 MFC set to  0.000000
1/10/2012	7:24:54 PM	PH3 MFC set to  0.000000
1/10/2012	7:24:54 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:24:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:24:54 PM	Tube furnace set to 200
1/10/2012	7:25:24 PM	Helium valve closed
1/10/2012	7:25:24 PM	H2 valve closed
1/10/2012	7:25:24 PM	BCl3 valve closed
1/10/2012	7:25:25 PM	PH3 valve closed
1/10/2012	7:25:25 PM	SiCl4 pre valve closed
1/10/2012	7:25:25 PM	SiCl4 post valve closed
1/10/2012	7:25:25 PM	Bypass valve closed
1/10/2012	7:25:25 PM	Bubbler valve closed
1/10/2012	7:25:25 PM	Main Vac valve opened
1/10/2012	7:25:25 PM	Helium MFC set to  0.000000
1/10/2012	7:25:25 PM	H2 MFC set to  0.000000
1/10/2012	7:25:25 PM	BCl3 MFC set to  0.000000
1/10/2012	7:25:25 PM	PH3 MFC set to  0.000000
1/10/2012	7:25:25 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:25:25 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:25:25 PM	Tube furnace set to 0
1/10/2012	7:25:26 PM	Run finished at 7:25 PM
1/10/2012	7:42:25 PM	Main Vac valve closed
1/10/2012	7:42:38 PM	Main Vac valve opened
1/10/2012	7:42:52 PM	Recipe started at 7:42 PM
1/10/2012	7:42:52 PM	Helium valve closed
1/10/2012	7:42:52 PM	H2 valve closed
1/10/2012	7:42:52 PM	BCl3 valve closed
1/10/2012	7:42:52 PM	PH3 valve closed
1/10/2012	7:42:52 PM	SiCl4 pre valve closed
1/10/2012	7:42:52 PM	SiCl4 post valve closed
1/10/2012	7:42:52 PM	Main Vac valve closed
1/10/2012	7:42:52 PM	Bypass valve closed
1/10/2012	7:42:52 PM	Bubbler valve closed
1/10/2012	7:42:52 PM	Helium MFC set to  0.000000
1/10/2012	7:42:53 PM	H2 MFC set to  0.000000
1/10/2012	7:42:53 PM	BCl3 MFC set to  0.000000
1/10/2012	7:42:53 PM	PH3 MFC set to  0.000000
1/10/2012	7:42:53 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:42:53 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:42:53 PM	Tube furnace set to 0
1/10/2012	7:42:56 PM	Helium valve closed
1/10/2012	7:42:56 PM	BCl3 valve closed
1/10/2012	7:42:56 PM	PH3 valve closed
1/10/2012	7:42:56 PM	SiCl4 pre valve closed
1/10/2012	7:42:56 PM	SiCl4 post valve closed
1/10/2012	7:42:56 PM	Main Vac valve closed
1/10/2012	7:42:56 PM	Bypass valve closed
1/10/2012	7:42:56 PM	Bubbler valve closed
1/10/2012	7:42:56 PM	H2 valve opened
1/10/2012	7:42:56 PM	Helium MFC set to  0.000000
1/10/2012	7:42:56 PM	H2 MFC set to  500.000000
1/10/2012	7:42:56 PM	BCl3 MFC set to  0.000000
1/10/2012	7:42:56 PM	PH3 MFC set to  0.000000
1/10/2012	7:42:56 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:42:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:42:56 PM	Tube furnace set to 0
1/10/2012	7:44:00 PM	Helium valve closed
1/10/2012	7:44:00 PM	BCl3 valve closed
1/10/2012	7:44:00 PM	PH3 valve closed
1/10/2012	7:44:00 PM	SiCl4 pre valve closed
1/10/2012	7:44:00 PM	SiCl4 post valve closed
1/10/2012	7:44:00 PM	Main Vac valve closed
1/10/2012	7:44:00 PM	Bypass valve closed
1/10/2012	7:44:00 PM	H2 valve opened
1/10/2012	7:44:00 PM	Bubbler valve opened
1/10/2012	7:44:00 PM	Helium MFC set to  0.000000
1/10/2012	7:44:00 PM	H2 MFC set to  500.000000
1/10/2012	7:44:00 PM	BCl3 MFC set to  0.000000
1/10/2012	7:44:00 PM	PH3 MFC set to  0.000000
1/10/2012	7:44:00 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:44:00 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:44:00 PM	Tube furnace set to 0
1/10/2012	7:44:01 PM	Helium valve closed
1/10/2012	7:44:01 PM	BCl3 valve closed
1/10/2012	7:44:01 PM	PH3 valve closed
1/10/2012	7:44:01 PM	SiCl4 pre valve closed
1/10/2012	7:44:01 PM	SiCl4 post valve closed
1/10/2012	7:44:01 PM	Main Vac valve closed
1/10/2012	7:44:01 PM	Bypass valve closed
1/10/2012	7:44:01 PM	H2 valve opened
1/10/2012	7:44:01 PM	Bubbler valve opened
1/10/2012	7:44:01 PM	Helium MFC set to  0.000000
1/10/2012	7:44:01 PM	H2 MFC set to  500.000000
1/10/2012	7:44:01 PM	BCl3 MFC set to  0.000000
1/10/2012	7:44:01 PM	PH3 MFC set to  0.000000
1/10/2012	7:44:01 PM	SiCl4 MFC set to  0.000000
1/10/2012	7:44:01 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	7:44:01 PM	Tube furnace set to 1000
1/10/2012	8:04:01 PM	Helium valve closed
1/10/2012	8:04:01 PM	BCl3 valve closed
1/10/2012	8:04:01 PM	Main Vac valve closed
1/10/2012	8:04:01 PM	Bypass valve closed
1/10/2012	8:04:01 PM	H2 valve opened
1/10/2012	8:04:01 PM	PH3 valve opened
1/10/2012	8:04:01 PM	SiCl4 pre valve opened
1/10/2012	8:04:01 PM	SiCl4 post valve opened
1/10/2012	8:04:01 PM	Bubbler valve opened
1/10/2012	8:04:01 PM	Helium MFC set to  0.000000
1/10/2012	8:04:01 PM	H2 MFC set to  500.000000
1/10/2012	8:04:01 PM	BCl3 MFC set to  0.000000
1/10/2012	8:04:01 PM	PH3 MFC set to  0.700000
1/10/2012	8:04:01 PM	SiCl4 MFC set to  25.000000
1/10/2012	8:04:01 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	8:04:01 PM	Tube furnace set to 1000
1/10/2012	8:32:01 PM	Helium valve closed
1/10/2012	8:32:01 PM	BCl3 valve closed
1/10/2012	8:32:01 PM	PH3 valve closed
1/10/2012	8:32:01 PM	SiCl4 pre valve closed
1/10/2012	8:32:01 PM	SiCl4 post valve closed
1/10/2012	8:32:01 PM	Main Vac valve closed
1/10/2012	8:32:01 PM	Bypass valve closed
1/10/2012	8:32:01 PM	H2 valve opened
1/10/2012	8:32:01 PM	Bubbler valve opened
1/10/2012	8:32:01 PM	Helium MFC set to  0.000000
1/10/2012	8:32:01 PM	H2 MFC set to  500.000000
1/10/2012	8:32:01 PM	BCl3 MFC set to  0.000000
1/10/2012	8:32:01 PM	PH3 MFC set to  0.000000
1/10/2012	8:32:01 PM	SiCl4 MFC set to  0.000000
1/10/2012	8:32:01 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	8:32:02 PM	Tube furnace set to 950
1/10/2012	8:34:02 PM	Helium valve closed
1/10/2012	8:34:02 PM	BCl3 valve closed
1/10/2012	8:34:02 PM	PH3 valve closed
1/10/2012	8:34:02 PM	SiCl4 pre valve closed
1/10/2012	8:34:02 PM	SiCl4 post valve closed
1/10/2012	8:34:02 PM	Main Vac valve closed
1/10/2012	8:34:02 PM	Bypass valve closed
1/10/2012	8:34:02 PM	H2 valve opened
1/10/2012	8:34:02 PM	Bubbler valve opened
1/10/2012	8:34:02 PM	Helium MFC set to  0.000000
1/10/2012	8:34:02 PM	H2 MFC set to  500.000000
1/10/2012	8:34:02 PM	BCl3 MFC set to  0.000000
1/10/2012	8:34:02 PM	PH3 MFC set to  0.000000
1/10/2012	8:34:02 PM	SiCl4 MFC set to  0.000000
1/10/2012	8:34:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	8:34:02 PM	Tube furnace set to 900
1/10/2012	8:36:02 PM	Helium valve closed
1/10/2012	8:36:02 PM	BCl3 valve closed
1/10/2012	8:36:02 PM	PH3 valve closed
1/10/2012	8:36:02 PM	SiCl4 pre valve closed
1/10/2012	8:36:02 PM	SiCl4 post valve closed
1/10/2012	8:36:02 PM	Main Vac valve closed
1/10/2012	8:36:02 PM	Bypass valve closed
1/10/2012	8:36:02 PM	H2 valve opened
1/10/2012	8:36:02 PM	Bubbler valve opened
1/10/2012	8:36:02 PM	Helium MFC set to  0.000000
1/10/2012	8:36:02 PM	H2 MFC set to  500.000000
1/10/2012	8:36:02 PM	BCl3 MFC set to  0.000000
1/10/2012	8:36:02 PM	PH3 MFC set to  0.000000
1/10/2012	8:36:02 PM	SiCl4 MFC set to  0.000000
1/10/2012	8:36:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	8:36:02 PM	Tube furnace set to 850
1/10/2012	8:38:02 PM	H2 valve closed
1/10/2012	8:38:02 PM	BCl3 valve closed
1/10/2012	8:38:02 PM	PH3 valve closed
1/10/2012	8:38:02 PM	SiCl4 pre valve closed
1/10/2012	8:38:02 PM	SiCl4 post valve closed
1/10/2012	8:38:02 PM	Main Vac valve closed
1/10/2012	8:38:02 PM	Bypass valve closed
1/10/2012	8:38:02 PM	Helium valve opened
1/10/2012	8:38:02 PM	Bubbler valve opened
1/10/2012	8:38:02 PM	Helium MFC set to  500.000000
1/10/2012	8:38:02 PM	H2 MFC set to  0.000000
1/10/2012	8:38:02 PM	BCl3 MFC set to  0.000000
1/10/2012	8:38:02 PM	PH3 MFC set to  0.000000
1/10/2012	8:38:02 PM	SiCl4 MFC set to  0.000000
1/10/2012	8:38:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	8:38:02 PM	Tube furnace set to 800
1/10/2012	8:40:02 PM	H2 valve closed
1/10/2012	8:40:02 PM	BCl3 valve closed
1/10/2012	8:40:02 PM	PH3 valve closed
1/10/2012	8:40:02 PM	SiCl4 pre valve closed
1/10/2012	8:40:02 PM	SiCl4 post valve closed
1/10/2012	8:40:02 PM	Main Vac valve closed
1/10/2012	8:40:02 PM	Bypass valve closed
1/10/2012	8:40:02 PM	Helium valve opened
1/10/2012	8:40:02 PM	Bubbler valve opened
1/10/2012	8:40:02 PM	Helium MFC set to  500.000000
1/10/2012	8:40:02 PM	H2 MFC set to  0.000000
1/10/2012	8:40:02 PM	BCl3 MFC set to  0.000000
1/10/2012	8:40:02 PM	PH3 MFC set to  0.000000
1/10/2012	8:40:02 PM	SiCl4 MFC set to  0.000000
1/10/2012	8:40:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	8:40:02 PM	Tube furnace set to 750
1/10/2012	8:42:02 PM	H2 valve closed
1/10/2012	8:42:02 PM	BCl3 valve closed
1/10/2012	8:42:02 PM	PH3 valve closed
1/10/2012	8:42:02 PM	SiCl4 pre valve closed
1/10/2012	8:42:02 PM	SiCl4 post valve closed
1/10/2012	8:42:02 PM	Main Vac valve closed
1/10/2012	8:42:02 PM	Bypass valve closed
1/10/2012	8:42:02 PM	Helium valve opened
1/10/2012	8:42:02 PM	Bubbler valve opened
1/10/2012	8:42:02 PM	Helium MFC set to  500.000000
1/10/2012	8:42:02 PM	H2 MFC set to  0.000000
1/10/2012	8:42:02 PM	BCl3 MFC set to  0.000000
1/10/2012	8:42:02 PM	PH3 MFC set to  0.000000
1/10/2012	8:42:02 PM	SiCl4 MFC set to  0.000000
1/10/2012	8:42:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	8:42:02 PM	Tube furnace set to 0
1/10/2012	9:02:02 PM	Helium valve closed
1/10/2012	9:02:02 PM	H2 valve closed
1/10/2012	9:02:02 PM	BCl3 valve closed
1/10/2012	9:02:02 PM	PH3 valve closed
1/10/2012	9:02:02 PM	SiCl4 pre valve closed
1/10/2012	9:02:02 PM	SiCl4 post valve closed
1/10/2012	9:02:02 PM	Main Vac valve closed
1/10/2012	9:02:02 PM	Bypass valve closed
1/10/2012	9:02:02 PM	Bubbler valve closed
1/10/2012	9:02:02 PM	Helium MFC set to  0.000000
1/10/2012	9:02:02 PM	H2 MFC set to  0.000000
1/10/2012	9:02:02 PM	BCl3 MFC set to  0.000000
1/10/2012	9:02:02 PM	PH3 MFC set to  0.000000
1/10/2012	9:02:02 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:02:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:02:03 PM	Tube furnace set to 0
1/10/2012	9:02:04 PM	Run finished at 9:02 PM
1/10/2012	9:19:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2012	9:19:56 PM	Recipe started at 9:19 PM
1/10/2012	9:19:56 PM	Helium valve closed
1/10/2012	9:19:56 PM	H2 valve closed
1/10/2012	9:19:56 PM	BCl3 valve closed
1/10/2012	9:19:56 PM	PH3 valve closed
1/10/2012	9:19:56 PM	SiCl4 pre valve closed
1/10/2012	9:19:56 PM	SiCl4 post valve closed
1/10/2012	9:19:56 PM	Main Vac valve closed
1/10/2012	9:19:56 PM	Bypass valve closed
1/10/2012	9:19:56 PM	Bubbler valve closed
1/10/2012	9:19:56 PM	Helium MFC set to  0.000000
1/10/2012	9:19:56 PM	H2 MFC set to  0.000000
1/10/2012	9:19:56 PM	BCl3 MFC set to  0.000000
1/10/2012	9:19:56 PM	PH3 MFC set to  0.000000
1/10/2012	9:19:56 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:19:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:19:57 PM	Tube furnace set to 0
1/10/2012	9:20:00 PM	H2 valve closed
1/10/2012	9:20:00 PM	BCl3 valve closed
1/10/2012	9:20:00 PM	PH3 valve closed
1/10/2012	9:20:00 PM	SiCl4 pre valve closed
1/10/2012	9:20:00 PM	SiCl4 post valve closed
1/10/2012	9:20:00 PM	Main Vac valve closed
1/10/2012	9:20:00 PM	Bypass valve closed
1/10/2012	9:20:00 PM	Bubbler valve closed
1/10/2012	9:20:00 PM	Helium valve opened
1/10/2012	9:20:00 PM	Helium MFC set to  500.000000
1/10/2012	9:20:00 PM	H2 MFC set to  0.000000
1/10/2012	9:20:00 PM	BCl3 MFC set to  0.000000
1/10/2012	9:20:00 PM	PH3 MFC set to  0.000000
1/10/2012	9:20:00 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:20:00 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:20:00 PM	Tube furnace set to 0
1/10/2012	9:20:06 PM	Helium valve closed
1/10/2012	9:20:06 PM	H2 valve closed
1/10/2012	9:20:06 PM	BCl3 valve closed
1/10/2012	9:20:06 PM	PH3 valve closed
1/10/2012	9:20:06 PM	SiCl4 pre valve closed
1/10/2012	9:20:06 PM	SiCl4 post valve closed
1/10/2012	9:20:06 PM	Main Vac valve closed
1/10/2012	9:20:06 PM	Bypass valve closed
1/10/2012	9:20:06 PM	Bubbler valve closed
1/10/2012	9:20:06 PM	Helium MFC set to  0.000000
1/10/2012	9:20:06 PM	H2 MFC set to  0.000000
1/10/2012	9:20:06 PM	BCl3 MFC set to  0.000000
1/10/2012	9:20:06 PM	PH3 MFC set to  0.000000
1/10/2012	9:20:06 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:20:06 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:20:06 PM	Tube furnace set to 0
1/10/2012	9:20:07 PM	Run finished at 9:20 PM
1/10/2012	9:20:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2012	9:25:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2012	9:25:04 PM	Recipe started at 9:25 PM
1/10/2012	9:25:04 PM	Helium valve closed
1/10/2012	9:25:04 PM	H2 valve closed
1/10/2012	9:25:04 PM	BCl3 valve closed
1/10/2012	9:25:04 PM	PH3 valve closed
1/10/2012	9:25:04 PM	SiCl4 pre valve closed
1/10/2012	9:25:04 PM	SiCl4 post valve closed
1/10/2012	9:25:04 PM	Main Vac valve closed
1/10/2012	9:25:04 PM	Bubbler valve closed
1/10/2012	9:25:04 PM	Bypass valve opened
1/10/2012	9:25:04 PM	Helium MFC set to  0.000000
1/10/2012	9:25:04 PM	H2 MFC set to  0.000000
1/10/2012	9:25:04 PM	BCl3 MFC set to  0.000000
1/10/2012	9:25:04 PM	PH3 MFC set to  0.000000
1/10/2012	9:25:04 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:25:04 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:25:04 PM	Tube furnace set to 0
1/10/2012	9:25:59 PM	Helium valve closed
1/10/2012	9:25:59 PM	H2 valve closed
1/10/2012	9:25:59 PM	BCl3 valve closed
1/10/2012	9:25:59 PM	PH3 valve closed
1/10/2012	9:25:59 PM	SiCl4 pre valve closed
1/10/2012	9:25:59 PM	SiCl4 post valve closed
1/10/2012	9:25:59 PM	Main Vac valve closed
1/10/2012	9:25:59 PM	Bubbler valve closed
1/10/2012	9:25:59 PM	Bypass valve opened
1/10/2012	9:25:59 PM	Helium MFC set to  0.000000
1/10/2012	9:25:59 PM	H2 MFC set to  0.000000
1/10/2012	9:25:59 PM	BCl3 MFC set to  0.000000
1/10/2012	9:25:59 PM	PH3 MFC set to  0.000000
1/10/2012	9:25:59 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:25:59 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:25:59 PM	Tube furnace set to 0
1/10/2012	9:26:59 PM	Helium valve closed
1/10/2012	9:26:59 PM	H2 valve closed
1/10/2012	9:26:59 PM	BCl3 valve closed
1/10/2012	9:26:59 PM	PH3 valve closed
1/10/2012	9:26:59 PM	SiCl4 pre valve closed
1/10/2012	9:26:59 PM	SiCl4 post valve closed
1/10/2012	9:26:59 PM	Bypass valve closed
1/10/2012	9:26:59 PM	Bubbler valve closed
1/10/2012	9:26:59 PM	Main Vac valve opened
1/10/2012	9:26:59 PM	Helium MFC set to  0.000000
1/10/2012	9:26:59 PM	H2 MFC set to  0.000000
1/10/2012	9:26:59 PM	BCl3 MFC set to  0.000000
1/10/2012	9:26:59 PM	PH3 MFC set to  0.000000
1/10/2012	9:26:59 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:26:59 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:26:59 PM	Tube furnace set to 0
1/10/2012	9:27:00 PM	Run finished at 9:27 PM
1/10/2012	9:27:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2012	9:32:43 PM	Main Vac valve closed
1/10/2012	9:32:51 PM	Main Vac valve opened
1/10/2012	9:33:07 PM	Recipe started at 9:32 PM
1/10/2012	9:33:07 PM	Helium valve closed
1/10/2012	9:33:07 PM	H2 valve closed
1/10/2012	9:33:07 PM	BCl3 valve closed
1/10/2012	9:33:07 PM	PH3 valve closed
1/10/2012	9:33:07 PM	SiCl4 pre valve closed
1/10/2012	9:33:07 PM	SiCl4 post valve closed
1/10/2012	9:33:07 PM	Bypass valve closed
1/10/2012	9:33:07 PM	Bubbler valve closed
1/10/2012	9:33:07 PM	Main Vac valve opened
1/10/2012	9:33:07 PM	Helium MFC set to  0.000000
1/10/2012	9:33:07 PM	H2 MFC set to  0.000000
1/10/2012	9:33:07 PM	BCl3 MFC set to  0.000000
1/10/2012	9:33:07 PM	PH3 MFC set to  0.000000
1/10/2012	9:33:07 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:33:07 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:33:08 PM	Tube furnace set to 0
1/10/2012	9:33:38 PM	H2 valve closed
1/10/2012	9:33:38 PM	BCl3 valve closed
1/10/2012	9:33:38 PM	PH3 valve closed
1/10/2012	9:33:38 PM	SiCl4 pre valve closed
1/10/2012	9:33:38 PM	SiCl4 post valve closed
1/10/2012	9:33:38 PM	Bypass valve closed
1/10/2012	9:33:38 PM	Bubbler valve closed
1/10/2012	9:33:38 PM	Helium valve opened
1/10/2012	9:33:38 PM	Main Vac valve opened
1/10/2012	9:33:38 PM	Helium MFC set to  20.000000
1/10/2012	9:33:38 PM	H2 MFC set to  0.000000
1/10/2012	9:33:38 PM	BCl3 MFC set to  0.000000
1/10/2012	9:33:38 PM	PH3 MFC set to  0.000000
1/10/2012	9:33:38 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:33:38 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:33:38 PM	Tube furnace set to 0
1/10/2012	9:34:08 PM	Helium valve closed
1/10/2012	9:34:08 PM	H2 valve closed
1/10/2012	9:34:08 PM	BCl3 valve closed
1/10/2012	9:34:08 PM	PH3 valve closed
1/10/2012	9:34:08 PM	SiCl4 pre valve closed
1/10/2012	9:34:08 PM	SiCl4 post valve closed
1/10/2012	9:34:08 PM	Bypass valve closed
1/10/2012	9:34:08 PM	Bubbler valve closed
1/10/2012	9:34:08 PM	Main Vac valve opened
1/10/2012	9:34:08 PM	Helium MFC set to  0.000000
1/10/2012	9:34:08 PM	H2 MFC set to  0.000000
1/10/2012	9:34:08 PM	BCl3 MFC set to  0.000000
1/10/2012	9:34:08 PM	PH3 MFC set to  0.000000
1/10/2012	9:34:08 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:34:08 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:34:08 PM	Tube furnace set to 0
1/10/2012	9:34:38 PM	H2 valve closed
1/10/2012	9:34:38 PM	BCl3 valve closed
1/10/2012	9:34:38 PM	PH3 valve closed
1/10/2012	9:34:38 PM	SiCl4 pre valve closed
1/10/2012	9:34:38 PM	SiCl4 post valve closed
1/10/2012	9:34:38 PM	Bypass valve closed
1/10/2012	9:34:38 PM	Bubbler valve closed
1/10/2012	9:34:38 PM	Helium valve opened
1/10/2012	9:34:38 PM	Main Vac valve opened
1/10/2012	9:34:38 PM	Helium MFC set to  20.000000
1/10/2012	9:34:38 PM	H2 MFC set to  0.000000
1/10/2012	9:34:38 PM	BCl3 MFC set to  0.000000
1/10/2012	9:34:38 PM	PH3 MFC set to  0.000000
1/10/2012	9:34:38 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:34:38 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:34:38 PM	Tube furnace set to 0
1/10/2012	9:35:08 PM	Helium valve closed
1/10/2012	9:35:08 PM	H2 valve closed
1/10/2012	9:35:08 PM	BCl3 valve closed
1/10/2012	9:35:08 PM	PH3 valve closed
1/10/2012	9:35:08 PM	SiCl4 pre valve closed
1/10/2012	9:35:08 PM	SiCl4 post valve closed
1/10/2012	9:35:08 PM	Bypass valve closed
1/10/2012	9:35:08 PM	Bubbler valve closed
1/10/2012	9:35:08 PM	Main Vac valve opened
1/10/2012	9:35:08 PM	Helium MFC set to  0.000000
1/10/2012	9:35:08 PM	H2 MFC set to  0.000000
1/10/2012	9:35:08 PM	BCl3 MFC set to  0.000000
1/10/2012	9:35:08 PM	PH3 MFC set to  0.000000
1/10/2012	9:35:08 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:35:08 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:35:08 PM	Tube furnace set to 0
1/10/2012	9:35:38 PM	H2 valve closed
1/10/2012	9:35:38 PM	BCl3 valve closed
1/10/2012	9:35:38 PM	PH3 valve closed
1/10/2012	9:35:38 PM	SiCl4 pre valve closed
1/10/2012	9:35:38 PM	SiCl4 post valve closed
1/10/2012	9:35:38 PM	Bypass valve closed
1/10/2012	9:35:38 PM	Bubbler valve closed
1/10/2012	9:35:38 PM	Helium valve opened
1/10/2012	9:35:38 PM	Main Vac valve opened
1/10/2012	9:35:38 PM	Helium MFC set to  20.000000
1/10/2012	9:35:38 PM	H2 MFC set to  0.000000
1/10/2012	9:35:38 PM	BCl3 MFC set to  0.000000
1/10/2012	9:35:38 PM	PH3 MFC set to  0.000000
1/10/2012	9:35:38 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:35:38 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:35:39 PM	Tube furnace set to 0
1/10/2012	9:36:09 PM	Helium valve closed
1/10/2012	9:36:09 PM	H2 valve closed
1/10/2012	9:36:09 PM	BCl3 valve closed
1/10/2012	9:36:09 PM	PH3 valve closed
1/10/2012	9:36:09 PM	SiCl4 pre valve closed
1/10/2012	9:36:09 PM	SiCl4 post valve closed
1/10/2012	9:36:09 PM	Bypass valve closed
1/10/2012	9:36:09 PM	Bubbler valve closed
1/10/2012	9:36:09 PM	Main Vac valve opened
1/10/2012	9:36:09 PM	Helium MFC set to  0.000000
1/10/2012	9:36:09 PM	H2 MFC set to  0.000000
1/10/2012	9:36:09 PM	BCl3 MFC set to  0.000000
1/10/2012	9:36:09 PM	PH3 MFC set to  0.000000
1/10/2012	9:36:09 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:36:09 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:36:09 PM	Tube furnace set to 0
1/10/2012	9:36:39 PM	H2 valve closed
1/10/2012	9:36:39 PM	BCl3 valve closed
1/10/2012	9:36:39 PM	PH3 valve closed
1/10/2012	9:36:39 PM	SiCl4 pre valve closed
1/10/2012	9:36:39 PM	SiCl4 post valve closed
1/10/2012	9:36:39 PM	Bypass valve closed
1/10/2012	9:36:39 PM	Bubbler valve closed
1/10/2012	9:36:39 PM	Helium valve opened
1/10/2012	9:36:39 PM	Main Vac valve opened
1/10/2012	9:36:39 PM	Helium MFC set to  20.000000
1/10/2012	9:36:39 PM	H2 MFC set to  0.000000
1/10/2012	9:36:39 PM	BCl3 MFC set to  0.000000
1/10/2012	9:36:39 PM	PH3 MFC set to  0.000000
1/10/2012	9:36:39 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:36:39 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:36:39 PM	Tube furnace set to 0
1/10/2012	9:37:09 PM	Helium valve closed
1/10/2012	9:37:09 PM	H2 valve closed
1/10/2012	9:37:09 PM	BCl3 valve closed
1/10/2012	9:37:09 PM	PH3 valve closed
1/10/2012	9:37:09 PM	SiCl4 pre valve closed
1/10/2012	9:37:09 PM	SiCl4 post valve closed
1/10/2012	9:37:09 PM	Bypass valve closed
1/10/2012	9:37:09 PM	Bubbler valve closed
1/10/2012	9:37:09 PM	Main Vac valve opened
1/10/2012	9:37:09 PM	Helium MFC set to  0.000000
1/10/2012	9:37:09 PM	H2 MFC set to  0.000000
1/10/2012	9:37:09 PM	BCl3 MFC set to  0.000000
1/10/2012	9:37:09 PM	PH3 MFC set to  0.000000
1/10/2012	9:37:09 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:37:09 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:37:09 PM	Tube furnace set to 0
1/10/2012	9:37:39 PM	H2 valve closed
1/10/2012	9:37:39 PM	BCl3 valve closed
1/10/2012	9:37:39 PM	PH3 valve closed
1/10/2012	9:37:39 PM	SiCl4 pre valve closed
1/10/2012	9:37:39 PM	SiCl4 post valve closed
1/10/2012	9:37:39 PM	Bypass valve closed
1/10/2012	9:37:39 PM	Bubbler valve closed
1/10/2012	9:37:39 PM	Helium valve opened
1/10/2012	9:37:39 PM	Main Vac valve opened
1/10/2012	9:37:39 PM	Helium MFC set to  20.000000
1/10/2012	9:37:39 PM	H2 MFC set to  0.000000
1/10/2012	9:37:39 PM	BCl3 MFC set to  0.000000
1/10/2012	9:37:39 PM	PH3 MFC set to  0.000000
1/10/2012	9:37:39 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:37:39 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:37:39 PM	Tube furnace set to 0
1/10/2012	9:38:09 PM	Helium valve closed
1/10/2012	9:38:09 PM	H2 valve closed
1/10/2012	9:38:09 PM	BCl3 valve closed
1/10/2012	9:38:09 PM	PH3 valve closed
1/10/2012	9:38:09 PM	SiCl4 pre valve closed
1/10/2012	9:38:09 PM	SiCl4 post valve closed
1/10/2012	9:38:09 PM	Bypass valve closed
1/10/2012	9:38:09 PM	Bubbler valve closed
1/10/2012	9:38:09 PM	Main Vac valve opened
1/10/2012	9:38:09 PM	Helium MFC set to  0.000000
1/10/2012	9:38:09 PM	H2 MFC set to  0.000000
1/10/2012	9:38:09 PM	BCl3 MFC set to  0.000000
1/10/2012	9:38:09 PM	PH3 MFC set to  0.000000
1/10/2012	9:38:09 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:38:09 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:38:10 PM	Tube furnace set to 0
1/10/2012	9:38:40 PM	H2 valve closed
1/10/2012	9:38:40 PM	BCl3 valve closed
1/10/2012	9:38:40 PM	PH3 valve closed
1/10/2012	9:38:40 PM	SiCl4 pre valve closed
1/10/2012	9:38:40 PM	SiCl4 post valve closed
1/10/2012	9:38:40 PM	Bypass valve closed
1/10/2012	9:38:40 PM	Bubbler valve closed
1/10/2012	9:38:40 PM	Helium valve opened
1/10/2012	9:38:40 PM	Main Vac valve opened
1/10/2012	9:38:40 PM	Helium MFC set to  20.000000
1/10/2012	9:38:40 PM	H2 MFC set to  0.000000
1/10/2012	9:38:40 PM	BCl3 MFC set to  0.000000
1/10/2012	9:38:40 PM	PH3 MFC set to  0.000000
1/10/2012	9:38:40 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:38:40 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:38:40 PM	Tube furnace set to 0
1/10/2012	9:39:10 PM	Helium valve closed
1/10/2012	9:39:10 PM	H2 valve closed
1/10/2012	9:39:10 PM	BCl3 valve closed
1/10/2012	9:39:10 PM	PH3 valve closed
1/10/2012	9:39:10 PM	SiCl4 pre valve closed
1/10/2012	9:39:10 PM	SiCl4 post valve closed
1/10/2012	9:39:10 PM	Bypass valve closed
1/10/2012	9:39:10 PM	Bubbler valve closed
1/10/2012	9:39:10 PM	Main Vac valve opened
1/10/2012	9:39:10 PM	Helium MFC set to  0.000000
1/10/2012	9:39:10 PM	H2 MFC set to  0.000000
1/10/2012	9:39:10 PM	BCl3 MFC set to  0.000000
1/10/2012	9:39:10 PM	PH3 MFC set to  0.000000
1/10/2012	9:39:10 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:39:10 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:39:10 PM	Tube furnace set to 0
1/10/2012	9:39:40 PM	H2 valve closed
1/10/2012	9:39:40 PM	BCl3 valve closed
1/10/2012	9:39:40 PM	PH3 valve closed
1/10/2012	9:39:40 PM	SiCl4 pre valve closed
1/10/2012	9:39:40 PM	SiCl4 post valve closed
1/10/2012	9:39:40 PM	Bypass valve closed
1/10/2012	9:39:40 PM	Bubbler valve closed
1/10/2012	9:39:40 PM	Helium valve opened
1/10/2012	9:39:40 PM	Main Vac valve opened
1/10/2012	9:39:40 PM	Helium MFC set to  20.000000
1/10/2012	9:39:40 PM	H2 MFC set to  0.000000
1/10/2012	9:39:40 PM	BCl3 MFC set to  0.000000
1/10/2012	9:39:40 PM	PH3 MFC set to  0.000000
1/10/2012	9:39:40 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:39:40 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:39:40 PM	Tube furnace set to 0
1/10/2012	9:40:10 PM	Helium valve closed
1/10/2012	9:40:10 PM	H2 valve closed
1/10/2012	9:40:10 PM	BCl3 valve closed
1/10/2012	9:40:10 PM	PH3 valve closed
1/10/2012	9:40:10 PM	SiCl4 pre valve closed
1/10/2012	9:40:10 PM	SiCl4 post valve closed
1/10/2012	9:40:10 PM	Bypass valve closed
1/10/2012	9:40:10 PM	Bubbler valve closed
1/10/2012	9:40:10 PM	Main Vac valve opened
1/10/2012	9:40:10 PM	Helium MFC set to  0.000000
1/10/2012	9:40:10 PM	H2 MFC set to  0.000000
1/10/2012	9:40:10 PM	BCl3 MFC set to  0.000000
1/10/2012	9:40:10 PM	PH3 MFC set to  0.000000
1/10/2012	9:40:10 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:40:10 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:40:10 PM	Tube furnace set to 0
1/10/2012	9:40:40 PM	H2 valve closed
1/10/2012	9:40:40 PM	BCl3 valve closed
1/10/2012	9:40:40 PM	PH3 valve closed
1/10/2012	9:40:40 PM	SiCl4 pre valve closed
1/10/2012	9:40:40 PM	SiCl4 post valve closed
1/10/2012	9:40:40 PM	Bypass valve closed
1/10/2012	9:40:40 PM	Bubbler valve closed
1/10/2012	9:40:40 PM	Helium valve opened
1/10/2012	9:40:40 PM	Main Vac valve opened
1/10/2012	9:40:40 PM	Helium MFC set to  20.000000
1/10/2012	9:40:40 PM	H2 MFC set to  0.000000
1/10/2012	9:40:40 PM	BCl3 MFC set to  0.000000
1/10/2012	9:40:40 PM	PH3 MFC set to  0.000000
1/10/2012	9:40:40 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:40:40 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:40:41 PM	Tube furnace set to 0
1/10/2012	9:41:11 PM	Helium valve closed
1/10/2012	9:41:11 PM	H2 valve closed
1/10/2012	9:41:11 PM	BCl3 valve closed
1/10/2012	9:41:11 PM	PH3 valve closed
1/10/2012	9:41:11 PM	SiCl4 pre valve closed
1/10/2012	9:41:11 PM	SiCl4 post valve closed
1/10/2012	9:41:11 PM	Bypass valve closed
1/10/2012	9:41:11 PM	Bubbler valve closed
1/10/2012	9:41:11 PM	Main Vac valve opened
1/10/2012	9:41:11 PM	Helium MFC set to  0.000000
1/10/2012	9:41:11 PM	H2 MFC set to  0.000000
1/10/2012	9:41:11 PM	BCl3 MFC set to  0.000000
1/10/2012	9:41:11 PM	PH3 MFC set to  0.000000
1/10/2012	9:41:11 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:41:11 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:41:11 PM	Tube furnace set to 0
1/10/2012	9:41:41 PM	H2 valve closed
1/10/2012	9:41:41 PM	BCl3 valve closed
1/10/2012	9:41:41 PM	PH3 valve closed
1/10/2012	9:41:41 PM	SiCl4 pre valve closed
1/10/2012	9:41:41 PM	SiCl4 post valve closed
1/10/2012	9:41:41 PM	Bypass valve closed
1/10/2012	9:41:41 PM	Bubbler valve closed
1/10/2012	9:41:41 PM	Helium valve opened
1/10/2012	9:41:41 PM	Main Vac valve opened
1/10/2012	9:41:41 PM	Helium MFC set to  20.000000
1/10/2012	9:41:41 PM	H2 MFC set to  0.000000
1/10/2012	9:41:41 PM	BCl3 MFC set to  0.000000
1/10/2012	9:41:41 PM	PH3 MFC set to  0.000000
1/10/2012	9:41:41 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:41:41 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:41:41 PM	Tube furnace set to 0
1/10/2012	9:42:11 PM	Helium valve closed
1/10/2012	9:42:11 PM	H2 valve closed
1/10/2012	9:42:11 PM	BCl3 valve closed
1/10/2012	9:42:11 PM	PH3 valve closed
1/10/2012	9:42:11 PM	SiCl4 pre valve closed
1/10/2012	9:42:11 PM	SiCl4 post valve closed
1/10/2012	9:42:11 PM	Bypass valve closed
1/10/2012	9:42:11 PM	Bubbler valve closed
1/10/2012	9:42:11 PM	Main Vac valve opened
1/10/2012	9:42:11 PM	Helium MFC set to  0.000000
1/10/2012	9:42:11 PM	H2 MFC set to  0.000000
1/10/2012	9:42:11 PM	BCl3 MFC set to  0.000000
1/10/2012	9:42:11 PM	PH3 MFC set to  0.000000
1/10/2012	9:42:11 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:42:11 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:42:11 PM	Tube furnace set to 200
1/10/2012	9:42:41 PM	H2 valve closed
1/10/2012	9:42:41 PM	BCl3 valve closed
1/10/2012	9:42:41 PM	PH3 valve closed
1/10/2012	9:42:41 PM	SiCl4 pre valve closed
1/10/2012	9:42:41 PM	SiCl4 post valve closed
1/10/2012	9:42:41 PM	Bypass valve closed
1/10/2012	9:42:41 PM	Bubbler valve closed
1/10/2012	9:42:41 PM	Helium valve opened
1/10/2012	9:42:41 PM	Main Vac valve opened
1/10/2012	9:42:41 PM	Helium MFC set to  20.000000
1/10/2012	9:42:41 PM	H2 MFC set to  0.000000
1/10/2012	9:42:41 PM	BCl3 MFC set to  0.000000
1/10/2012	9:42:41 PM	PH3 MFC set to  0.000000
1/10/2012	9:42:41 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:42:41 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:42:41 PM	Tube furnace set to 200
1/10/2012	9:43:11 PM	Helium valve closed
1/10/2012	9:43:11 PM	H2 valve closed
1/10/2012	9:43:11 PM	BCl3 valve closed
1/10/2012	9:43:11 PM	PH3 valve closed
1/10/2012	9:43:11 PM	SiCl4 pre valve closed
1/10/2012	9:43:11 PM	SiCl4 post valve closed
1/10/2012	9:43:11 PM	Bypass valve closed
1/10/2012	9:43:11 PM	Bubbler valve closed
1/10/2012	9:43:11 PM	Main Vac valve opened
1/10/2012	9:43:11 PM	Helium MFC set to  0.000000
1/10/2012	9:43:11 PM	H2 MFC set to  0.000000
1/10/2012	9:43:11 PM	BCl3 MFC set to  0.000000
1/10/2012	9:43:11 PM	PH3 MFC set to  0.000000
1/10/2012	9:43:11 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:43:11 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:43:12 PM	Tube furnace set to 200
1/10/2012	9:43:42 PM	H2 valve closed
1/10/2012	9:43:42 PM	BCl3 valve closed
1/10/2012	9:43:42 PM	PH3 valve closed
1/10/2012	9:43:42 PM	SiCl4 pre valve closed
1/10/2012	9:43:42 PM	SiCl4 post valve closed
1/10/2012	9:43:42 PM	Bypass valve closed
1/10/2012	9:43:42 PM	Bubbler valve closed
1/10/2012	9:43:42 PM	Helium valve opened
1/10/2012	9:43:42 PM	Main Vac valve opened
1/10/2012	9:43:42 PM	Helium MFC set to  20.000000
1/10/2012	9:43:42 PM	H2 MFC set to  0.000000
1/10/2012	9:43:42 PM	BCl3 MFC set to  0.000000
1/10/2012	9:43:42 PM	PH3 MFC set to  0.000000
1/10/2012	9:43:42 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:43:42 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:43:42 PM	Tube furnace set to 200
1/10/2012	9:44:12 PM	Helium valve closed
1/10/2012	9:44:12 PM	H2 valve closed
1/10/2012	9:44:12 PM	BCl3 valve closed
1/10/2012	9:44:12 PM	PH3 valve closed
1/10/2012	9:44:12 PM	SiCl4 pre valve closed
1/10/2012	9:44:12 PM	SiCl4 post valve closed
1/10/2012	9:44:12 PM	Bypass valve closed
1/10/2012	9:44:12 PM	Bubbler valve closed
1/10/2012	9:44:12 PM	Main Vac valve opened
1/10/2012	9:44:12 PM	Helium MFC set to  0.000000
1/10/2012	9:44:12 PM	H2 MFC set to  0.000000
1/10/2012	9:44:12 PM	BCl3 MFC set to  0.000000
1/10/2012	9:44:12 PM	PH3 MFC set to  0.000000
1/10/2012	9:44:12 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:44:12 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:44:12 PM	Tube furnace set to 200
1/10/2012	9:44:42 PM	H2 valve closed
1/10/2012	9:44:42 PM	BCl3 valve closed
1/10/2012	9:44:42 PM	PH3 valve closed
1/10/2012	9:44:42 PM	SiCl4 pre valve closed
1/10/2012	9:44:42 PM	SiCl4 post valve closed
1/10/2012	9:44:42 PM	Bypass valve closed
1/10/2012	9:44:42 PM	Bubbler valve closed
1/10/2012	9:44:42 PM	Helium valve opened
1/10/2012	9:44:42 PM	Main Vac valve opened
1/10/2012	9:44:42 PM	Helium MFC set to  20.000000
1/10/2012	9:44:42 PM	H2 MFC set to  0.000000
1/10/2012	9:44:42 PM	BCl3 MFC set to  0.000000
1/10/2012	9:44:42 PM	PH3 MFC set to  0.000000
1/10/2012	9:44:42 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:44:42 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:44:42 PM	Tube furnace set to 200
1/10/2012	9:45:12 PM	Helium valve closed
1/10/2012	9:45:12 PM	H2 valve closed
1/10/2012	9:45:12 PM	BCl3 valve closed
1/10/2012	9:45:12 PM	PH3 valve closed
1/10/2012	9:45:12 PM	SiCl4 pre valve closed
1/10/2012	9:45:12 PM	SiCl4 post valve closed
1/10/2012	9:45:12 PM	Bypass valve closed
1/10/2012	9:45:12 PM	Bubbler valve closed
1/10/2012	9:45:12 PM	Main Vac valve opened
1/10/2012	9:45:12 PM	Helium MFC set to  0.000000
1/10/2012	9:45:12 PM	H2 MFC set to  0.000000
1/10/2012	9:45:12 PM	BCl3 MFC set to  0.000000
1/10/2012	9:45:12 PM	PH3 MFC set to  0.000000
1/10/2012	9:45:12 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:45:12 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:45:12 PM	Tube furnace set to 200
1/10/2012	9:45:42 PM	H2 valve closed
1/10/2012	9:45:42 PM	BCl3 valve closed
1/10/2012	9:45:42 PM	PH3 valve closed
1/10/2012	9:45:42 PM	SiCl4 pre valve closed
1/10/2012	9:45:42 PM	SiCl4 post valve closed
1/10/2012	9:45:42 PM	Bypass valve closed
1/10/2012	9:45:42 PM	Bubbler valve closed
1/10/2012	9:45:42 PM	Helium valve opened
1/10/2012	9:45:42 PM	Main Vac valve opened
1/10/2012	9:45:42 PM	Helium MFC set to  20.000000
1/10/2012	9:45:42 PM	H2 MFC set to  0.000000
1/10/2012	9:45:42 PM	BCl3 MFC set to  0.000000
1/10/2012	9:45:42 PM	PH3 MFC set to  0.000000
1/10/2012	9:45:43 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:45:43 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:45:43 PM	Tube furnace set to 200
1/10/2012	9:46:13 PM	Helium valve closed
1/10/2012	9:46:13 PM	H2 valve closed
1/10/2012	9:46:13 PM	BCl3 valve closed
1/10/2012	9:46:13 PM	PH3 valve closed
1/10/2012	9:46:13 PM	SiCl4 pre valve closed
1/10/2012	9:46:13 PM	SiCl4 post valve closed
1/10/2012	9:46:13 PM	Bypass valve closed
1/10/2012	9:46:13 PM	Bubbler valve closed
1/10/2012	9:46:13 PM	Main Vac valve opened
1/10/2012	9:46:13 PM	Helium MFC set to  0.000000
1/10/2012	9:46:13 PM	H2 MFC set to  0.000000
1/10/2012	9:46:13 PM	BCl3 MFC set to  0.000000
1/10/2012	9:46:13 PM	PH3 MFC set to  0.000000
1/10/2012	9:46:13 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:46:13 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:46:13 PM	Tube furnace set to 200
1/10/2012	9:46:43 PM	H2 valve closed
1/10/2012	9:46:43 PM	BCl3 valve closed
1/10/2012	9:46:43 PM	PH3 valve closed
1/10/2012	9:46:43 PM	SiCl4 pre valve closed
1/10/2012	9:46:43 PM	SiCl4 post valve closed
1/10/2012	9:46:43 PM	Bypass valve closed
1/10/2012	9:46:43 PM	Bubbler valve closed
1/10/2012	9:46:43 PM	Helium valve opened
1/10/2012	9:46:43 PM	Main Vac valve opened
1/10/2012	9:46:43 PM	Helium MFC set to  20.000000
1/10/2012	9:46:43 PM	H2 MFC set to  0.000000
1/10/2012	9:46:43 PM	BCl3 MFC set to  0.000000
1/10/2012	9:46:43 PM	PH3 MFC set to  0.000000
1/10/2012	9:46:43 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:46:43 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:46:43 PM	Tube furnace set to 200
1/10/2012	9:47:13 PM	Helium valve closed
1/10/2012	9:47:13 PM	H2 valve closed
1/10/2012	9:47:13 PM	BCl3 valve closed
1/10/2012	9:47:13 PM	PH3 valve closed
1/10/2012	9:47:13 PM	SiCl4 pre valve closed
1/10/2012	9:47:13 PM	SiCl4 post valve closed
1/10/2012	9:47:13 PM	Bypass valve closed
1/10/2012	9:47:13 PM	Bubbler valve closed
1/10/2012	9:47:13 PM	Main Vac valve opened
1/10/2012	9:47:13 PM	Helium MFC set to  0.000000
1/10/2012	9:47:13 PM	H2 MFC set to  0.000000
1/10/2012	9:47:13 PM	BCl3 MFC set to  0.000000
1/10/2012	9:47:13 PM	PH3 MFC set to  0.000000
1/10/2012	9:47:13 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:47:13 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:47:13 PM	Tube furnace set to 200
1/10/2012	9:47:43 PM	H2 valve closed
1/10/2012	9:47:43 PM	BCl3 valve closed
1/10/2012	9:47:43 PM	PH3 valve closed
1/10/2012	9:47:43 PM	SiCl4 pre valve closed
1/10/2012	9:47:43 PM	SiCl4 post valve closed
1/10/2012	9:47:43 PM	Bypass valve closed
1/10/2012	9:47:43 PM	Bubbler valve closed
1/10/2012	9:47:43 PM	Helium valve opened
1/10/2012	9:47:43 PM	Main Vac valve opened
1/10/2012	9:47:43 PM	Helium MFC set to  20.000000
1/10/2012	9:47:43 PM	H2 MFC set to  0.000000
1/10/2012	9:47:43 PM	BCl3 MFC set to  0.000000
1/10/2012	9:47:43 PM	PH3 MFC set to  0.000000
1/10/2012	9:47:43 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:47:43 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:47:43 PM	Tube furnace set to 200
1/10/2012	9:48:13 PM	Helium valve closed
1/10/2012	9:48:13 PM	H2 valve closed
1/10/2012	9:48:13 PM	BCl3 valve closed
1/10/2012	9:48:13 PM	PH3 valve closed
1/10/2012	9:48:13 PM	SiCl4 pre valve closed
1/10/2012	9:48:13 PM	SiCl4 post valve closed
1/10/2012	9:48:13 PM	Bypass valve closed
1/10/2012	9:48:13 PM	Bubbler valve closed
1/10/2012	9:48:14 PM	Main Vac valve opened
1/10/2012	9:48:14 PM	Helium MFC set to  0.000000
1/10/2012	9:48:14 PM	H2 MFC set to  0.000000
1/10/2012	9:48:14 PM	BCl3 MFC set to  0.000000
1/10/2012	9:48:14 PM	PH3 MFC set to  0.000000
1/10/2012	9:48:14 PM	SiCl4 MFC set to  0.000000
1/10/2012	9:48:14 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	9:48:14 PM	Tube furnace set to 0
1/10/2012	9:48:15 PM	Run finished at 9:48 PM
1/10/2012	10:02:55 PM	Main Vac valve closed
1/10/2012	10:03:05 PM	Main Vac valve opened
1/10/2012	10:03:19 PM	Recipe started at 10:03 PM
1/10/2012	10:03:19 PM	Helium valve closed
1/10/2012	10:03:19 PM	H2 valve closed
1/10/2012	10:03:19 PM	BCl3 valve closed
1/10/2012	10:03:19 PM	PH3 valve closed
1/10/2012	10:03:19 PM	SiCl4 pre valve closed
1/10/2012	10:03:19 PM	SiCl4 post valve closed
1/10/2012	10:03:19 PM	Bypass valve closed
1/10/2012	10:03:19 PM	Bubbler valve closed
1/10/2012	10:03:19 PM	Main Vac valve opened
1/10/2012	10:03:19 PM	Helium MFC set to  0.000000
1/10/2012	10:03:19 PM	H2 MFC set to  0.000000
1/10/2012	10:03:19 PM	BCl3 MFC set to  0.000000
1/10/2012	10:03:19 PM	PH3 MFC set to  0.000000
1/10/2012	10:03:19 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:03:19 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:03:19 PM	Tube furnace set to 0
1/10/2012	10:03:22 PM	H2 valve closed
1/10/2012	10:03:22 PM	BCl3 valve closed
1/10/2012	10:03:22 PM	PH3 valve closed
1/10/2012	10:03:22 PM	SiCl4 pre valve closed
1/10/2012	10:03:22 PM	SiCl4 post valve closed
1/10/2012	10:03:22 PM	Bypass valve closed
1/10/2012	10:03:22 PM	Bubbler valve closed
1/10/2012	10:03:22 PM	Helium valve opened
1/10/2012	10:03:22 PM	Main Vac valve opened
1/10/2012	10:03:22 PM	Helium MFC set to  20.000000
1/10/2012	10:03:22 PM	H2 MFC set to  0.000000
1/10/2012	10:03:22 PM	BCl3 MFC set to  0.000000
1/10/2012	10:03:22 PM	PH3 MFC set to  0.000000
1/10/2012	10:03:22 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:03:22 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:03:22 PM	Tube furnace set to 0
1/10/2012	10:03:23 PM	Helium valve closed
1/10/2012	10:03:23 PM	H2 valve closed
1/10/2012	10:03:23 PM	BCl3 valve closed
1/10/2012	10:03:23 PM	PH3 valve closed
1/10/2012	10:03:23 PM	SiCl4 pre valve closed
1/10/2012	10:03:23 PM	SiCl4 post valve closed
1/10/2012	10:03:23 PM	Bypass valve closed
1/10/2012	10:03:23 PM	Bubbler valve closed
1/10/2012	10:03:23 PM	Main Vac valve opened
1/10/2012	10:03:23 PM	Helium MFC set to  0.000000
1/10/2012	10:03:23 PM	H2 MFC set to  0.000000
1/10/2012	10:03:23 PM	BCl3 MFC set to  0.000000
1/10/2012	10:03:23 PM	PH3 MFC set to  0.000000
1/10/2012	10:03:23 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:03:23 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:03:23 PM	Tube furnace set to 0
1/10/2012	10:03:24 PM	H2 valve closed
1/10/2012	10:03:24 PM	BCl3 valve closed
1/10/2012	10:03:24 PM	PH3 valve closed
1/10/2012	10:03:24 PM	SiCl4 pre valve closed
1/10/2012	10:03:24 PM	SiCl4 post valve closed
1/10/2012	10:03:24 PM	Bypass valve closed
1/10/2012	10:03:24 PM	Bubbler valve closed
1/10/2012	10:03:24 PM	Helium valve opened
1/10/2012	10:03:24 PM	Main Vac valve opened
1/10/2012	10:03:24 PM	Helium MFC set to  20.000000
1/10/2012	10:03:24 PM	H2 MFC set to  0.000000
1/10/2012	10:03:24 PM	BCl3 MFC set to  0.000000
1/10/2012	10:03:24 PM	PH3 MFC set to  0.000000
1/10/2012	10:03:24 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:03:24 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:03:24 PM	Tube furnace set to 0
1/10/2012	10:03:24 PM	Helium valve closed
1/10/2012	10:03:24 PM	H2 valve closed
1/10/2012	10:03:24 PM	BCl3 valve closed
1/10/2012	10:03:24 PM	PH3 valve closed
1/10/2012	10:03:24 PM	SiCl4 pre valve closed
1/10/2012	10:03:24 PM	SiCl4 post valve closed
1/10/2012	10:03:24 PM	Bypass valve closed
1/10/2012	10:03:24 PM	Bubbler valve closed
1/10/2012	10:03:24 PM	Main Vac valve opened
1/10/2012	10:03:24 PM	Helium MFC set to  0.000000
1/10/2012	10:03:24 PM	H2 MFC set to  0.000000
1/10/2012	10:03:24 PM	BCl3 MFC set to  0.000000
1/10/2012	10:03:24 PM	PH3 MFC set to  0.000000
1/10/2012	10:03:24 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:03:24 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:03:25 PM	Tube furnace set to 0
1/10/2012	10:03:25 PM	H2 valve closed
1/10/2012	10:03:25 PM	BCl3 valve closed
1/10/2012	10:03:25 PM	PH3 valve closed
1/10/2012	10:03:25 PM	SiCl4 pre valve closed
1/10/2012	10:03:25 PM	SiCl4 post valve closed
1/10/2012	10:03:25 PM	Bypass valve closed
1/10/2012	10:03:25 PM	Bubbler valve closed
1/10/2012	10:03:25 PM	Helium valve opened
1/10/2012	10:03:25 PM	Main Vac valve opened
1/10/2012	10:03:25 PM	Helium MFC set to  20.000000
1/10/2012	10:03:25 PM	H2 MFC set to  0.000000
1/10/2012	10:03:25 PM	BCl3 MFC set to  0.000000
1/10/2012	10:03:25 PM	PH3 MFC set to  0.000000
1/10/2012	10:03:25 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:03:25 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:03:25 PM	Tube furnace set to 0
1/10/2012	10:03:55 PM	Helium valve closed
1/10/2012	10:03:55 PM	H2 valve closed
1/10/2012	10:03:56 PM	BCl3 valve closed
1/10/2012	10:03:56 PM	PH3 valve closed
1/10/2012	10:03:56 PM	SiCl4 pre valve closed
1/10/2012	10:03:56 PM	SiCl4 post valve closed
1/10/2012	10:03:56 PM	Bypass valve closed
1/10/2012	10:03:56 PM	Bubbler valve closed
1/10/2012	10:03:56 PM	Main Vac valve opened
1/10/2012	10:03:56 PM	Helium MFC set to  0.000000
1/10/2012	10:03:56 PM	H2 MFC set to  0.000000
1/10/2012	10:03:56 PM	BCl3 MFC set to  0.000000
1/10/2012	10:03:56 PM	PH3 MFC set to  0.000000
1/10/2012	10:03:56 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:03:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:03:56 PM	Tube furnace set to 0
1/10/2012	10:04:26 PM	H2 valve closed
1/10/2012	10:04:26 PM	BCl3 valve closed
1/10/2012	10:04:26 PM	PH3 valve closed
1/10/2012	10:04:26 PM	SiCl4 pre valve closed
1/10/2012	10:04:26 PM	SiCl4 post valve closed
1/10/2012	10:04:26 PM	Bypass valve closed
1/10/2012	10:04:26 PM	Bubbler valve closed
1/10/2012	10:04:26 PM	Helium valve opened
1/10/2012	10:04:26 PM	Main Vac valve opened
1/10/2012	10:04:26 PM	Helium MFC set to  20.000000
1/10/2012	10:04:26 PM	H2 MFC set to  0.000000
1/10/2012	10:04:26 PM	BCl3 MFC set to  0.000000
1/10/2012	10:04:26 PM	PH3 MFC set to  0.000000
1/10/2012	10:04:26 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:04:26 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:04:26 PM	Tube furnace set to 0
1/10/2012	10:04:56 PM	Helium valve closed
1/10/2012	10:04:56 PM	H2 valve closed
1/10/2012	10:04:56 PM	BCl3 valve closed
1/10/2012	10:04:56 PM	PH3 valve closed
1/10/2012	10:04:56 PM	SiCl4 pre valve closed
1/10/2012	10:04:56 PM	SiCl4 post valve closed
1/10/2012	10:04:56 PM	Bypass valve closed
1/10/2012	10:04:56 PM	Bubbler valve closed
1/10/2012	10:04:56 PM	Main Vac valve opened
1/10/2012	10:04:56 PM	Helium MFC set to  0.000000
1/10/2012	10:04:56 PM	H2 MFC set to  0.000000
1/10/2012	10:04:56 PM	BCl3 MFC set to  0.000000
1/10/2012	10:04:56 PM	PH3 MFC set to  0.000000
1/10/2012	10:04:56 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:04:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:04:56 PM	Tube furnace set to 0
1/10/2012	10:05:26 PM	H2 valve closed
1/10/2012	10:05:26 PM	BCl3 valve closed
1/10/2012	10:05:26 PM	PH3 valve closed
1/10/2012	10:05:26 PM	SiCl4 pre valve closed
1/10/2012	10:05:26 PM	SiCl4 post valve closed
1/10/2012	10:05:26 PM	Bypass valve closed
1/10/2012	10:05:26 PM	Bubbler valve closed
1/10/2012	10:05:26 PM	Helium valve opened
1/10/2012	10:05:26 PM	Main Vac valve opened
1/10/2012	10:05:26 PM	Helium MFC set to  20.000000
1/10/2012	10:05:26 PM	H2 MFC set to  0.000000
1/10/2012	10:05:26 PM	BCl3 MFC set to  0.000000
1/10/2012	10:05:26 PM	PH3 MFC set to  0.000000
1/10/2012	10:05:26 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:05:26 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:05:26 PM	Tube furnace set to 0
1/10/2012	10:05:56 PM	Helium valve closed
1/10/2012	10:05:56 PM	H2 valve closed
1/10/2012	10:05:56 PM	BCl3 valve closed
1/10/2012	10:05:56 PM	PH3 valve closed
1/10/2012	10:05:56 PM	SiCl4 pre valve closed
1/10/2012	10:05:56 PM	SiCl4 post valve closed
1/10/2012	10:05:56 PM	Bypass valve closed
1/10/2012	10:05:56 PM	Bubbler valve closed
1/10/2012	10:05:56 PM	Main Vac valve opened
1/10/2012	10:05:56 PM	Helium MFC set to  0.000000
1/10/2012	10:05:56 PM	H2 MFC set to  0.000000
1/10/2012	10:05:56 PM	BCl3 MFC set to  0.000000
1/10/2012	10:05:56 PM	PH3 MFC set to  0.000000
1/10/2012	10:05:56 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:05:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:05:57 PM	Tube furnace set to 0
1/10/2012	10:06:27 PM	H2 valve closed
1/10/2012	10:06:27 PM	BCl3 valve closed
1/10/2012	10:06:27 PM	PH3 valve closed
1/10/2012	10:06:27 PM	SiCl4 pre valve closed
1/10/2012	10:06:27 PM	SiCl4 post valve closed
1/10/2012	10:06:27 PM	Bypass valve closed
1/10/2012	10:06:27 PM	Bubbler valve closed
1/10/2012	10:06:27 PM	Helium valve opened
1/10/2012	10:06:27 PM	Main Vac valve opened
1/10/2012	10:06:27 PM	Helium MFC set to  20.000000
1/10/2012	10:06:27 PM	H2 MFC set to  0.000000
1/10/2012	10:06:27 PM	BCl3 MFC set to  0.000000
1/10/2012	10:06:27 PM	PH3 MFC set to  0.000000
1/10/2012	10:06:27 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:06:27 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:06:27 PM	Tube furnace set to 0
1/10/2012	10:06:57 PM	Helium valve closed
1/10/2012	10:06:57 PM	H2 valve closed
1/10/2012	10:06:57 PM	BCl3 valve closed
1/10/2012	10:06:57 PM	PH3 valve closed
1/10/2012	10:06:57 PM	SiCl4 pre valve closed
1/10/2012	10:06:57 PM	SiCl4 post valve closed
1/10/2012	10:06:57 PM	Bypass valve closed
1/10/2012	10:06:57 PM	Bubbler valve closed
1/10/2012	10:06:57 PM	Main Vac valve opened
1/10/2012	10:06:57 PM	Helium MFC set to  0.000000
1/10/2012	10:06:57 PM	H2 MFC set to  0.000000
1/10/2012	10:06:57 PM	BCl3 MFC set to  0.000000
1/10/2012	10:06:57 PM	PH3 MFC set to  0.000000
1/10/2012	10:06:57 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:06:57 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:06:57 PM	Tube furnace set to 0
1/10/2012	10:07:27 PM	H2 valve closed
1/10/2012	10:07:27 PM	BCl3 valve closed
1/10/2012	10:07:27 PM	PH3 valve closed
1/10/2012	10:07:27 PM	SiCl4 pre valve closed
1/10/2012	10:07:27 PM	SiCl4 post valve closed
1/10/2012	10:07:27 PM	Bypass valve closed
1/10/2012	10:07:27 PM	Bubbler valve closed
1/10/2012	10:07:27 PM	Helium valve opened
1/10/2012	10:07:27 PM	Main Vac valve opened
1/10/2012	10:07:27 PM	Helium MFC set to  20.000000
1/10/2012	10:07:27 PM	H2 MFC set to  0.000000
1/10/2012	10:07:27 PM	BCl3 MFC set to  0.000000
1/10/2012	10:07:27 PM	PH3 MFC set to  0.000000
1/10/2012	10:07:27 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:07:27 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:07:27 PM	Tube furnace set to 0
1/10/2012	10:07:57 PM	Helium valve closed
1/10/2012	10:07:57 PM	H2 valve closed
1/10/2012	10:07:57 PM	BCl3 valve closed
1/10/2012	10:07:57 PM	PH3 valve closed
1/10/2012	10:07:57 PM	SiCl4 pre valve closed
1/10/2012	10:07:57 PM	SiCl4 post valve closed
1/10/2012	10:07:57 PM	Bypass valve closed
1/10/2012	10:07:57 PM	Bubbler valve closed
1/10/2012	10:07:57 PM	Main Vac valve opened
1/10/2012	10:07:57 PM	Helium MFC set to  0.000000
1/10/2012	10:07:57 PM	H2 MFC set to  0.000000
1/10/2012	10:07:57 PM	BCl3 MFC set to  0.000000
1/10/2012	10:07:57 PM	PH3 MFC set to  0.000000
1/10/2012	10:07:57 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:07:57 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:07:57 PM	Tube furnace set to 0
1/10/2012	10:08:27 PM	H2 valve closed
1/10/2012	10:08:27 PM	BCl3 valve closed
1/10/2012	10:08:27 PM	PH3 valve closed
1/10/2012	10:08:27 PM	SiCl4 pre valve closed
1/10/2012	10:08:27 PM	SiCl4 post valve closed
1/10/2012	10:08:27 PM	Bypass valve closed
1/10/2012	10:08:27 PM	Bubbler valve closed
1/10/2012	10:08:27 PM	Helium valve opened
1/10/2012	10:08:27 PM	Main Vac valve opened
1/10/2012	10:08:27 PM	Helium MFC set to  20.000000
1/10/2012	10:08:27 PM	H2 MFC set to  0.000000
1/10/2012	10:08:27 PM	BCl3 MFC set to  0.000000
1/10/2012	10:08:27 PM	PH3 MFC set to  0.000000
1/10/2012	10:08:27 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:08:27 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:08:28 PM	Tube furnace set to 0
1/10/2012	10:08:58 PM	Helium valve closed
1/10/2012	10:08:58 PM	H2 valve closed
1/10/2012	10:08:58 PM	BCl3 valve closed
1/10/2012	10:08:58 PM	PH3 valve closed
1/10/2012	10:08:58 PM	SiCl4 pre valve closed
1/10/2012	10:08:58 PM	SiCl4 post valve closed
1/10/2012	10:08:58 PM	Bypass valve closed
1/10/2012	10:08:58 PM	Bubbler valve closed
1/10/2012	10:08:58 PM	Main Vac valve opened
1/10/2012	10:08:58 PM	Helium MFC set to  0.000000
1/10/2012	10:08:58 PM	H2 MFC set to  0.000000
1/10/2012	10:08:58 PM	BCl3 MFC set to  0.000000
1/10/2012	10:08:58 PM	PH3 MFC set to  0.000000
1/10/2012	10:08:58 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:08:58 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:08:58 PM	Tube furnace set to 0
1/10/2012	10:09:28 PM	H2 valve closed
1/10/2012	10:09:28 PM	BCl3 valve closed
1/10/2012	10:09:28 PM	PH3 valve closed
1/10/2012	10:09:28 PM	SiCl4 pre valve closed
1/10/2012	10:09:28 PM	SiCl4 post valve closed
1/10/2012	10:09:28 PM	Bypass valve closed
1/10/2012	10:09:28 PM	Bubbler valve closed
1/10/2012	10:09:28 PM	Helium valve opened
1/10/2012	10:09:28 PM	Main Vac valve opened
1/10/2012	10:09:28 PM	Helium MFC set to  20.000000
1/10/2012	10:09:28 PM	H2 MFC set to  0.000000
1/10/2012	10:09:28 PM	BCl3 MFC set to  0.000000
1/10/2012	10:09:28 PM	PH3 MFC set to  0.000000
1/10/2012	10:09:28 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:09:28 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:09:28 PM	Tube furnace set to 0
1/10/2012	10:09:58 PM	Helium valve closed
1/10/2012	10:09:58 PM	H2 valve closed
1/10/2012	10:09:58 PM	BCl3 valve closed
1/10/2012	10:09:58 PM	PH3 valve closed
1/10/2012	10:09:58 PM	SiCl4 pre valve closed
1/10/2012	10:09:58 PM	SiCl4 post valve closed
1/10/2012	10:09:58 PM	Bypass valve closed
1/10/2012	10:09:58 PM	Bubbler valve closed
1/10/2012	10:09:58 PM	Main Vac valve opened
1/10/2012	10:09:58 PM	Helium MFC set to  0.000000
1/10/2012	10:09:58 PM	H2 MFC set to  0.000000
1/10/2012	10:09:58 PM	BCl3 MFC set to  0.000000
1/10/2012	10:09:58 PM	PH3 MFC set to  0.000000
1/10/2012	10:09:58 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:09:58 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:09:58 PM	Tube furnace set to 200
1/10/2012	10:10:28 PM	H2 valve closed
1/10/2012	10:10:28 PM	BCl3 valve closed
1/10/2012	10:10:28 PM	PH3 valve closed
1/10/2012	10:10:28 PM	SiCl4 pre valve closed
1/10/2012	10:10:28 PM	SiCl4 post valve closed
1/10/2012	10:10:28 PM	Bypass valve closed
1/10/2012	10:10:28 PM	Bubbler valve closed
1/10/2012	10:10:28 PM	Helium valve opened
1/10/2012	10:10:28 PM	Main Vac valve opened
1/10/2012	10:10:28 PM	Helium MFC set to  20.000000
1/10/2012	10:10:28 PM	H2 MFC set to  0.000000
1/10/2012	10:10:28 PM	BCl3 MFC set to  0.000000
1/10/2012	10:10:28 PM	PH3 MFC set to  0.000000
1/10/2012	10:10:28 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:10:28 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:10:28 PM	Tube furnace set to 200
1/10/2012	10:10:58 PM	Helium valve closed
1/10/2012	10:10:58 PM	H2 valve closed
1/10/2012	10:10:58 PM	BCl3 valve closed
1/10/2012	10:10:58 PM	PH3 valve closed
1/10/2012	10:10:58 PM	SiCl4 pre valve closed
1/10/2012	10:10:58 PM	SiCl4 post valve closed
1/10/2012	10:10:58 PM	Bypass valve closed
1/10/2012	10:10:58 PM	Bubbler valve closed
1/10/2012	10:10:58 PM	Main Vac valve opened
1/10/2012	10:10:58 PM	Helium MFC set to  0.000000
1/10/2012	10:10:58 PM	H2 MFC set to  0.000000
1/10/2012	10:10:58 PM	BCl3 MFC set to  0.000000
1/10/2012	10:10:58 PM	PH3 MFC set to  0.000000
1/10/2012	10:10:58 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:10:59 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:10:59 PM	Tube furnace set to 200
1/10/2012	10:11:29 PM	H2 valve closed
1/10/2012	10:11:29 PM	BCl3 valve closed
1/10/2012	10:11:29 PM	PH3 valve closed
1/10/2012	10:11:29 PM	SiCl4 pre valve closed
1/10/2012	10:11:29 PM	SiCl4 post valve closed
1/10/2012	10:11:29 PM	Bypass valve closed
1/10/2012	10:11:29 PM	Bubbler valve closed
1/10/2012	10:11:29 PM	Helium valve opened
1/10/2012	10:11:29 PM	Main Vac valve opened
1/10/2012	10:11:29 PM	Helium MFC set to  20.000000
1/10/2012	10:11:29 PM	H2 MFC set to  0.000000
1/10/2012	10:11:29 PM	BCl3 MFC set to  0.000000
1/10/2012	10:11:29 PM	PH3 MFC set to  0.000000
1/10/2012	10:11:29 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:11:29 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:11:29 PM	Tube furnace set to 200
1/10/2012	10:11:59 PM	Helium valve closed
1/10/2012	10:11:59 PM	H2 valve closed
1/10/2012	10:11:59 PM	BCl3 valve closed
1/10/2012	10:11:59 PM	PH3 valve closed
1/10/2012	10:11:59 PM	SiCl4 pre valve closed
1/10/2012	10:11:59 PM	SiCl4 post valve closed
1/10/2012	10:11:59 PM	Bypass valve closed
1/10/2012	10:11:59 PM	Bubbler valve closed
1/10/2012	10:11:59 PM	Main Vac valve opened
1/10/2012	10:11:59 PM	Helium MFC set to  0.000000
1/10/2012	10:11:59 PM	H2 MFC set to  0.000000
1/10/2012	10:11:59 PM	BCl3 MFC set to  0.000000
1/10/2012	10:11:59 PM	PH3 MFC set to  0.000000
1/10/2012	10:11:59 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:11:59 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:11:59 PM	Tube furnace set to 200
1/10/2012	10:12:29 PM	H2 valve closed
1/10/2012	10:12:29 PM	BCl3 valve closed
1/10/2012	10:12:29 PM	PH3 valve closed
1/10/2012	10:12:29 PM	SiCl4 pre valve closed
1/10/2012	10:12:29 PM	SiCl4 post valve closed
1/10/2012	10:12:29 PM	Bypass valve closed
1/10/2012	10:12:29 PM	Bubbler valve closed
1/10/2012	10:12:29 PM	Helium valve opened
1/10/2012	10:12:29 PM	Main Vac valve opened
1/10/2012	10:12:29 PM	Helium MFC set to  20.000000
1/10/2012	10:12:29 PM	H2 MFC set to  0.000000
1/10/2012	10:12:29 PM	BCl3 MFC set to  0.000000
1/10/2012	10:12:29 PM	PH3 MFC set to  0.000000
1/10/2012	10:12:29 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:12:29 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:12:29 PM	Tube furnace set to 200
1/10/2012	10:12:59 PM	Helium valve closed
1/10/2012	10:12:59 PM	H2 valve closed
1/10/2012	10:12:59 PM	BCl3 valve closed
1/10/2012	10:12:59 PM	PH3 valve closed
1/10/2012	10:12:59 PM	SiCl4 pre valve closed
1/10/2012	10:12:59 PM	SiCl4 post valve closed
1/10/2012	10:12:59 PM	Bypass valve closed
1/10/2012	10:12:59 PM	Bubbler valve closed
1/10/2012	10:12:59 PM	Main Vac valve opened
1/10/2012	10:12:59 PM	Helium MFC set to  0.000000
1/10/2012	10:12:59 PM	H2 MFC set to  0.000000
1/10/2012	10:12:59 PM	BCl3 MFC set to  0.000000
1/10/2012	10:12:59 PM	PH3 MFC set to  0.000000
1/10/2012	10:12:59 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:12:59 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:13:00 PM	Tube furnace set to 200
1/10/2012	10:13:30 PM	H2 valve closed
1/10/2012	10:13:30 PM	BCl3 valve closed
1/10/2012	10:13:30 PM	PH3 valve closed
1/10/2012	10:13:30 PM	SiCl4 pre valve closed
1/10/2012	10:13:30 PM	SiCl4 post valve closed
1/10/2012	10:13:30 PM	Bypass valve closed
1/10/2012	10:13:30 PM	Bubbler valve closed
1/10/2012	10:13:30 PM	Helium valve opened
1/10/2012	10:13:30 PM	Main Vac valve opened
1/10/2012	10:13:30 PM	Helium MFC set to  20.000000
1/10/2012	10:13:30 PM	H2 MFC set to  0.000000
1/10/2012	10:13:30 PM	BCl3 MFC set to  0.000000
1/10/2012	10:13:30 PM	PH3 MFC set to  0.000000
1/10/2012	10:13:30 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:13:30 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:13:30 PM	Tube furnace set to 200
1/10/2012	10:14:00 PM	Helium valve closed
1/10/2012	10:14:00 PM	H2 valve closed
1/10/2012	10:14:00 PM	BCl3 valve closed
1/10/2012	10:14:00 PM	PH3 valve closed
1/10/2012	10:14:00 PM	SiCl4 pre valve closed
1/10/2012	10:14:00 PM	SiCl4 post valve closed
1/10/2012	10:14:00 PM	Bypass valve closed
1/10/2012	10:14:00 PM	Bubbler valve closed
1/10/2012	10:14:00 PM	Main Vac valve opened
1/10/2012	10:14:00 PM	Helium MFC set to  0.000000
1/10/2012	10:14:00 PM	H2 MFC set to  0.000000
1/10/2012	10:14:00 PM	BCl3 MFC set to  0.000000
1/10/2012	10:14:00 PM	PH3 MFC set to  0.000000
1/10/2012	10:14:00 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:14:00 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:14:00 PM	Tube furnace set to 200
1/10/2012	10:14:30 PM	H2 valve closed
1/10/2012	10:14:30 PM	BCl3 valve closed
1/10/2012	10:14:30 PM	PH3 valve closed
1/10/2012	10:14:30 PM	SiCl4 pre valve closed
1/10/2012	10:14:30 PM	SiCl4 post valve closed
1/10/2012	10:14:30 PM	Bypass valve closed
1/10/2012	10:14:30 PM	Bubbler valve closed
1/10/2012	10:14:30 PM	Helium valve opened
1/10/2012	10:14:30 PM	Main Vac valve opened
1/10/2012	10:14:30 PM	Helium MFC set to  20.000000
1/10/2012	10:14:30 PM	H2 MFC set to  0.000000
1/10/2012	10:14:30 PM	BCl3 MFC set to  0.000000
1/10/2012	10:14:30 PM	PH3 MFC set to  0.000000
1/10/2012	10:14:30 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:14:30 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:14:30 PM	Tube furnace set to 200
1/10/2012	10:15:00 PM	Helium valve closed
1/10/2012	10:15:00 PM	H2 valve closed
1/10/2012	10:15:00 PM	BCl3 valve closed
1/10/2012	10:15:00 PM	PH3 valve closed
1/10/2012	10:15:00 PM	SiCl4 pre valve closed
1/10/2012	10:15:00 PM	SiCl4 post valve closed
1/10/2012	10:15:00 PM	Bypass valve closed
1/10/2012	10:15:00 PM	Bubbler valve closed
1/10/2012	10:15:00 PM	Main Vac valve opened
1/10/2012	10:15:00 PM	Helium MFC set to  0.000000
1/10/2012	10:15:00 PM	H2 MFC set to  0.000000
1/10/2012	10:15:00 PM	BCl3 MFC set to  0.000000
1/10/2012	10:15:00 PM	PH3 MFC set to  0.000000
1/10/2012	10:15:00 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:15:00 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:15:00 PM	Tube furnace set to 200
1/10/2012	10:15:30 PM	H2 valve closed
1/10/2012	10:15:30 PM	BCl3 valve closed
1/10/2012	10:15:30 PM	PH3 valve closed
1/10/2012	10:15:30 PM	SiCl4 pre valve closed
1/10/2012	10:15:30 PM	SiCl4 post valve closed
1/10/2012	10:15:30 PM	Bypass valve closed
1/10/2012	10:15:30 PM	Bubbler valve closed
1/10/2012	10:15:30 PM	Helium valve opened
1/10/2012	10:15:30 PM	Main Vac valve opened
1/10/2012	10:15:30 PM	Helium MFC set to  20.000000
1/10/2012	10:15:30 PM	H2 MFC set to  0.000000
1/10/2012	10:15:30 PM	BCl3 MFC set to  0.000000
1/10/2012	10:15:30 PM	PH3 MFC set to  0.000000
1/10/2012	10:15:30 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:15:30 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:15:31 PM	Tube furnace set to 200
1/10/2012	10:16:01 PM	Helium valve closed
1/10/2012	10:16:01 PM	H2 valve closed
1/10/2012	10:16:01 PM	BCl3 valve closed
1/10/2012	10:16:01 PM	PH3 valve closed
1/10/2012	10:16:01 PM	SiCl4 pre valve closed
1/10/2012	10:16:01 PM	SiCl4 post valve closed
1/10/2012	10:16:01 PM	Bypass valve closed
1/10/2012	10:16:01 PM	Bubbler valve closed
1/10/2012	10:16:01 PM	Main Vac valve opened
1/10/2012	10:16:01 PM	Helium MFC set to  0.000000
1/10/2012	10:16:01 PM	H2 MFC set to  0.000000
1/10/2012	10:16:01 PM	BCl3 MFC set to  0.000000
1/10/2012	10:16:01 PM	PH3 MFC set to  0.000000
1/10/2012	10:16:01 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:16:01 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:16:01 PM	Tube furnace set to 0
1/10/2012	10:16:02 PM	Run finished at 10:16 PM
1/10/2012	10:38:51 PM	Main Vac valve closed
1/10/2012	10:39:03 PM	Main Vac valve opened
1/10/2012	10:40:18 PM	Recipe started at 10:40 PM
1/10/2012	10:40:18 PM	Helium valve closed
1/10/2012	10:40:18 PM	H2 valve closed
1/10/2012	10:40:18 PM	BCl3 valve closed
1/10/2012	10:40:18 PM	PH3 valve closed
1/10/2012	10:40:18 PM	SiCl4 pre valve closed
1/10/2012	10:40:18 PM	SiCl4 post valve closed
1/10/2012	10:40:18 PM	Main Vac valve closed
1/10/2012	10:40:18 PM	Bypass valve closed
1/10/2012	10:40:18 PM	Bubbler valve closed
1/10/2012	10:40:18 PM	Helium MFC set to  0.000000
1/10/2012	10:40:18 PM	H2 MFC set to  0.000000
1/10/2012	10:40:18 PM	BCl3 MFC set to  0.000000
1/10/2012	10:40:18 PM	PH3 MFC set to  0.000000
1/10/2012	10:40:18 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:40:18 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:40:18 PM	Tube furnace set to 0
1/10/2012	10:40:21 PM	Helium valve closed
1/10/2012	10:40:21 PM	BCl3 valve closed
1/10/2012	10:40:21 PM	PH3 valve closed
1/10/2012	10:40:21 PM	SiCl4 pre valve closed
1/10/2012	10:40:21 PM	SiCl4 post valve closed
1/10/2012	10:40:21 PM	Main Vac valve closed
1/10/2012	10:40:21 PM	Bypass valve closed
1/10/2012	10:40:21 PM	Bubbler valve closed
1/10/2012	10:40:21 PM	H2 valve opened
1/10/2012	10:40:21 PM	Helium MFC set to  0.000000
1/10/2012	10:40:21 PM	H2 MFC set to  500.000000
1/10/2012	10:40:21 PM	BCl3 MFC set to  0.000000
1/10/2012	10:40:21 PM	PH3 MFC set to  0.000000
1/10/2012	10:40:21 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:40:21 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:40:21 PM	Tube furnace set to 0
1/10/2012	10:41:25 PM	Helium valve closed
1/10/2012	10:41:25 PM	BCl3 valve closed
1/10/2012	10:41:25 PM	PH3 valve closed
1/10/2012	10:41:25 PM	SiCl4 pre valve closed
1/10/2012	10:41:25 PM	SiCl4 post valve closed
1/10/2012	10:41:25 PM	Main Vac valve closed
1/10/2012	10:41:25 PM	Bypass valve closed
1/10/2012	10:41:26 PM	H2 valve opened
1/10/2012	10:41:26 PM	Bubbler valve opened
1/10/2012	10:41:26 PM	Helium MFC set to  0.000000
1/10/2012	10:41:26 PM	H2 MFC set to  500.000000
1/10/2012	10:41:26 PM	BCl3 MFC set to  0.000000
1/10/2012	10:41:26 PM	PH3 MFC set to  0.000000
1/10/2012	10:41:26 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:41:26 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:41:26 PM	Tube furnace set to 0
1/10/2012	10:41:27 PM	Helium valve closed
1/10/2012	10:41:27 PM	BCl3 valve closed
1/10/2012	10:41:27 PM	PH3 valve closed
1/10/2012	10:41:27 PM	SiCl4 pre valve closed
1/10/2012	10:41:27 PM	SiCl4 post valve closed
1/10/2012	10:41:27 PM	Main Vac valve closed
1/10/2012	10:41:27 PM	Bypass valve closed
1/10/2012	10:41:27 PM	H2 valve opened
1/10/2012	10:41:27 PM	Bubbler valve opened
1/10/2012	10:41:27 PM	Helium MFC set to  0.000000
1/10/2012	10:41:27 PM	H2 MFC set to  500.000000
1/10/2012	10:41:27 PM	BCl3 MFC set to  0.000000
1/10/2012	10:41:27 PM	PH3 MFC set to  0.000000
1/10/2012	10:41:27 PM	SiCl4 MFC set to  0.000000
1/10/2012	10:41:27 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	10:41:27 PM	Tube furnace set to 1000
1/10/2012	11:01:27 PM	Helium valve closed
1/10/2012	11:01:27 PM	BCl3 valve closed
1/10/2012	11:01:27 PM	Main Vac valve closed
1/10/2012	11:01:27 PM	Bypass valve closed
1/10/2012	11:01:27 PM	H2 valve opened
1/10/2012	11:01:27 PM	PH3 valve opened
1/10/2012	11:01:27 PM	SiCl4 pre valve opened
1/10/2012	11:01:27 PM	SiCl4 post valve opened
1/10/2012	11:01:27 PM	Bubbler valve opened
1/10/2012	11:01:27 PM	Helium MFC set to  0.000000
1/10/2012	11:01:27 PM	H2 MFC set to  500.000000
1/10/2012	11:01:27 PM	BCl3 MFC set to  0.000000
1/10/2012	11:01:27 PM	PH3 MFC set to  0.150000
1/10/2012	11:01:27 PM	SiCl4 MFC set to  25.000000
1/10/2012	11:01:27 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:01:27 PM	Tube furnace set to 1000
1/10/2012	11:33:27 PM	Helium valve closed
1/10/2012	11:33:27 PM	BCl3 valve closed
1/10/2012	11:33:27 PM	PH3 valve closed
1/10/2012	11:33:27 PM	SiCl4 pre valve closed
1/10/2012	11:33:27 PM	SiCl4 post valve closed
1/10/2012	11:33:27 PM	Main Vac valve closed
1/10/2012	11:33:27 PM	Bypass valve closed
1/10/2012	11:33:27 PM	H2 valve opened
1/10/2012	11:33:27 PM	Bubbler valve opened
1/10/2012	11:33:27 PM	Helium MFC set to  0.000000
1/10/2012	11:33:27 PM	H2 MFC set to  500.000000
1/10/2012	11:33:27 PM	BCl3 MFC set to  0.000000
1/10/2012	11:33:27 PM	PH3 MFC set to  0.000000
1/10/2012	11:33:27 PM	SiCl4 MFC set to  0.000000
1/10/2012	11:33:27 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:33:27 PM	Tube furnace set to 950
1/10/2012	11:35:27 PM	Helium valve closed
1/10/2012	11:35:27 PM	BCl3 valve closed
1/10/2012	11:35:27 PM	PH3 valve closed
1/10/2012	11:35:27 PM	SiCl4 pre valve closed
1/10/2012	11:35:27 PM	SiCl4 post valve closed
1/10/2012	11:35:27 PM	Main Vac valve closed
1/10/2012	11:35:27 PM	Bypass valve closed
1/10/2012	11:35:27 PM	H2 valve opened
1/10/2012	11:35:27 PM	Bubbler valve opened
1/10/2012	11:35:27 PM	Helium MFC set to  0.000000
1/10/2012	11:35:27 PM	H2 MFC set to  500.000000
1/10/2012	11:35:27 PM	BCl3 MFC set to  0.000000
1/10/2012	11:35:27 PM	PH3 MFC set to  0.000000
1/10/2012	11:35:27 PM	SiCl4 MFC set to  0.000000
1/10/2012	11:35:27 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:35:27 PM	Tube furnace set to 900
1/10/2012	11:37:27 PM	Helium valve closed
1/10/2012	11:37:27 PM	BCl3 valve closed
1/10/2012	11:37:27 PM	PH3 valve closed
1/10/2012	11:37:27 PM	SiCl4 pre valve closed
1/10/2012	11:37:27 PM	SiCl4 post valve closed
1/10/2012	11:37:27 PM	Main Vac valve closed
1/10/2012	11:37:27 PM	Bypass valve closed
1/10/2012	11:37:27 PM	H2 valve opened
1/10/2012	11:37:27 PM	Bubbler valve opened
1/10/2012	11:37:27 PM	Helium MFC set to  0.000000
1/10/2012	11:37:27 PM	H2 MFC set to  500.000000
1/10/2012	11:37:27 PM	BCl3 MFC set to  0.000000
1/10/2012	11:37:27 PM	PH3 MFC set to  0.000000
1/10/2012	11:37:27 PM	SiCl4 MFC set to  0.000000
1/10/2012	11:37:27 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:37:28 PM	Tube furnace set to 850
1/10/2012	11:39:28 PM	H2 valve closed
1/10/2012	11:39:28 PM	BCl3 valve closed
1/10/2012	11:39:28 PM	PH3 valve closed
1/10/2012	11:39:28 PM	SiCl4 pre valve closed
1/10/2012	11:39:28 PM	SiCl4 post valve closed
1/10/2012	11:39:28 PM	Main Vac valve closed
1/10/2012	11:39:28 PM	Bypass valve closed
1/10/2012	11:39:28 PM	Helium valve opened
1/10/2012	11:39:28 PM	Bubbler valve opened
1/10/2012	11:39:28 PM	Helium MFC set to  500.000000
1/10/2012	11:39:28 PM	H2 MFC set to  0.000000
1/10/2012	11:39:28 PM	BCl3 MFC set to  0.000000
1/10/2012	11:39:28 PM	PH3 MFC set to  0.000000
1/10/2012	11:39:28 PM	SiCl4 MFC set to  0.000000
1/10/2012	11:39:28 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:39:28 PM	Tube furnace set to 800
1/10/2012	11:41:28 PM	H2 valve closed
1/10/2012	11:41:28 PM	BCl3 valve closed
1/10/2012	11:41:28 PM	PH3 valve closed
1/10/2012	11:41:28 PM	SiCl4 pre valve closed
1/10/2012	11:41:28 PM	SiCl4 post valve closed
1/10/2012	11:41:28 PM	Main Vac valve closed
1/10/2012	11:41:28 PM	Bypass valve closed
1/10/2012	11:41:28 PM	Helium valve opened
1/10/2012	11:41:28 PM	Bubbler valve opened
1/10/2012	11:41:28 PM	Helium MFC set to  500.000000
1/10/2012	11:41:28 PM	H2 MFC set to  0.000000
1/10/2012	11:41:28 PM	BCl3 MFC set to  0.000000
1/10/2012	11:41:28 PM	PH3 MFC set to  0.000000
1/10/2012	11:41:28 PM	SiCl4 MFC set to  0.000000
1/10/2012	11:41:28 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:41:28 PM	Tube furnace set to 750
1/10/2012	11:43:28 PM	H2 valve closed
1/10/2012	11:43:28 PM	BCl3 valve closed
1/10/2012	11:43:28 PM	PH3 valve closed
1/10/2012	11:43:28 PM	SiCl4 pre valve closed
1/10/2012	11:43:28 PM	SiCl4 post valve closed
1/10/2012	11:43:28 PM	Main Vac valve closed
1/10/2012	11:43:28 PM	Bypass valve closed
1/10/2012	11:43:28 PM	Helium valve opened
1/10/2012	11:43:28 PM	Bubbler valve opened
1/10/2012	11:43:28 PM	Helium MFC set to  500.000000
1/10/2012	11:43:28 PM	H2 MFC set to  0.000000
1/10/2012	11:43:28 PM	BCl3 MFC set to  0.000000
1/10/2012	11:43:28 PM	PH3 MFC set to  0.000000
1/10/2012	11:43:28 PM	SiCl4 MFC set to  0.000000
1/10/2012	11:43:28 PM	Bypass solenoid MFC set to  0.000000
1/10/2012	11:43:28 PM	Tube furnace set to 0
